The present invention relates to cathodes electrodes compositions suitable to provide a pumping mechanism which exhibits an extremely high pumping speed and capacity of noble gas suitable to be used in several vacuum devices as for example sputter ion vacuum pumping systems comprising them as active element.

The invention relates to a hydrogen compressor (10) with metal hydride comprising: a pressure chamber (20), comprising an inner space, defined by a first inner surface (21); a shell (70) with a thickness E, the shell (70) comprising a first outer surface (71) facing the first inner surface (21), the shell (70) comprising an insulating material with first thermal conductivity; and a hydrogen storage element (50), contained in the shell (70), comprising a storage material suitable for storing or releasing hydrogen as a function of a temperature that is imposed on same, and having a second thermal conductivity higher than the first thermal conductivity.

The invention relates to a hydrogen compressor (10) with metal hydride comprising: a pressure chamber (20), comprising an inner space, defined by a first inner surface (21); a shell (70) with a thickness E, the shell (70) comprising a first outer surface (71) facing the first inner surface (21), the shell (70) comprising an insulating material with first thermal conductivity; and a hydrogen storage element (50), contained in the shell (70), comprising a storage material suitable for storing or releasing hydrogen as a function of a temperature that is imposed on same, and having a second thermal conductivity higher than the first thermal conductivity.

Provided is a method of designing a low-pressure chamber that provides a preset air pressure corresponding to a predetermined altitude. The method may include the steps of: calculating a predetermined error range of the preset air pressure, and calculating an amount and types of materials of a getter to be inserted into the low-pressure chamber based on the error range and a total volume of the low-pressure chamber.

Provided is a method of designing a low-pressure chamber that provides a preset air pressure corresponding to a predetermined altitude. The method may include the steps of: calculating a predetermined error range of the preset air pressure, and calculating an amount and types of materials of a getter to be inserted into the low-pressure chamber based on the error range and a total volume of the low-pressure chamber.

An umbrella part metallic sodium insertion device for inserting rod-shaped metallic sodium into a hollow part of a hollow valve; a melting device for melting the metallic sodium in the hollow part by inserting a push rod from an opening into the hollow part of the hollow valve, in which the metallic sodium has been inserted by the device, and, while pushing the rod-shaped metallic sodium in the hollow part, heating the umbrella part to a temperature at which the metallic sodium is melted; a stem part cooling device for cooling a stem part of the hollow valve, in which the metallic sodium has been melted by the melting device, to a temperature lower than the temperature at which the metallic sodium is melted; and a stem part metallic sodium insertion device for inserting rod-shaped metallic sodium into the hollow part which has been cooled by the device.

An umbrella part metallic sodium insertion device for inserting rod-shaped metallic sodium into a hollow part of a hollow valve; a melting device for melting the metallic sodium in the hollow part by inserting a push rod from an opening into the hollow part of the hollow valve, in which the metallic sodium has been inserted by the device, and, while pushing the rod-shaped metallic sodium in the hollow part, heating the umbrella part to a temperature at which the metallic sodium is melted; a stem part cooling device for cooling a stem part of the hollow valve, in which the metallic sodium has been melted by the melting device, to a temperature lower than the temperature at which the metallic sodium is melted; and a stem part metallic sodium insertion device for inserting rod-shaped metallic sodium into the hollow part which has been cooled by the device.

Provided are: a non-evaporable getter coated component and chamber including a non-evaporable getter material layer with a total storage capacity of carbon atoms, nitrogen atoms and oxygen atoms of 20 mol % or less and/or a noble metal layer with a total storage capacity of carbon atoms, nitrogen atoms and oxygen atoms of 20 mol % or less; a manufacturing method of a non-evaporable getter coated component and chamber, the method including a step of forming a non-evaporable getter material layer and/or a noble metal layer by coating a non-evaporable getter material and/or a noble metal by a vapor deposition method under low pressure; and a manufacturing apparatus of a NEG coated component and chamber including a NEG material filament and/or a noble metal filament and a current feedthrough.

Provided are: a non-evaporable getter coated component and chamber including a non-evaporable getter material layer with a total storage capacity of carbon atoms, nitrogen atoms and oxygen atoms of 20 mol % or less and/or a noble metal layer with a total storage capacity of carbon atoms, nitrogen atoms and oxygen atoms of 20 mol % or less; a manufacturing method of a non-evaporable getter coated component and chamber, the method including a step of forming a non-evaporable getter material layer and/or a noble metal layer by coating a non-evaporable getter material and/or a noble metal by a vapor deposition method under low pressure; and a manufacturing apparatus of a NEG coated component and chamber including a NEG material filament and/or a noble metal filament and a current feedthrough.

Provided is a method for maintaining a preset air pressure of a low-pressure chamber. The method may comprise the steps of: measuring the inside air pressure of a low-pressure chamber; if the difference between the inside air pressure and a preset air pressure is the same or higher than a threshold value, adjusting the inside temperature of the low-pressure chamber by using a thermal conduction part disposed inside the low-pressure chamber; and by using a getter, making the difference to be below the threshold value by adsorbing or releasing molecules inside the low-pressure chamber according to the adjustment of the temperature.