A cryopump pumps gas from a vacuum chamber in a vacuum apparatus performing vacuum processing. The cryopump comprises: a refrigerator; a cryopanel cooled by the refrigerator; and a controller configured to control an operating cycle of the refrigerator such that the cryopanel is controlled so as to have a target temperature. When an operating cycle of the refrigerator has reached a first determination reference, the controller monitors the operating cycle for a first determination period of time, and when the operating cycle has reached a second determination reference, which corresponds to a higher load than the first determination reference, the controller monitors a temperature of the cryopanel for a second determination period of time, which is shorter the first determination period of time.

A pump is disclosed having a manifold with an inlet, a pressure outlet, and a return outlet. The pump may also have a jacket connected to an end of the manifold to create an enclosure that is in fluid communication with the inlet of the manifold, and at least one pumping mechanism extending from the manifold into the jacket. The at least one pumping mechanism may have an inlet open to the enclosure and an outlet in communication with the pressure outlet of the manifold. The pump may further have a standpipe extending from the manifold into the enclosure. The standpipe may be in communication with the return outlet of the manifold.

Provided is a cryopump enabling the maintaining of a preset temperature during a preset time, even when turned off. The cryopump may comprise: a displacer which adjusts outside temperature by compressing or expanding a refrigerant existing therein; a thermal conduction part which transfers heat outside the cryopump to the refrigerant; and a thermal conduction buffer part which, if the displacer is turned off, absorbs the heat outside that is transferred to the refrigerant, and uses same as energy for changing a phase.

Provided is a cryopump enabling the maintaining of a preset temperature during a preset time, even when turned off. The cryopump may comprise: a displacer which adjusts outside temperature by compressing or expanding a refrigerant existing therein; a thermal conduction part which transfers heat outside the cryopump to the refrigerant; and a thermal conduction buffer part which, if the displacer is turned off, absorbs the heat outside that is transferred to the refrigerant, and uses same as energy for changing a phase.

A cryopump includes a first cryopanel including a radiation shield and a plate member across a shield opening and a second cryopanel enclosed by the first cryopanel and cooled to a lower temperature than that of the first cryopanel. The plate member includes a plate main portion and a plate peripheral portion adapted to attach the plate main portion to the radiation shield. The plate main portion includes a gas passing region having a multitude of pores through which gases pass to be condensed on the second cryopanel and a gas shielding region formed at a different position in the plate main portion from that of the gas passing region.

A cryopump includes a first cryopanel including a radiation shield and a plate member across a shield opening and a second cryopanel enclosed by the first cryopanel and cooled to a lower temperature than that of the first cryopanel. The plate member includes a plate main portion and a plate peripheral portion adapted to attach the plate main portion to the radiation shield. The plate main portion includes a gas passing region having a multitude of pores through which gases pass to be condensed on the second cryopanel and a gas shielding region formed at a different position in the plate main portion from that of the gas passing region.

A cryopump includes a housing, an electrical control unit which controls the cryopump, a purge valve provided on a passage between an external purge gas source and the inside of the housing, a rough valve provided on a passage between an external pump and the inside of the housing, a vent valve provided on a passage between the inside and the outside of the housing, and a Pirani gauge which measures a pressure inside the housing. The electrical control unit is connected to each of the purge valve, rough valve, vent valve, and Pirani gauge via a wire. Each of the wires is provided with a connector on the component side and a connector on the electrical control unit side. The connector on the component side is configured to be attachable to and detachable from the connector on the electrical control unit side.

A cryopump includes a housing, an electrical control unit which controls the cryopump, a purge valve provided on a passage between an external purge gas source and the inside of the housing, a rough valve provided on a passage between an external pump and the inside of the housing, a vent valve provided on a passage between the inside and the outside of the housing, and a Pirani gauge which measures a pressure inside the housing. The electrical control unit is connected to each of the purge valve, rough valve, vent valve, and Pirani gauge via a wire. Each of the wires is provided with a connector on the component side and a connector on the electrical control unit side. The connector on the component side is configured to be attachable to and detachable from the connector on the electrical control unit side.

A cryogenic pump for pumping liquefied natural gas (LNG) from a cryogenic tank storing LNG includes a drive assembly and a pump assembly disposed along a pump axis. The drive assembly includes a spool housing having a plurality of spool valves arranged around the pump axis, a tappet housing having a plurality of tappet bores with slidable tappets arranged around the pump axis, and spring housing including a plurality of movably disposed pushrods urged upward by a plurality of associated pushrod springs. Hydraulic fluid received by a hydraulic fluid inlet in the drive assembly is directed by the spool valves to the tappet bores to move the tappets downward against the pushrods. To collect the hydraulic fluid, the lowermost spring housing also includes a collection cavity formed therein that can return the hydraulic fluid to a hydraulic fluid outlet.

A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.