G02B26/08

ILLUMINATION APPARATUS AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES

Disclosed is an illumination arrangement for spectrally shaping a broadband illumination beam to obtain a spectrally shaped illumination beam. The illumination arrangement comprises a beam dispersing element for dispersing the broadband illumination beam and a spatial light modulator for spatially modulating the broadband illumination beam subsequent to being dispersed. The illumination arrangement further comprises at least one of a beam expanding element for expanding said broadband illumination beam in at least one direction, located between an input of the illumination arrangement and the spatial light modulator; and a lens array, each lens of which for directing a respective wavelength band of the broadband illumination beam subsequent to being dispersed onto a respective region of the spatial light modulator.

HIGH-SPEED IMAGING APPARATUS AND IMAGING METHOD
20230232124 · 2023-07-20 · ·

An imaging apparatus (100, 300) comprising: an optical encoder (150, 350) configured to provide an encoded image of an object (110) with at least one mask pattern; a rotating mirror (170) configured to receive and project said encoded image; and an image sensor (180) configured to receive said encoded; wherein, said rotating mirror (170) is operable such that a plurality of encoded images, which are individually projected by said rotating mirror (170) are spatially shifted as a result of rotation of said rotating mirror (170), are swept across said image sensor (180).

ADAPTIVE OPTICAL ELEMENT FOR MICROLITHOGRAPHY
20230229091 · 2023-07-20 ·

An adaptive optical element for microlithography comprises at least one manipulator for changing the shape of an optical surface of the optical element. The manipulator comprises a dielectric medium which is deformable via an electric field, work electrodes for generating the electric field in the dielectric medium, and a measuring electrode for measuring temperature. The measuring electrode is arranged in a direct assemblage with the dielectric medium. The measuring electrode has a temperature-dependent resistance.

OPTICAL PATH CONTROL MEMBER AND DISPLAY DEVICE COMPRISING SAME
20230229035 · 2023-07-20 ·

An optical path control member, according to an embodiment, comprises: a first substrate by which a first direction and a second direction are defined; a first electrode disposed on the first substrate; a second substrate disposed on the first substrate and by which the first direction and the second direction are defined; a second electrode disposed under the second substrate; and an optical conversion unit disposed between the first electrode and the second electrode, wherein the second substrate and the second electrode include a cutting part penetrating the second substrate and the second electrode, the cutting part includes: a 1-1 cutting part and a 1-3 cutting part disposed to face each other in the second direction; a 1-2 cutting part disposed adjacent to the 1-1 cutting part and spaced apart from the 1-1 cutting part; and a 1-4 cutting part disposed adjacent to the 1-3 cutting part and spaced apart from the 1-3 cutting part, a 1-1 sealing part and a 1-3 sealing part are respectively disposed in the 1-1 cutting part and the 1-3 cutting part, and a 1-2 sealing part and a 1-4 sealing part are respectively disposed inside the 1-2 cutting part and the 1-4 cutting part.

DISPLAY DEVICE HAVING COMMON LIGHT PATH REGION

Examples are disclosed that relate to display devices having a common light path region. One example provides a display device comprising a light source configured to emit illumination light along an illumination path, and a spatial light modulator configured to modulate the illumination light and emit the modulated illumination light as image light along an imaging path, wherein at least a portion of the illumination path and at least a portion of the imaging path extend through a common light path region. The display device further comprises one or more optical elements positioned within the common light path region, at least one optical element being configured to guide the illumination light as the illumination light travels through the common light path region toward the spatial light modulator, and shape the image light as the image light travels through the common light path region.

MEMS MIRROR IN SERIES WITH RESONANT MEMS MIRROR TO REDISTRIBUTE DENSE PIXELS
20230228985 · 2023-07-20 ·

A near-eye display system employs a low-amplitude, low-frequency micro-electromechanical system (MEMS) mirror in series with a higher-amplitude, higher-frequency resonant MEMS mirror to rotate at a reduced amplitude and frequency with respect to the resonant MEMS mirror redistribute illumination pulses or pixels at the extents of a sinusoidal angular scan pattern of the resonant MEMS mirror.

Head-up display device and transportation device
11561396 · 2023-01-24 · ·

A head-up display device and a transportation device are provided. The head-up display device includes a light source, a scanner configured to scan light emitted from the light source to form scanned light, an angle adjuster configured to change an exit angle of the scanned light, a display unit configured to form an image according to the scanned light from the angle adjuster, and a projection assembly configured to project the image formed on the display component to a selected area.

Light module

A light module includes an optical element and a base on which the optical element is mounted. The optical element has an optical portion which has an optical surface; an elastic portion which is provided around the optical portion such that an annular region is formed; and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion. The base has a main surface, and a mounting region in which an opening communicating with the main surface is provided. The support portions are inserted into the opening in a state where an elastic force of the elastic portion is applied.

LINE SCANNER DRIVEN BY MAGNETICALLY PRELOADED CAM

A line scanner assembly includes a cam with a cam surface, where the cam rotatable about a cam axis of rotation and includes a first ferromagnetic material. A mirror with a planar surface is configured to tilt about a mirror axis of rotation. A follower is attached to the mirror and has a second ferromagnetic material, where the first magnetic material and/or the second magnetic material includes a permanent magnet and where the follower maintains contact with the cam due to a magnetic attraction between the first ferromagnetic material and the second ferromagnetic material.

Method and system for time-of-flight imaging with high lateral resolution

An image capturing system includes a light source configured to emit light toward an object or scene that is to be imaged. The system also includes a time-of-flight image sensor configured to receive light signals based on reflected light from the object or scene. The system also includes a processor operatively coupled to the light source and the time-of-flight image sensor. The processor is configured to perform compressive sensing of the received light signals. The processor is also configured to generate an image of the object or scene based at least in part on the compressive sensing of the received light signals.