A shaft furnace for firing carbonate-containing material may include, in a flow direction of the material, a preheating zone, a firing zone, a cooling zone, and a material outlet for discharging the material from the shaft furnace. Burner lances project into the firing zone. At least one burner lance has a first penetration depth into the firing zone and at least one further burner lance has a second penetration depth into the firing zone that is greater than the first penetration depth. A primary air conduit may be configured to convey combustion air and may be connected to at least one burner lance. An oxygen conduit for conveying oxygen into the firing zone may be arranged such that oxygen flows from the oxygen conduit at least one burner lance having the second penetration depth.

In an embodiment, a heating apparatus for heating an electrode group structure includes a chamber, a heat conduction plate, a temperature adjustment unit, a pressure adjustment unit, and a controller. In a state where the heat conduction plate is in contact with the current collectors of a plurality of the electrode group structures in a heating room inside chamber, the heat conduction plate enables heat to be conducted to the current collectors of the electrode group structures. The controller controls operation of the temperature adjustment unit and the pressure adjustment unit in a state where the heat conduction plate is in contact with the current collectors of the electrode group structures.

A furnace for removing a molybdenum-alloy refractory metal core through sublimation comprising a retort furnace having an interior; a sublimation fixture insertable within the interior of the retort furnace, the sublimation fixture configured to receive at least one turbine blade having the molybdenum-alloy refractory metal core; a flow passage thermally coupled to the retort furnace configured to heat a fluid flowing through the flow passage and deliver the fluid to the molybdenum-alloy refractory metal core causing sublimation of the molybdenum-alloy refractory metal core.

The inventive concept relates to a substrate treating apparatus including a process chamber having a first and a second body, a support unit supporting a substrate, a heating unit heats the substrate, a driver moves any one of the first body and the second body, an interval state detection unit that detects an interval state between a side wall of the first body and a side wall of the second body when the first and the second body are placed in a process location, and a controller that controls the driver and the interval state detection unit, wherein the interval state detection unit includes a pressure provision line that provides a positive pressure or a negative pressure between the side wall of the first body and the side wall of the second body, and a pressure measurement member that measures a change in a pressure of the pressure provision line.

The inventive concept relates to a substrate treating apparatus including a process chamber having a first and a second body, a support unit supporting a substrate, a heating unit heats the substrate, a driver moves any one of the first body and the second body, an interval state detection unit that detects an interval state between a side wall of the first body and a side wall of the second body when the first and the second body are placed in a process location, and a controller that controls the driver and the interval state detection unit, wherein the interval state detection unit includes a pressure provision line that provides a positive pressure or a negative pressure between the side wall of the first body and the side wall of the second body, and a pressure measurement member that measures a change in a pressure of the pressure provision line.

A method for producing a ternary cathode material for lithium batteries by roasting raw material in a roasting kiln, wherein an atmosphere is provided in the roasting kiln, wherein injection of a gas component of the atmosphere into the roasting kiln is controlled in closed loop control manner, based on at least one process influencing parameter being measured, as well as an apparatus for producing a ternary cathode material.

A method for producing a ternary cathode material for lithium batteries by roasting raw material in a roasting kiln, wherein an atmosphere is provided in the roasting kiln, wherein injection of a gas component of the atmosphere into the roasting kiln is controlled in closed loop control manner, based on at least one process influencing parameter being measured, as well as an apparatus for producing a ternary cathode material.

A nitriding apparatus for manufacturing a grain-oriented electrical steel sheet is provided. The nitriding apparatus includes: a nitriding gas supply pipe for introducing gas including at least ammonia or nitrogen; and a nitriding treatment portion for successively performing high-temperature nitriding and low-temperature nitriding in nitriding treatment. The nitriding treatment portion includes a high-temperature treatment portion for performing the high-temperature nitriding and a low-temperature treatment portion for performing the low-temperature nitriding, and the nitriding gas supply pipe to the high-temperature treatment portion includes a cooling device.

A nitriding apparatus for manufacturing a grain-oriented electrical steel sheet is provided. The nitriding apparatus includes: a nitriding gas supply pipe for introducing gas including at least ammonia or nitrogen; and a nitriding treatment portion for successively performing high-temperature nitriding and low-temperature nitriding in nitriding treatment. The nitriding treatment portion includes a high-temperature treatment portion for performing the high-temperature nitriding and a low-temperature treatment portion for performing the low-temperature nitriding, and the nitriding gas supply pipe to the high-temperature treatment portion includes a cooling device.

A system and method for plasma treatment comprises a radiofrequency chamber, a microwave source configured to provide energy to the radiofrequency chamber, a reaction chamber configured to accept a treatment flow, a plasma dispensation assembly configured in the reaction chamber, the plasma dispensation assembly being powered by energy from the radiofrequency chamber, and a collection chamber for collecting treated material from the reaction chamber. The systems and methods can be used for treatment of various treatment flows.