The present invention relates to a batch furnace for annealing material comprising a furnace housing which has a closable loading opening, a receiving chamber for furnace material and a device for convective heat transfer to the furnace material by a heat transfer medium, wherein the device for convective heat transfer comprises at least one heating device and at least one fan which is arranged in the furnace housing wherein the receiving chamber is arranged on the suction side of the fan and at least one nozzle array is arranged on the pressure side of the fan, wherein the nozzle array has a central opening which forms an intake duct of the fan and the nozzle array projects radially beyond the fan. The invention further relates to a method for heat treatment of a furnace material.

Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber body having a passage, through which substrates are transferred, in one side thereof, the chamber body having opened upper and lower portions, an inner reaction tube disposed above the chamber body to provide a process space in which a process with respect to the substrates is performed, the inner reaction tube having an opened lower portion, a substrate holder disposed in the opened lower portion of the chamber to move between a stacking position at which the substrates transferred through the passage are vertically stacked and a process position at which the substrate holder ascends toward the process space to perform the process with respect to the stacked substrates, a blocking plate connected to a lower portion of the substrate holder to ascend or descend together with the substrate holder, the blocking plate closing the opened lower portion of the inner reaction tube at the process position, a connection cylinder vertically disposed on a lower portion of the blocking plate to ascend or descend together with the blocking plate, and a blocking member connected between the opened lower portion of the chamber body and the connection cylinder to isolate the opened lower portion of the chamber body from the outside.

Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber body having a passage, through which substrates are transferred, in one side thereof, the chamber body having opened upper and lower portions, an inner reaction tube disposed above the chamber body to provide a process space in which a process with respect to the substrates is performed, the inner reaction tube having an opened lower portion, a substrate holder disposed in the opened lower portion of the chamber to move between a stacking position at which the substrates transferred through the passage are vertically stacked and a process position at which the substrate holder ascends toward the process space to perform the process with respect to the stacked substrates, a blocking plate connected to a lower portion of the substrate holder to ascend or descend together with the substrate holder, the blocking plate closing the opened lower portion of the inner reaction tube at the process position, a connection cylinder vertically disposed on a lower portion of the blocking plate to ascend or descend together with the blocking plate, and a blocking member connected between the opened lower portion of the chamber body and the connection cylinder to isolate the opened lower portion of the chamber body from the outside.

An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising:

an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner;

a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.

An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising:

an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner;

a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.

The present invention relates to a device for heat treating an object, in particular a coated substrate, with an in particular gas-tightly sealable housing that encloses a hollow space, wherein the hollow space has a separating wall, by which the hollow space is divided into a process space for accommodating the object and an intermediate space, wherein the separating wall has one or a plurality of openings, which are implemented such that the separating wall acts as a barrier for the diffusion out of the process space into the intermediate space of a gaseous substance generated in the process space by the heat treatment of the object. The housing has at least one housing section coupled to a cooling device for its active cooling, wherein the separating wall is arranged between the object and the coolable housing section. The invention further relates to the use of a separating wall as a diffusion barrier in a device for heat treating an object as well as a corresponding method for heat treating an object.

The present invention relates to a device for heat treating an object, in particular a coated substrate, with an in particular gas-tightly sealable housing that encloses a hollow space, wherein the hollow space has a separating wall, by which the hollow space is divided into a process space for accommodating the object and an intermediate space, wherein the separating wall has one or a plurality of openings, which are implemented such that the separating wall acts as a barrier for the diffusion out of the process space into the intermediate space of a gaseous substance generated in the process space by the heat treatment of the object. The housing has at least one housing section coupled to a cooling device for its active cooling, wherein the separating wall is arranged between the object and the coolable housing section. The invention further relates to the use of a separating wall as a diffusion barrier in a device for heat treating an object as well as a corresponding method for heat treating an object.

The Invention relates to an atmospheric-pressure acetylene carburizing furnace, comprises a reaction chamber, an acetylene intake duct, an exhaust gas duct, a control and metering apparatus, an exhaust gas measurement apparatus, and a computer controller. The computer controller calculates a total amount of carbon in the furnace and an enrichment rate of a workpiece, and adjusts an acetylene intake volume according to the calculation result until process requirements are met. The Invention realizes carburizing with acetylene under atmospheric pressure and reduces the usage costs while improving the equipment efficiency.

In order to make it possible to remove dust produced in a heating furnace 10 more efficiently than ever before, the present invention is adapted to include: a dust discharge passage L that communicates with the inside of the heating furnace 10 and is for discharging dust produced by heating a sample X; a dust accommodating part 30 that accommodates the dust discharged from the dust discharge passage L; and a negative pressure generating mechanism 90 that is provided in the dust discharge passage L and generates negative pressure in the dust discharge passage, in which the negative pressure generated by the negative pressure generating mechanism 90 guides the dust from the heating furnace 10 to the dust discharge passage L.

Disclosed are a high-pressure liquid-state or supercritical-state quenching apparatus, comprising a working chamber, a heating device, a cooling device, a vacuum pump set, a storage tank, a buffer tank, a gas booster, a first pressure gauge, and a temperature controller. According to the Invention, vacuum liquid-state or supercritical-state quenching is implemented, which satisfies a quenching requirement of a large workpiece, and can also achieve an effect of high-pressure gas quenching. In addition, clean heat treatment is implemented, which avoids waste gas and waste water pollution, and is energy-saving and environmentally-friendly heat treatment.