Patent classifications
F27B5/16
Features for improving process uniformity in a millisecond anneal system
Systems and methods for improving process uniformity in a millisecond anneal system are provided. In some implementations, a process for thermally treating a substrate in a millisecond anneal system can include obtaining data indicative of a temperature profile associated with one or more substrates during processing in a millisecond anneal system. The process can include one or more of (1) changing the pressure inside the processing chamber of the millisecond anneal system; (2) manipulating the irradiation distribution by way of the refracting effect of a water window in the millisecond anneal system; (3) adjusting the angular positioning of the substrate; and/or (4) configuring the shape of the reflectors used in the millisecond anneal system.
Features for improving process uniformity in a millisecond anneal system
Systems and methods for improving process uniformity in a millisecond anneal system are provided. In some implementations, a process for thermally treating a substrate in a millisecond anneal system can include obtaining data indicative of a temperature profile associated with one or more substrates during processing in a millisecond anneal system. The process can include one or more of (1) changing the pressure inside the processing chamber of the millisecond anneal system; (2) manipulating the irradiation distribution by way of the refracting effect of a water window in the millisecond anneal system; (3) adjusting the angular positioning of the substrate; and/or (4) configuring the shape of the reflectors used in the millisecond anneal system.
METHOD FOR AND EQUIPMENT FOR SUPPRESSING DISCOLORATION OF AL-MG PRODUCTS
Method and means for suppressing discoloration during thermal treatment of a product of a magnesium containing aluminium alloy, the alloy contains in wt. % Mg: 0.45-12.0, with a preferred range of 0.45-6.0 wt %. The product, being either an extrusion billet, a sheet ingot, a cast product, or a forged product is heated to a temperature T where it is prone to surface discoloration and oxidation, wherein during the thermal treatment it is exposed to a suppressing atmosphere comprising 0.5-5.0% CO.sub.2 gas with a preference for 0.5-1.5% CO.sub.2 gas.
FURNACE
A furnace for thermal treatment, in particular for carbonization and/or graphitization, of material, in particular fibers, in particular fibers of oxidized polyacrylonitrile PAN. During the thermal treatment, a pyrolysis gas is released from the material. The furnace includes a housing, a process space, which is located in the interior of the housing and is delimited by a process space housing and through which the material can be fed, a heating system for heating, a process space atmosphere prevailing in the process space, and an extraction system for suctioning process space atmosphere laden with pyrolysis gas from the process space. The extraction system has at least one suction device having a suction channel which is delimited by a channel wall and which is connected to the process space by means of a suction opening. The suction opening is arranged in a region of the process space in which, during operation of the furnace a temperature prevails at which no or only moderate chemical reactions occur between the pyrolysis gas and the process space housing and/or the channel wall.
Atmospheric-pressure acetylene carburizing furnace
The Invention relates to an atmospheric-pressure acetylene carburizing furnace, comprises a reaction chamber, an acetylene intake duct, an exhaust gas duct, a control and metering apparatus, an exhaust gas measurement apparatus, and a computer controller. The computer controller calculates a total amount of carbon in the furnace and an enrichment rate of a workpiece, and adjusts an acetylene intake volume according to the calculation result until process requirements are met. The Invention realizes carburizing with acetylene under atmospheric pressure and reduces the usage costs while improving the equipment efficiency.
Atmospheric-pressure acetylene carburizing furnace
The Invention relates to an atmospheric-pressure acetylene carburizing furnace, comprises a reaction chamber, an acetylene intake duct, an exhaust gas duct, a control and metering apparatus, an exhaust gas measurement apparatus, and a computer controller. The computer controller calculates a total amount of carbon in the furnace and an enrichment rate of a workpiece, and adjusts an acetylene intake volume according to the calculation result until process requirements are met. The Invention realizes carburizing with acetylene under atmospheric pressure and reduces the usage costs while improving the equipment efficiency.
Pressing arrangement
A pressing arrangement includes a pressure vessel comprising a furnace chamber. The furnace chamber comprises a load compartment arranged within the furnace chamber. The furnace chamber comprises at least one pressure medium guiding passage in fluid communication with the load compartment to form an inner convection loop, wherein pressure medium in the inner convection loop is guided through the load compartment and through the at least one pressure medium guiding passage and back to the load compartment, or vice versa. The pressure vessel comprises at least one adjustable throttle configured to selectively impede or obstruct pressure medium flow in at least a portion of the at least one pressure medium guiding passage, thereby selectively selectively impeding or obstructing a flow of pressure medium in the inner convection loop.
BAKE SYSTEM AND METHOD OF FABRICATING DISPLAY DEVICE USING THE SAME
A bake system may include a chamber having an internal space, a stage disposed in the internal space of the chamber and on which a target substrate is disposed, a gas ejection structure providing a process gas in the chamber, an exhaust structure, an atmosphere analyzer monitoring moisture and oxygen in the chamber, and a gas supplier controlling a flow rate of the process gas based on information provided from the atmosphere analyzer. The exhaust structure may include a suction part disposed in the internal space, and an exhaust part connected to the suction part and is disposed outside the chamber.
High-pressure liquid-state or supercritical-state quenching apparatus
Disclosed are a high-pressure liquid-state or supercritical-state quenching apparatus, comprising a working chamber, a heating device, a cooling device, a vacuum pump set, a storage tank, a buffer tank, a gas booster, a first pressure gauge, and a temperature controller. According to the Invention, vacuum liquid-state or supercritical-state quenching is implemented, which satisfies a quenching requirement of a large workpiece, and can also achieve an effect of high-pressure gas quenching. In addition, clean heat treatment is implemented, which avoids waste gas and waste water pollution, and is energy-saving and environmentally-friendly heat treatment.
High-pressure liquid-state or supercritical-state quenching apparatus
Disclosed are a high-pressure liquid-state or supercritical-state quenching apparatus, comprising a working chamber, a heating device, a cooling device, a vacuum pump set, a storage tank, a buffer tank, a gas booster, a first pressure gauge, and a temperature controller. According to the Invention, vacuum liquid-state or supercritical-state quenching is implemented, which satisfies a quenching requirement of a large workpiece, and can also achieve an effect of high-pressure gas quenching. In addition, clean heat treatment is implemented, which avoids waste gas and waste water pollution, and is energy-saving and environmentally-friendly heat treatment.