C23C18/1619

FORMING METHOD OF HARD MASK, FORMING APPARATUS OF HARD MASK AND RECORDING MEDIUM

A catalyst is imparted selectively to a plateable material portion 32 by performing a catalyst imparting processing on a substrate W having a non-plateable material portion 31 and the plateable material portion 32 formed on a surface thereof. Then, a hard mask layer 35 is formed selectively on the plateable material portion 32 by performing a plating processing on the substrate W. The non-plateable material portion 31 is made of SiO.sub.2 as a main component, and the plateable material portion 32 is made of a material including, as a main component, a material containing at least one of a OCH.sub.x group and a NH.sub.x group, a metal material containing Si as a main component, a material containing carbon as a main component or a catalyst metal material.

Plating apparatus, plating method and storage medium

A plating apparatus can perform a plating process on an entire surface of a substrate uniformly. A plating apparatus 20 includes a substrate holding/rotating device 110 configured to hold and rotate a substrate 2; a discharging device 21 configured to discharge a plating liquid toward the substrate 2 held on the substrate holding/rotating device 110; and a controller 160 configured to control the substrate holding/rotating device 110 and the discharging device 21. Further, the discharging device 21 includes a first nozzle 40 having a multiple number of discharge openings 41 arranged in a radial direction of the substrate 2 or having a discharge opening 42 extended in the radial direction of the substrate 2; and a second nozzle 45 having a discharge opening 46 configured to be positioned closer to a central portion of the substrate 2 than the discharge opening of the first nozzle 40.

Method of electrolessly plating nickel on tubulars
09752232 · 2017-09-05 ·

Tubulars are immersed in electroless nickel coating solution to coat the tubulars. Prior to the coating step the tubulars are blasted with a clean medium and washed and rinsed in alkaline solution. The tubulars are arranged in a bunk for washing, rinsing and coating. LLDPE stretch wrap applied to outer portions of the tubulars prevents coating of the outer portions. The tubulars are electrically separated from the bunk and the coating solution tank, and the tank is provided with anodic protection to prevent coating of the tank. The bunk is provided with a header assembly to provide solution flow through the tubulars via nozzles on the header assembly in addition to flow caused by the vortex effect created by velocity of fluid exiting the nozzles. The bunk is arranged in the solution tank so that the tubulars are at an angle to horizontal to efficiently remove hydrogen gas. Solution flow to the header assembly is filtered to remove particulates.

Method of manufacturing rotary machine, method of plating rotary machine, and rotary machine

Provided is a method of manufacturing a rotary machine, which includes: a casing forming process of forming a casing of the rotary machine that has multiple opening parts and suctions and discharges a fluid; a surface activating process of supplying a pretreatment liquid into the casing, then discharging the pretreatment liquid from the casing through the opening parts, and activating an inner surface of the casing after the casing forming process; a plating process of performing supply and discharge of a plating liquid into and from the easing through the opening parts to circulate the plating liquid and plating the inner surface of the casing after the surface activating process; and an assembling process of providing a rotating body that is rotatable relative to the casing so as to he covered from an outer circumference side by the casing plated in the plating process.

System and Method for Rejuvenating Coated Components of Gas Turbine Engines
20170241267 · 2017-08-24 ·

The present disclosure is directed to a method for rejuvenating a damaged coated component of a gas turbine engine. The method includes uninstalling the damaged coated component from the gas turbine engine. The method also includes isolating a first coated portion of the component of the gas turbine engine from a second coated portion of the component. In addition, the method includes simultaneously depositing a first coating material on the first coated portion of the component and a different, second coating material on the second coated portion of the component. The method also includes reinstalling the rejuvenated coated component into the gas turbine engine.

ELECTRICALLY CONDUCTIVE PROPPANT AND METHODS FOR ENERGIZING AND DETECTING SAME IN A SINGLE WELLBORE
20170226411 · 2017-08-10 ·

Electrically conductive proppant and methods for energizing and detecting the electrically conductive proppant in a single wellbore are disclosed. The methods can include performing numerical simulations solving Maxwell's equations of electromagnetism for electric and/or magnetic fields to determine temporal characteristics of an optimum input wave form and a recording sensor location to be used in a wellbore that extends into a subterranean formation having a fracture that is at least partially filled with proppant and an electrically conductive material, wherein the numerical simulations are based upon an earth model determined from geophysical logs and/or geological information. The method can also include electrically energizing a casing of the wellbore, measuring three dimensional (x, y, and z) components of electric and/or magnetic field responses in the wellbore, and determining a location of the electrically conductive proppant through comparison of the electric and/or magnetic field responses to the numerical simulations.

Plating method, plating apparatus and storage medium

A liquid displacement is performed by supplying a plating liquid onto a substrate 2 while rotating the substrate 2 at a first rotational speed in a state that a pre-treatment liquid remains on a surface of the substrate 2 (liquid displacement process (block S305)). Then, an initial film is formed on the substrate 2 by stopping the rotation of the substrate 2 or by rotating the substrate 2 at a second rotational speed while continuously supplying the plating liquid onto the substrate 2 (incubation process (block S306)). Thereafter, a plating film is grown by rotating the substrate 2 at a third rotational speed while continuously supplying the plating liquid onto the substrate 2 (plating film growing process (block S307)). Here, the first rotational speed is higher than the third rotational speed, and the third rotational speed is higher than the second rotational speed.

SYSTEM AND METHOD FOR CREATING A PATTERN ON A PHOTOVOLTAIC STRUCTURE
20170271536 · 2017-09-21 · ·

A system and method for fabricating a photovoltaic structure is provided. During fabrication, the system can apply a wax coating on at least one surface of a multilayer photovoltaic structure, the surface of the multilayer photovoltaic structure being electrically conductive. The system can then pattern the wax coating using one or more laser beams. The patterned wax coating includes a plurality of openings that expose portions of the electrically conductive surface of the multilayer photovoltaic structure.

METHOD FOR MANUFACTURING WIRING SUBSTRATE AND WIRING SUBSTRATE MANUFACTURED THEREBY
20170253975 · 2017-09-07 ·

Disclosed herein is a method for fabricating a wiring board in which a target substrate having via holes and/or trenches is subjected to an electroless plating process while being immersed in an electroless plating solution to fill the via holes and/or the trenches with a plating metal. The method includes the steps of: supplying the electroless plating solution to under the target substrate; diffusing an oxygen-containing gas into the electroless plating solution supplied under the target substrate; and allowing the electroless plating solution to overflow from over the target substrate.

APPLYING COATINGS TO THE INTERIOR SURFACES OF HEAT EXCHANGERS
20210404754 · 2021-12-30 ·

A system for coating an interior surface of a heat exchanger includes a tank for storing the coating solution, a pump, a source line for supplying the coating solution to the heat exchanger, and a return line for returning the remainder of the coating solution to the tank. The system can include a pre-treatment line for supplying a pre-treatment solution to the heat exchanger and a water line for supplying water to the heat exchanger. An air compressor can be coupled to the heat exchanger to force the coating solution, the pre-treatment solution, or the water from the heat exchanger.