A vacuum pump comprises: a bearing device; and an exhaust function including a rotary body supported by the bearing device and configured to exhaust gas. The bearing device includes a bearing having an outer ring, an inner ring, and a rolling body, a lubricant storage configured to store lubricant, a lubricant supply structure configured to supply, to the bearing, the lubricant stored in the lubricant storage, a holding member configured to hold the bearing, and a porous body disposed outside the outer ring of the bearing and filled with the lubricant supplied from the lubricant supply structure to the bearing.

A vacuum pump device comprises: a power supply device including a dew condensation detector configured to detect dew condensation, a regenerative braking resistance, and a controller configured to energize the regenerative braking resistance; a cooling system using coolant; and a pump main body including a motor rotatably driven by the power supply device. When the dew condensation detector detects the dew condensation, the controller energizes the regenerative braking resistance to heat an inside of the power supply device.

A vacuum pump and a washer which can reduce vibration of a rotor and the rotor which can reduce the vibration are provided. When an inertia moment ratio which is a ratio between the inertia moment around a z-axis and the inertia moment around an x-axis or a y-axis is larger than 1, a natural frequency ω.sub.2 does not match a rotational frequency Ω.sub.z but goes away from that. When the natural frequency ω.sub.2 matches the rotational frequency Ω.sub.z, the rotor vibrates and thus, a fatigue failure occurs in a rotor blade. When the rotor is to be made larger in a radial direction of a rotating shaft, a value of the inertia moment ratio is set to a value larger than 1.

The present invention provides a splinter shield for a vacuum pump, capable of reducing costs of the splinter shield by obtaining a single sheet of splinter shield having a required strength, in which fastening strength to a fixing groove is enhanced to prevent the splinter shield from bending toward the inside of a pump and coming into contact with equipment inside the pump when air rushes into the pump through an inlet port and to prevent the splinter shield from falling. Furthermore, attachment and removal of the splinter shield with respect to the inlet port are facilitated. The present invention is a splinter shield for a vacuum pump in which a rim formed in a circumferential edge portion of the splinter shield is inserted into a fixing groove that is provided in a concave manner in an inner circumferential portion of an inlet port, and the splinter shield is provided in a tensioned manner to the inlet port by pushing a retaining ring into the fixing groove, wherein locking parts that are locked into the retaining ring at a plurality of sections in the rim are provided in a standing manner at substantially right angles to the rim.

A vacuum pump comprises: a ball bearing which supports a rotor; a holding section which elastically holds an outer ring of the ball bearing; and a grease which is filled between the outer ring and the holding section, the grease having a consistency of NLGI No. 1.5 or less.

A vacuum pump includes a housing having an inlet port, a stator column provided upright inside the housing, a rotating body having a shape surrounding an outer periphery of the stator column, a support means for rotatably supporting the rotating body, and a driving means for driving the rotating body to rotate, wherein gas is sucked in from the inlet port by rotation of the rotating body, and the stator column is constituted of a cast material of aluminum alloy having a mechanical material property of an elongation of 5% or more.

A motor controller comprises: a rotation angle estimation unit for estimating and computing a rotation angle of a motor repeatedly based on the current and voltage of the motor without using a motor rotation angle detector; a speed calculation unit for calculating the period of the signal waveform of the rotation angle that is repeatedly estimated and calculated by the rotation angle estimation unit and for calculating an actual rotational speed of the motor based on the period; a drive signal generating unit for generating a drive signal to drive and control the motor based on at least a deviation between the actual rotational speed and a target rotational speed and the rotation angle; and a switching circuit that is switched based on the drive signal to provide drive power to the motor.

System and method for testing a pump. The testing of the pump includes determining a Mechanical Power Index (MPI) for the pump. The MPI is determined by operating the pump at operating speed for a minimum operating interval. When the pump is stopped under normal operation by the application, the pump speed is continuously monitored. The time when the pump speed decreases to an initial speed close to the operating speed is read as an initial time. When the pump speed decreases to a final pump speed close to the critical speed, the end time is read and the elapsed time is determined as Δt=end time−initial time. The MPI is calculated to be the initial pump speed minus the final pump speed divided by Δt. The MPI can be used during the lifetime of the pump to determine when the pump is deteriorating.

A turbo-molecular pump includes a stator provided at a pump base portion, a rotor rotatably driven on the stator, a heating section configured to heat the pump base portion, abase temperature detection section configured to detect a temperature of the pump base portion, and a rotor temperature detection section configured to detect a temperature equivalent as a physical amount equivalent to a temperature of the rotor. A temperature control device of the turbo-molecular pump comprises: a heating control section configured to control heating of the pump base portion by the heating section based on a detection value of the rotor temperature detection section; and an informing section configured to inform a warning when a detection temperature of the base temperature detection section is equal to or lower than a predetermined threshold.

A pump insert (50) for supporting a rotor (14) of a pump comprises an annular resilient support (52) for engaging the body (26) of the pump, the support (52) extending about a rolling bearing (10) having an inner race (12) for engaging the rotor (14), an axially preloaded outer race (16) fixed to the support (52), and a plurality of rolling elements (18) located between the races. During assembly, the rolling bearing (10) can be accurately positioned within the support (52) so that there is a very low tolerance stack-up when the insert (50) is fitted to the rotor (14). Consequently, the position of the rotor (14) will hardly change, if at all, when the rolling bearing (10) is replaced during servicing of the pump.