A system comprising: a liquid ring pump (10) comprising: a chamber (102); a suction inlet; an exhaust outlet; and an operating liquid inlet; a gas line (36) coupled to the liquid ring pump (10); a valve (8) disposed on the gas line (36); a first sensor (81) configured to measure a first parameter of the inlet fluid; a second sensor (82) configured to measure a second parameter of either the operating liquid, the exhaust fluid, or a fluid within the chamber; and a controller (20) configured to: determine a vapour pressure of the operating liquid using the second parameter; and control operation of the valve (8) based on the first parameter and the vapour pressure.

A water-ring vacuum pump including a built-in hogging flow path. The water-ring vacuum pump includes a first-stage body, a second-stage body, and an impeller. The first-stage body includes a gas inlet port through which gas is suctioned and a seal water supply port through which seal water is supplied. The second-stage body includes a mixed fluid outlet port through which a mixed fluid of the gas and the seal water is discharged. The first-stage body has a fluid-mixing space provided therein, the fluid-mixing space having a mixed flow of the gas and the seal water therein. The second-stage body has a fluid guide space and an internal hogging flow path provided therein, the internal hogging flow path communicating with the fluid guide space.

A system comprising: a suction line; a liquid ring pump coupled to the suction line, the liquid ring pump comprising a chamber and an impeller mounted within the chamber; a non-return valve arranged to permit fluid to flow into the chamber via the suction line and to prevent or oppose fluid flow out of the chamber to the suction line; a gas line coupled to the liquid ring pump such that a gas may flow into the liquid ring pump via the gas line, the gas line coupled to the liquid ring pump between the non-return valve and the chamber; a valve disposed on the gas line; and a controller configured to control the valve.

A pumping line arrangement includes a chamber connecting line which is fluidly connectable to a process chamber that forms part of a semiconductor fabrication tool. The pumping line arrangement also includes a valve module which is fluidly connected to the chamber connecting line. The valve module splits the chamber connecting line into respective first and second pumping lines. The first pumping line is intended to carry a first process flow and the second pumping line is intended to carry a second process flow which is incompatible with the first process flow. At least one of the first pumping line or the second pumping line includes fluidly connected therewithin a pre-abatement module that is configured to remove one or more incompatible constituents from the process flow intended to be carried by the other pumping line.

The present invention relates to a two-stage liquid ring vacuum pump in which two-stage impellers are attached to an axial end portion of a main shaft (rotating shaft) of a motor. The two-stage liquid ring vacuum pump includes a first-stage impeller (4) provided in a first-stage pump chamber (1), a second-stage impeller (5) provided in a second-stage pump chamber (2), a single rotating shaft (7) to which the first-stage impeller (4) and the second-stage impeller (5) are fixed, and an exhaust port (Pd) of the first-stage pump chamber (1) and an intake port (Ps) of the second-stage pump chamber (2) which communicate with each other. An outer diameter of the first-stage impeller (4) is larger than an outer diameter of the second-stage impeller (5).

A ring section pump features a low-pressure end configured to receive fluid to be pumped into the ring section pump; a high-pressure end configured to provide the fluid to be pumped from the ring section pump; and an intermediate tie rod combination having a intermediate flange with upper tie rods configured to couple together the intermediate flange and the high-pressure end and with lower tie rods configured to couple together the intermediate flange and the low-pressure end. The low-pressure end has an inlet flange; the high-pressure end has an outlet/discharge flange; and the upper tie rods couple together the intermediate flange and the outlet/discharge flange and the lower tie rods couple together the intermediate flange and the inlet flange.

A liquid ring pump manifold comprising at least one integrated spray nozzle, the at least one integrated spray nozzle being configured to spray a liquid into the liquid ring pump manifold. The liquid ring pump manifold may comprise at least one socket in which the at least one integrated spray nozzle is accommodated. The at least one socket may be integrally formed with the liquid ring pump manifold.

A system comprising: a suction line; a liquid ring pump coupled to the suction line, the liquid ring pump comprising a chamber and an impeller mounted within the chamber; a non-return valve arranged to permit fluid to flow into the chamber via the suction line and to prevent or oppose fluid flow out of the chamber to the suction line; a gas line coupled to the liquid ring pump such that a gas may flow into the liquid ring pump via the gas line, the gas line coupled to the liquid ring pump between the non-return valve and the chamber; a valve disposed on the gas line; and a controller configured to control the valve.

Disclosed is a liquid-ring compressor including a bypass pipe, in which the bypass pipe is directly mounted to a main body of the liquid-ring compressor, thereby greatly reducing costs incurred in the installation of a facility or a system including the liquid-ring compressor, and also economically reducing maintenance costs. The liquid-ring compressor includes a main body accommodating a shaft centrally mounted therein to receive rotational force from a driving motor, a rotor configured to rotate together with the shaft inside the main body, a suction port formed at a portion of the main body, a discharge port formed at another portion of the main body, a bypass pipe mounted between a position adjacent to the suction port in the main body and a position adjacent to the discharge port in the main body, and an opening/closing valve mounted in the middle of the bypass pipe.

Disclosed is a liquid-ring compressor including a bypass pipe, in which the bypass pipe is directly mounted to a main body of the liquid-ring compressor, thereby greatly reducing costs incurred in the installation of a facility or a system including the liquid-ring compressor, and also economically reducing maintenance costs. The liquid-ring compressor includes a main body accommodating a shaft centrally mounted therein to receive rotational force from a driving motor, a rotor configured to rotate together with the shaft inside the main body, a suction port formed at a portion of the main body, a discharge port formed at another portion of the main body, a bypass pipe mounted between a position adjacent to the suction port in the main body and a position adjacent to the discharge port in the main body, and an opening/closing valve mounted in the middle of the bypass pipe.