Devices and methods for operating a diaphragm compressor system provide high output pressure and high throughput. In some embodiments, modular diaphragm compressors are stacked with a clamping mechanism pressing the compressor modules together. In embodiments, multiple stacks are provided as stages of a pressurization process. In embodiments, a main stage valve controls one or more pressure circuits for one or more hydraulic actuators of compressor modules. In embodiments, orifices configured for damping are incorporated to control actuator piston movement within a compressor module.

Method for operating a pump system preferably comprising more than one pump, comprising the steps of: Obtaining at least one target parameter to be optimized based on target values of each pump; Obtaining an operation target, wherein the operation target is provided by one or more of the pumps operating each with an individual operation parameter; Acquiring a relationship for more than one and preferably all of the pumps between the operation parameter and the target value and determine a target function; Determining a maximum/minimum of the target function and obtaining operation parameter of at least one pump; and Controlling of at least one pump to operate with the obtained operation parameter to optimize the target parameter.

Method for operating a pump system preferably comprising more than one pump, comprising the steps of: Obtaining at least one target parameter to be optimized based on target values of each pump; Obtaining an operation target, wherein the operation target is provided by one or more of the pumps operating each with an individual operation parameter; Acquiring a relationship for more than one and preferably all of the pumps between the operation parameter and the target value and determine a target function; Determining a maximum/minimum of the target function and obtaining operation parameter of at least one pump; and Controlling of at least one pump to operate with the obtained operation parameter to optimize the target parameter.

A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10.sup.−2 mbar to a second pressure between 10.sup.−3 mbar and 10.sup.−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.

A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10.sup.−2 mbar to a second pressure between 10.sup.−3 mbar and 10.sup.−6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.

Devices and methods for operating a diaphragm compressor system provide high output pressure and high throughput. In some embodiments, modular diaphragm compressors are stacked with a clamping mechanism pressing the compressor modules together. In embodiments, multiple stacks are provided as stages of a pressurization process. In embodiments, a main stage valve controls one or more pressure circuits for one or more hydraulic actuators of compressor modules. In embodiments, orifices configured for damping are incorporated to control actuator piston movement within a compressor module.

Devices and methods for operating a diaphragm compressor system provide high output pressure and high throughput. In some embodiments, modular diaphragm compressors are stacked with a clamping mechanism pressing the compressor modules together. In embodiments, multiple stacks are provided as stages of a pressurization process. In embodiments, a main stage valve controls one or more pressure circuits for one or more hydraulic actuators of compressor modules. In embodiments, orifices configured for damping are incorporated to control actuator piston movement within a compressor module.

Devices and methods for operating a diaphragm compressor system provide high output pressure and high throughput. In some force coupled embodiments, pressures on an actuator piston are balanced by high-pressure recovery or medium-pressure shuffling arrangements. In some embodiments, modular diaphragm compressors are stacked with a clamping mechanism pressing the compressor modules together. In embodiments, multiple stacks are provided as stages of a pressurization process. In embodiments, a main stage valve controls one or more pressure circuits for one or more hydraulic actuators of compressor modules. In embodiments, orifices configured for damping are incorporated to control actuator piston movement within a compressor module.

Devices and methods for operating a diaphragm compressor. Embodiments of the present disclosure comprise an oil piston being driven to pressurize work oil against the diaphragm of the compressor. In embodiments, an injection pump provides a supplemental flow of work oil in the region of pressurized fluid, and such pump may be part of an actively controlled system. In embodiments, a pressure relief valve vents an overpump flow of work oil, and such valve may be variable. Embodiments provide feedback and control mechanisms, including control of the injection pump and the relief valve.

A vacuum pumping and/or abatement system for evacuating and/or abating fluid from an entity, the system comprising: a first module comprising a vacuum pumping apparatus for pumping the fluid from the entity and/or an abatement apparatus for abating the fluid evacuated from the entity; and a second module arranged adjacent to the first module in a first system dimension; wherein the first and second modules each have a maximum size in the first system dimension that is a respective integer multiple of a common fixed system value.