Provided is a vacuum component capable of evacuation by a getting effect, which has a large maximum number of captured molecules and a long working life. It is provided, in an area around its central axis, with a hollow cylindrical electrode 20 having an electrode surface 20A that is sufficiently smaller than an inner surface 10A of the vacuum container 10, along the central axis. In the vacuum container 10, it is possible to realize any one of states among a first state of generating DC discharge by introducing Ar into the inside and setting the electrode surface 20A at a positive potential, a second state of setting the electrode surface 20A at a ground potential without introducing Ar, and a third state of generating DC discharge by introducing Ar into the inside and setting the electrode surface 20A at a negative potential. Evacuation by the vacuum component 1 is performed in the second state. Further, evacuation by the vacuum component 1 is performed also by realizing a state of performing a heating process at 400° C. or below without using the electrode.

A piping structure includes a plurality of pipes that connects a plurality of process modules disposed adjacent to each other at a first room and a plurality of vacuum pumps disposed at a second room below the first room to be corresponding to the plurality of process modules, respectively. The plurality of pipes are divided into a plurality of blocks in a height direction, and the plurality of pipes used for blocks in an identical height have an identical shape.

A piping structure includes a plurality of pipes that connects a plurality of process modules disposed adjacent to each other at a first room and a plurality of vacuum pumps disposed at a second room below the first room to be corresponding to the plurality of process modules, respectively. The plurality of pipes are divided into a plurality of blocks in a height direction, and the plurality of pipes used for blocks in an identical height have an identical shape.

A monitoring device is attached to a first leg portion and detects vibration generated in the first leg portion. The monitoring device includes a sensor unit including an inertial sensor, a plate for attachment of the sensor unit, a spacer in contact with the first leg portion, and a bolt for fixation, and is attached to the first leg portion by the bolt with the spacer, the plate, and the sensor sequentially stacked and the spacer is softer than the plate.

A monitoring device is attached to a first leg portion and detects vibration generated in the first leg portion. The monitoring device includes a sensor unit including an inertial sensor, a plate for attachment of the sensor unit, a spacer in contact with the first leg portion, and a bolt for fixation, and is attached to the first leg portion by the bolt with the spacer, the plate, and the sensor sequentially stacked and the spacer is softer than the plate.

There is provided a technique that includes: a main controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate so as to acquire device data when executing the process recipe; and a storage part configured to store the acquired device data, wherein the main controller is configured to: acquire the device data in a predetermined specific step among the steps constituting the process recipe; calculate a value of the acquired device data in the specific step; compare the calculated value with a value of the device data in the specific step calculated at a time of previous execution of the process recipe; and generate an alarm when the calculated value shows a predefined tendency.

There is provided a technique that includes: a main controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate so as to acquire device data when executing the process recipe; and a storage part configured to store the acquired device data, wherein the main controller is configured to: acquire the device data in a predetermined specific step among the steps constituting the process recipe; calculate a value of the acquired device data in the specific step; compare the calculated value with a value of the device data in the specific step calculated at a time of previous execution of the process recipe; and generate an alarm when the calculated value shows a predefined tendency.

The present invention provides a splinter shield for a vacuum pump, capable of reducing costs of the splinter shield by obtaining a single sheet of splinter shield having a required strength, in which fastening strength to a fixing groove is enhanced to prevent the splinter shield from bending toward the inside of a pump and coming into contact with equipment inside the pump when air rushes into the pump through an inlet port and to prevent the splinter shield from falling. Furthermore, attachment and removal of the splinter shield with respect to the inlet port are facilitated. The present invention is a splinter shield for a vacuum pump in which a rim formed in a circumferential edge portion of the splinter shield is inserted into a fixing groove that is provided in a concave manner in an inner circumferential portion of an inlet port, and the splinter shield is provided in a tensioned manner to the inlet port by pushing a retaining ring into the fixing groove, wherein locking parts that are locked into the retaining ring at a plurality of sections in the rim are provided in a standing manner at substantially right angles to the rim.

The present invention provides a splinter shield for a vacuum pump, capable of reducing costs of the splinter shield by obtaining a single sheet of splinter shield having a required strength, in which fastening strength to a fixing groove is enhanced to prevent the splinter shield from bending toward the inside of a pump and coming into contact with equipment inside the pump when air rushes into the pump through an inlet port and to prevent the splinter shield from falling. Furthermore, attachment and removal of the splinter shield with respect to the inlet port are facilitated. The present invention is a splinter shield for a vacuum pump in which a rim formed in a circumferential edge portion of the splinter shield is inserted into a fixing groove that is provided in a concave manner in an inner circumferential portion of an inlet port, and the splinter shield is provided in a tensioned manner to the inlet port by pushing a retaining ring into the fixing groove, wherein locking parts that are locked into the retaining ring at a plurality of sections in the rim are provided in a standing manner at substantially right angles to the rim.

A synthetic vacuum generator has a case enclosing an interior cavity with an aperture through the case in communication with the cavity. A piston and a check valve are mounted in the case in fluid communication with the cavity and the aperture. The piston and check valve are configured with symbiotic resonant response to establish an outflow there through and inducing an inflow through the aperture upon reciprocation of the piston at a predetermined frequency.