In one example, a method for forming a coating system including a bond coat and an environmental barrier coating on a ceramic or CMC substrate, e.g., with an abradable coating on the environmental barrier coating. The method may include depositing a bond coat on a ceramic or ceramic matrix composite (CMC) substrate to form an as-deposited bond coat; heat treating the as-deposited bond coat following the deposition of the as-deposited bond coat on the substrate to form a heat treated bond coat; depositing an environment barrier coating (EBC) layer on the heat treated bond coat to form as deposited EBC layer; and heat treating the as-deposited EBC layer to form a heat treated EBC layer.

Systems for and methods for improving mechanical properties of ceramic material are provided. The system comprises a heat source for heating the ceramic material to a temperature greater than a brittle-to-ductile transition temperature of the ceramic material; a probe for mounting the ceramic material and configured to extend the ceramic material into the heat source; a plasma-confining medium and a sacrificial layer disposed between the ceramic material and the plasma-confining medium; and an energy pulse generator such as a laser pulse generator. The sacrificial layer is utilized to form plasma between the ceramic material and the plasma-confining medium. The method comprises heating ceramic material to a temperature greater than a brittle-to-ductile transition temperature of the ceramic material and subjecting the ceramic material to energy pulses via a sacrificial layer and a plasma-confining medium whereby a plasma of the sacrificial coating forms between the ceramic material and a plasma-confining medium.

A coated article (20;60) includes a substrate (22) and a coating (24;62) on the substrate. The coating includes at least a first layer (30). The first layer has: a matrix (50); and a filler (52) at 2.0% to 40% by volume in the first layer. The first layer is selected from alkaline earth or transition metal (M) tungstates (MWO4); alkaline earth molybdates (MMoO.sub.4); rare earth (RE) phosphates (REPO.sub.4); and combinations thereof.

A coated article (20;60) includes a substrate (22) and a coating (24;62) on the substrate. The coating includes at least a first layer (30). The first layer has: a matrix (50); and a filler (52) at 2.0% to 40% by volume in the first layer. The first layer is selected from alkaline earth or transition metal (M) tungstates (MWO4); alkaline earth molybdates (MMoO.sub.4); rare earth (RE) phosphates (REPO.sub.4); and combinations thereof.

A coated article including an article having a surface; an oxidation resistant bond coat layer deposited on the surface, the oxidation resistant bond coat layer comprising a metal silicide phase, a crystalline ceramic phase and an amorphous ceramic phase, wherein the metal silicide phase has an aspect ratio greater than 1:1 but less than 50:1.

A coated article including an article having a surface; an oxidation resistant bond coat layer deposited on the surface, the oxidation resistant bond coat layer comprising a metal silicide phase, a crystalline ceramic phase and an amorphous ceramic phase, wherein the metal silicide phase has an aspect ratio greater than 1:1 but less than 50:1.

Methods for producing oxide/metal composite components for use in high temperature systems, and components produced thereby. The methods use a fluid reactant and a porous preform that contains a solid oxide reactant. The fluid reactant contains yttrium as a displacing metal and the solid oxide reactant of the preform contains niobium oxide, of which niobium cations are displaceable species. The preform is infiltrated with the fluid reactant to react its yttrium with the niobium oxide of the solid oxide reactant and produce an yttria/niobium composite component, during which yttrium at least partially replaces the niobium cations of the solid oxide reactant to produce yttria and niobium metal, which together define a reaction product. The pore volume of the preform is at least partially filled by the reaction product, whose volume is greater than the volume lost by the solid oxide reactant as a result of reacting yttrium and niobium oxide.

Methods for producing oxide/metal composite components for use in high temperature systems, and components produced thereby. The methods use a fluid reactant and a porous preform that contains a solid oxide reactant. The fluid reactant contains yttrium as a displacing metal and the solid oxide reactant of the preform contains niobium oxide, of which niobium cations are displaceable species. The preform is infiltrated with the fluid reactant to react its yttrium with the niobium oxide of the solid oxide reactant and produce an yttria/niobium composite component, during which yttrium at least partially replaces the niobium cations of the solid oxide reactant to produce yttria and niobium metal, which together define a reaction product. The pore volume of the preform is at least partially filled by the reaction product, whose volume is greater than the volume lost by the solid oxide reactant as a result of reacting yttrium and niobium oxide.

The present invention relates to a method for manufacturing an electrostatic chuck comprising: a base member of a metal material; and a dielectric layer, formed on an upper surface of the base member, including an electrode layer to the inside of which a DC power is applied. According to the present invention, the dielectric layer is formed of a ceramic material by using at least one selected from among a plasma spraying method and a sol-gel method, and thus can be provided with low porosity to increase in lifespan, and with high permittivity to increase in adhesion force to a substrate.

Provided are a coated member in which damage of a coating film can be suppressed in a high temperature environment and the coating may be performed at low cost, and a method of manufacturing the same. A coated member includes a bond coat and a top coat sequentially laminated on a substrate made of a Si-based ceramic or a SiC fiber-reinforced SiC matrix composite, wherein the top coat includes a layer composed of a mixed phase of a (Y.sub.1-aLn.sub.1a) solid solution (here, Ln.sub.1 is any one of Nd, Sm, Eu, and Gd) and Y.sub.2SiO.sub.5 or a (Y.sub.1-bLn.sub.1′.sub.b).sub.2SiO.sub.5 solid solution (here, Ln.sub.1′ is any one of Nd, Sm, Eu, and Gd), or a mixed phase of a (Y.sub.1-cLn.sub.2c).sub.2Si.sub.2O.sub.7 solid solution (here, Ln.sub.2 is any one of Sc, Yb, and Lu) and Y.sub.2SiO.sub.5 or a (Y.sub.1-dLn.sub.2′.sub.d).sub.2SiO.sub.5 solid solution (here, Ln.sub.2′ is any one of Sc, Yb, and Lu).