A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.

A cryopump includes a radiation shield, a top cryopanel, and a bottom cryopanel. The radiation shield includes a shield main slit that communicates a shield outside gap into a shield cavity. The top cryopanel includes a top cryopanel outer circumferential end located axially above the shield main slit. The bottom cryopanel includes a bottom cryopanel outer circumferential end located axially below the shield main slit. An annular vacant space is formed between the top cryopanel outer circumferential end and the bottom cryopanel outer circumferential end and the top cryopanel outer circumferential end is directly opposed to the bottom cryopanel outer circumferential end with the annular vacant space interposed therebetween.

A cryopump includes a radiation shield, a top cryopanel, and a bottom cryopanel. The radiation shield includes a shield main slit that communicates a shield outside gap into a shield cavity. The top cryopanel includes a top cryopanel outer circumferential end located axially above the shield main slit. The bottom cryopanel includes a bottom cryopanel outer circumferential end located axially below the shield main slit. An annular vacant space is formed between the top cryopanel outer circumferential end and the bottom cryopanel outer circumferential end and the top cryopanel outer circumferential end is directly opposed to the bottom cryopanel outer circumferential end with the annular vacant space interposed therebetween.

A bearing arrangement for a wobble plate piston pump includes first, second, third, and fourth bearing assemblies. The first and second bearing assemblies support the drive shaft portion for rotation within the housing about the central longitudinal axis, while the third and fourth bearing assemblies support the load plate for rotation relative to the offset shaft portion of the shaft. The second bearing assembly is distally disposed from the first, the third disposed distally to second, and the fourth disposed distally to third. The fourth bearing assembly is the most distally disposed bearing assembly along the shaft.

A bearing arrangement for a wobble plate piston pump includes first, second, third, and fourth bearing assemblies. The first and second bearing assemblies support the drive shaft portion for rotation within the housing about the central longitudinal axis, while the third and fourth bearing assemblies support the load plate for rotation relative to the offset shaft portion of the shaft. The second bearing assembly is distally disposed from the first, the third disposed distally to second, and the fourth disposed distally to third. The fourth bearing assembly is the most distally disposed bearing assembly along the shaft.

A cryopump controller includes a regeneration controller that controls a cryopump in accordance with a regeneration sequence including a condensate discharging process being continued until a discharging completion condition based on pressure in the cryopump is met. The regeneration controller includes a first determiner repetitively determining whether the discharging completion condition is met, a second determiner determining whether the number of times of determination for the completion condition or a period of time for which the discharging process continues is equal to or larger than a threshold value, and a temperature controller performing preliminary cooling of the cryopump if the number of times of determination for the completion condition or the period of time for which the discharging process continues is equal to or larger than the threshold value. The first determiner re-determines during the preliminary cooling whether the completion condition is met.

A cryopump controller includes a regeneration controller that controls a cryopump in accordance with a regeneration sequence including a condensate discharging process being continued until a discharging completion condition based on pressure in the cryopump is met. The regeneration controller includes a first determiner repetitively determining whether the discharging completion condition is met, a second determiner determining whether the number of times of determination for the completion condition or a period of time for which the discharging process continues is equal to or larger than a threshold value, and a temperature controller performing preliminary cooling of the cryopump if the number of times of determination for the completion condition or the period of time for which the discharging process continues is equal to or larger than the threshold value. The first determiner re-determines during the preliminary cooling whether the completion condition is met.

A cold trap is provided between a vacuum chamber and a vacuum pump. The cold trap includes a cold panel and a cold panel chamber that surrounds the cold panel in an exhaust passage. The cold panel includes an expansion panel outside the cold panel chamber. The expansion panel is located in the vacuum chamber.

A cryopump includes a cryopump container, a pressure sensor that measures a pressure in the cryopump container and generates time-series pressure data indicating the measured pressure, a vent valve that is provided on the cryopump container, is electrically operable to open and close, and is capable of being mechanically opened by a differential pressure between inside and outside the cryopump container, and a controller that, during cryopump regeneration, detects stabilization of the measured pressure based on the time-series pressure data from the pressure sensor and controls the vent valve to open upon detection of the stabilization of the measured pressure.

A cryopump includes a cryopump container, a pressure sensor that measures a pressure in the cryopump container and generates time-series pressure data indicating the measured pressure, a vent valve that is provided on the cryopump container, is electrically operable to open and close, and is capable of being mechanically opened by a differential pressure between inside and outside the cryopump container, and a controller that, during cryopump regeneration, detects stabilization of the measured pressure based on the time-series pressure data from the pressure sensor and controls the vent valve to open upon detection of the stabilization of the measured pressure.