A method of making a mirror for use with extreme ultraviolet (EUV) or X-ray radiation is disclosed. The method includes: a) providing an optical element having a curved mirror surface, wherein the curved mirror surface comprises localized defects that degrade performance of the curved mirror surface; b) spin-coating the curved mirror surface with a material to cover at least some of the defects; and c) curing the spin-coated material on the curved mirror surface to reduce the number of defects and improve the performance of the curved mirror surface. Also disclosed is a mirror made by the method.

The present disclosure generally relates to an electronic device accessory and a method of using such electrical device accessory to convert a built-in camera or webcam of the electronic device into an adjustable camera using the mirror reflection, allowing the built-in camera or webcam to operate, for example, as a document camera. The electronic device accessory comprises at least a foldable main body and a mirror adapted to attach to the main body. The electronic device accessory is configured to clip onto the electronic device. The electronic device includes a desktop computer, a laptop computer, a mobile phone, a tablet, an e-reader or any other electronic device that has a built-in camera. More particularly, the electronic device accessory is preferably a foldable laptop computer camera accessory.

The present disclosure generally relates to an electronic device accessory and a method of using such electrical device accessory to convert a built-in camera or webcam of the electronic device into an adjustable camera using the mirror reflection, allowing the built-in camera or webcam to operate, for example, as a document camera. The electronic device accessory comprises at least a foldable main body and a mirror adapted to attach to the main body. The electronic device accessory is configured to clip onto the electronic device. The electronic device includes a desktop computer, a laptop computer, a mobile phone, a tablet, an e-reader or any other electronic device that has a built-in camera. More particularly, the electronic device accessory is preferably a foldable laptop computer camera accessory.

A lithography system includes an extreme ultraviolet (EUV) light source, a reticle stage, a reflection layer, and a plurality of light permeable protrusions. The EUV light source is configured for generating an EUV light beam. The reticle stage is configured for holding a reticle with a front surface of the reticle facing in a downward direction. The reflection layer is below the reticle stage. The light permeable protrusions are formed on the reflection layer. Each of the light permeable protrusions includes a bouncing surface facing in a direction that forms an acute angle with the downward direction. A first portion of the EUV light beam from the EUV light source passes through the bouncing surface of each of the light permeable protrusions to the reflection layer and is reflected to the reticle by the reflection layer.

An EUV collector mirror for an extreme ultra violet (EUV) radiation source apparatus includes an EUV collector mirror body on which a reflective layer as a reflective surface is disposed, a heater attached to or embedded in the EUV collector mirror body and a drain structure to drain melted metal from the reflective surface of the EUV collector mirror body to a back side of the EUV collector mirror body.

Methods and systems for capturing image information of an environment using a laser scanner are described. The systems include a rotatable mirror arranged to direct light received onto an imaging camera of the laser scanner. The mirror is rotatable relative to the imaging camera and the camera is stationary relative to a rotational axis of the mirror. The methods include rotating the mirror relative to the camera and capturing, via the camera, an image containing image information of the received light. Each pixel of the image contains image information of an accumulation of the received light along a corresponding trajectory during a mirror rotation and each individual trajectory has a trajectory that crosses another of the individual trajectories within the image.

An optical element includes: a substrate, a reflective coating, applied to the substrate, for reflecting radiation in a first wavelength range (Δλ.sub.1) between 100 nm and 700 nm, preferably between 100 nm and 300 nm, more preferably between 100 nm and 200 nm, and a protective coating applied to the reflective coating. The substrate is formed from a material which is transparent to the radiation in the first wavelength range (Δλ.sub.1). The reflective coating is applied to a rear face of the substrate and is structured to reflect radiation that passes through the substrate to the reflective coating. Also disclosed are an optical arrangement with at least one such optical element and a method of producing such an optical element.

Methods, apparatuses and systems for providing optical coatings for optical components are disclosed herein. An example optical component may comprise an optical coating, the optical coating having a visible light reflective layer disposed adjacent a surface of the optical component; at least a first non-visible light reflective layer disposed adjacent the visible light reflective layer; and at least a second non-visible light reflective layer disposed adjacent the first non-visible light reflective layer.

According to the present disclosure, an optical lens assembly includes at least two optical lens elements and at least one reflective element. The reflective element is made of a plastic material, the reflective element includes a reflective coating membrane, and the reflective coating membrane is disposed on a surface of the reflective element. The reflective coating membrane includes at least three coating layers of different materials, the at least three coating layers are respectively made of a first material, a second material and a third material, the first material mainly includes silver, the second material mainly includes titanium, the third material mainly includes chromium oxides, and the coating layer made of the first material and the coating layer made of the second material are disposed between the coating layer made of the third material and the reflective element.

Examples include a device including a nanovoided polymer element having a first surface and a second surface, a first plurality of electrodes disposed on the first surface, a second plurality of electrodes disposed on the second surface, and a control circuit configured to apply an electrical potential between one or more of the first plurality of electrodes and one or more of the second plurality of electrodes to induce a physical deformation of the nanovoided polymer element.