A linear actuator for an active engine mount of a vehicle has a stator with a coil that can be fed with electric current for generating an electromagnetic field and an actuating element that is mounted in axially movable fashion with reference to the stator. The actuating element comprises an armature and a ram extending in axial direction and is so mounted in the stator by means of at least one spring element that it can be moved axially in frictionless fashion when the coil is fed with current. The actuating element comprises a support element of a non-magnetic light-weight construction material extending in radial direction between the armature and the ram. Advantageously, the armature is provided only in such regions where there run magnetically relevant field lines of the electromagnetic field of the coil.

An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.

An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.

A non-contact bearing is provided. In a suspended state, the non-contact bearing is disposed with a predetermined spacing to a first guide surface. The non-contact bearing includes: a bearing body and a micro electro mechanical layer. The bearing body includes a second guide surface, wherein the second guide surface is opposite to the first guide surface. The micro electro mechanical layer is disposed on the second guide surface, and includes at least one micro sensor and/or at least one micro actuator.

A magnetic bearing system for controlling magnetic coupling between a mobile carriage and a guideway and a method for controlling the magnetic bearing system. The magnetic bearing system includes at least one engine, which includes at least two poles, at least one permanent magnet and at least one coil. The engine is configured to be magnetically coupled to the guideway through at least one air gap.

The present invention relates to a device for holding, positioning and/or moving an object, with a base and with a carrier movable relative to the base, at least one magnetic bearing for generating a bearing or holding force between the base and the carrier, wherein the carrier is contactlessly supported on the base via the magnetic bearing, at least one drive acting contactlessly between base and carrier for the displacement of the carrier along the base in at least one transport direction, wherein the drive comprises a linear motor with at least one slider and one stator, which are arranged on the base and on the carrier and which, aside from a displacement force acting along the transport direction, are configured to create a counter-force between base and carrier which counteracts the bearing or holding force.

A solenoid includes a coil configured to generate magnetic force when a current flows therethrough; a stator core provided inside the coil, the stator core being configured to be excited by the magnetic force of the coil; a plunger received in a plunger chamber formed inside the stator core, the plunger being configured to move toward an attraction part in the plunger chamber by the magnetic force of the coil; a shaft provided to be able to move, together with the plunger, along axial direction; and a filter provided inside the stator core. The filter is provided on a side of the attraction part from the plunger and in an axial range where the coil is provided.

The present invention relates to a thrust magnetic bearing for bias compensation, and more particularly, to a thrust magnetic bearing for bias compensation in which annular permanent magnets and electromagnets are disposed to face each other with respect to a levitated member and the permanent magnets are formed to be asymmetrical in lengths thereof in an axial direction to thus exert an attractive force for compensating for a bias by the difference in the lengths of the permanent magnets in the axial direction to compensate for the bias, and a current supply for bias magnetic flux is not required, saving energy.

An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.

A magnetic bearing device is provided and includes a stator arrangement having at least two stators and a rotor, wherein the stator comprises a coil apparatus having at least one coil former, magnets and a flux conducting device, the rotor is movable relative to the stator arrangement along a longitudinal direction of the stator arrangement, and the stator arrangement and the rotor are configured such that when electrical energy is applied to the coil apparatus, a magnetic force can be applied to the rotor to form an air gap between the stator arrangement and the rotor. Thereby, the smallest distance between the flux conducting devices of the at least two stators in the longitudinal direction of the stator arrangement is in a range between zero and the distance between the coil apparatuses of the at least two stators. A positioning system comprising such a magnetic bearing device is also provided.