In order to make it possible to remove dust produced in a heating furnace 10 more efficiently than ever before, the present invention is adapted to include: a dust discharge passage L that communicates with the inside of the heating furnace 10 and is for discharging dust produced by heating a sample X; a dust accommodating part 30 that accommodates the dust discharged from the dust discharge passage L; and a negative pressure generating mechanism 90 that is provided in the dust discharge passage L and generates negative pressure in the dust discharge passage, in which the negative pressure generated by the negative pressure generating mechanism 90 guides the dust from the heating furnace 10 to the dust discharge passage L.

An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising: an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner; a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.

An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising: an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner; a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.

An integral high pressure rapid quenching vacuum furnace utilizing an electrical isolation transformer in the blower motor power control system in order to isolate the motor windings, reduce the possibility of gas ionization and eliminate ground faults, particularly when quenching in argon gas, is described. In order to achieve the desired mechanical properties of certain metal alloys being quenched using argon gas as a quenching medium in the high pressure gas vacuum furnace chamber, a 600 HP-460 Volt motor is required. A 460 Volt primary-460 Volt secondary [delta-delta] isolation transformer, having input and output windings separated by an electrostatic shield connected to ground is placed between the power source and the gas blower motor in the quenching chamber filled with argon gas. The 460 Volt power source is connected to a variable frequency drive (VFD) and the VFD is connected to the primary transformer winding. The secondary transformer winding connects 460 Volts to the blower motor windings. The full electrical isolation of the transformer secondary winding results in zero ground fault voltage.

An integral high pressure rapid quenching vacuum furnace utilizing an electrical isolation transformer in the blower motor power control system in order to isolate the motor windings, reduce the possibility of gas ionization and eliminate ground faults, particularly when quenching in argon gas, is described. In order to achieve the desired mechanical properties of certain metal alloys being quenched using argon gas as a quenching medium in the high pressure gas vacuum furnace chamber, a 600 HP-460 Volt motor is required. A 460 Volt primary-460 Volt secondary [delta-delta] isolation transformer, having input and output windings separated by an electrostatic shield connected to ground is placed between the power source and the gas blower motor in the quenching chamber filled with argon gas. The 460 Volt power source is connected to a variable frequency drive (VFD) and the VFD is connected to the primary transformer winding. The secondary transformer winding connects 460 Volts to the blower motor windings. The full electrical isolation of the transformer secondary winding results in zero ground fault voltage.

The present invention enables quick cooling of steam-treated objects and thus reduces the manufacturing time of steam-treated products such as black coated steel sheets. The present invention provides a method for manufacturing steam-treated products, which involves a steam treatment step that introduces steam into a closed container (10) containing a treatment object (1) and brings the treatment object (1) into contact with the steam, and a treated object cooling step that cools the object (1) treated with steam in the steam treatment step, wherein said treated object cooling step introduces coolant gas into said closed container (10), brings said treated object (1) into contact with the coolant gas, and discharges the introduced coolant gas from said closed container (10).

Provided is a hot isostatic pressing (HIP) device that improves the heat uniformity of a hot zone during a pressurization process of an object being processed. This HIP device (100) is provided with: an outer casing (4) having an open outer opening part (4H); an inner casing (5) having an open inn opening part (5H); a heat-insulating body (R) disposed between the outer casing (4) and the inner casing (5); a gas flow generation part (30); and a plurality of first gas conduits (12), A hot zone (P) in which a pressurization process is performed is formed inside the inner casing (5). During the pressurization process, a low-temperature pressurization medium gas which has been generated by the gas flow generation part (30) and has passed through the first gas conduits (12) moves upward in an inner flow passage (L1) between the casings, and then flows into the hot zone (P) from the inner opening part (5H), Even when the pressurization medium gas leaks from the vicinity of a bottom all part (20) and flows into the hot zone (P), the heat uniformity of the hot zone (P) is maintained.

According to one aspect, embodiments herein provide a furnace for debinding and sintering additively manufactured parts comprising a unitarily formed retort having at least one open side, a heater for heating a sintering volume within the retort to a debinding temperature and to a sintering temperature, an end cap sealing the at least one open side, a forming gas line penetrating the end cap for supplying forming gas at a flowrate, and a heat exchanger within the retort, outside the sintering volume, and adjacent a heated wall of the retort, the heat exchanger having an inlet connected to the forming gas line and an outlet to the sintering volume, wherein the heat exchanger includes a heat exchange tube length sufficient to heat the forming gas to within 20 degrees Celsius of the sintering temperature before the forming gas exits the outlet.

The invention relates to an injector configured for arrangement within a reaction chamber of a substrate processing apparatus to inject gas in the reaction chamber. The injector may be elongated along a first axis and configured with an internal gas conduction channel extending along the first axis and provided with at least one gas entrance opening and at least one gas exit opening. The injector may have a width extending along a second axis perpendicular to the first axis substantially larger than a depth of the injector extending along a third axis perpendicular to the first and second axis. The wall of the injector may have a varying thickness.

Batch furnace assembly for processing wafers, comprising a process chamber housing defining a process chamber and having a process chamber opening, a wafer boat housing defining a water boat chamber, a door assembly, a differential pressure sensor, and a controller. The door assembly has a closed position in which it closes off the process chamber opening. The door assembly defines in a closed position a door assembly chamber having a purge gas inlet for supplying purge gas to the door assembly chamber for gas sealingly separating the process chamber from the wafer boat chamber. The differential pressure sensor assembly fluidly connects to the door assembly chamber and is configured to determine a pressure difference between a pressure in the door assembly chamber and a reference pressure in a reference pressure chamber. The controller is configured to establish whether the pressure difference is in a desired pressure range.