An actuator includes a swing portion swingable about a first axis orthogonal to a central axis extending vertically and about a second axis orthogonal to the first axis and intersecting the central axis. An angle detector includes a pair of first angle detection elements above a non-magnetic structure and extending in the second axis direction with the first axis interposed therebetween when viewed from the central axis direction, and a pair of second angle detection elements extending in the first axis direction with the second axis interposed therebetween. Each of the first angle detection elements and each of the second angle detection elements include a columnar magnetic structure between the swing portion and the non-magnetic structure in the central axis direction, and a detection coil along the outer periphery of the magnetic structure.

The disclosure relates to a bearing assembly for a lithography system, having an optical element, a base, and a bearing device that moveably supports the optical element relative to the base. The bearing device has at least one torsion decoupling element that reduces a transmission of torsional moments between the optical element and the base. The torsion decoupling element has at least two leaf springs which have respective opposing narrow sides and which bring about torsional moments about an axis perpendicular to the narrow sides. The at least two leaf springs are also positioned at an angle to one another and are coupled to one another in such a way that a force flow through the torsion decoupling element simultaneously flows through the at least two leaf springs.

The disclosure relates to a bearing assembly for a lithography system, having an optical element, a base, and a bearing device that moveably supports the optical element relative to the base. The bearing device has at least one torsion decoupling element that reduces a transmission of torsional moments between the optical element and the base. The torsion decoupling element has at least two leaf springs which have respective opposing narrow sides and which bring about torsional moments about an axis perpendicular to the narrow sides. The at least two leaf springs are also positioned at an angle to one another and are coupled to one another in such a way that a force flow through the torsion decoupling element simultaneously flows through the at least two leaf springs.

The fluid dynamic bearing including: a pair of bearing surfaces (8a1 and 8a2) having dynamic pressure generating grooves (G1 and G2) on an inner peripheral surface (8a); a pair of first smooth surfaces (8a4 and 8a5) formed between both the bearing surfaces (8a1 and 8a2) so as to be adjacent to the respective bearing surfaces (8a1 and 8a2); and a relief portion (8a3), which is formed between both the first smooth surfaces (8a4 and 8a5), and has a diameter larger than those of the pair of bearing surfaces (8a1 and 8a2).

An actuator includes a swing portion swingable about a first axis orthogonal to a central axis extending vertically and about a second axis orthogonal to the first axis and intersecting the central axis. An angle detector includes a pair of first angle detection elements above a non-magnetic structure and extending in the second axis direction with the first axis interposed therebetween when viewed from the central axis direction, and a pair of second angle detection elements extending in the first axis direction with the second axis interposed therebetween. Each of the first angle detection elements and each of the second angle detection elements include a columnar magnetic structure between the swing portion and the non-magnetic structure in the central axis direction, and a detection coil along the outer periphery of the magnetic structure.