A valve device comprises an opening degree detection section and a control section. The control section performs, according to the pressure value and the opening degree detected by the opening degree detection unit, either one of open control for performing rough adjustment of the opening degree of the valve body or close control for performing fine adjustment of the opening degree of the valve body, in the open control, a predictive pressure estimation value at a preset future prediction target time from a current point is estimated, and the rough adjustment is performed based on the predictive pressure estimation value and the target pressure value, and in the close control, the fine adjustment is performed based on the target pressure value and the pressure value.

An inlet pressure valve regulation system to provide a regulated fluid flow includes a housing, first piston assembly, regulating valve, and inlet pressure conduit. The housing has an inlet at an inlet end which receives a pressurized fluid and an outlet at an outlet end which provides the regulated fluid flow. The piston assembly is arranged in the housing and has a first cavity and a control orifice to fluidly connect the inlet to the first cavity. The first piston assembly is configured to regulate the fluid flow. The regulating valve has a first valve chamber, a second valve chamber fluidly connected to a vent, a floating valve seat disposed between the first valve chamber and the second valve chamber, and a valve component. The floating valve seat includes a diaphragm and a seat having a passageway to fluidly connect the first valve chamber and the second valve chamber.

A pneumatic controller for connecting to a vacuum source and providing a vacuum output signal. The pneumatic controller includes a valve body defining a number of different chambers. At least two of the chambers that are separated by diaphragm and one of these chambers is maintained at vacuum pressure. In response to a pressure differential between the two chambers, the diaphragm deforms causing a valve to move from a first position, where an output port is coupled to atmospheric pressure, to a second position, where the output port is coupled to vacuum pressure. The valve is inhibited for moving between the first and second positions unless a sufficient vacuum pressure is present. Movement of the valve from the second position to the first position is also delayed until the two chambers are substantially equalized.

An exemplary communication or signaling system that includes an energy emission system that can include a control system, a fluid reservoir, fluid transfer structures, a fluid pumping system, an emission structure, an enclosure extending away from the fluid emission structure, a fluid recovery system, and a lens structure adapted to pass energy through the lens structure. The emission structure can include a porous structure and/or structure(s) with a number of fluid emission sections that generate one or more fluid structures such as droplets or other fluid shapes which increase or decrease fluid surface area on the fluid emission structure and thereby increase or decrease energy emissions or absorption on or in relation to the fluid emission structure. The control system can selectively modulate pressure/fluid transfer via the pump into the fluid transfer structures which alter energy emission or absorption that can be detected at a distance.

A vacuum valve placed between a vacuum vessel and a vacuum pump to adjust a valve opening degree using an operating fluid includes a packing mounted in a recessed groove of a piston. The packing is provided with a contact portion on a radially inner side and a contact portion on a radially outer side, and a slide-contact portion contacting with an inner peripheral surface of a cylinder. A portion between the contact portion and the slide-contact portion has a thin thickness.

A processing liquid supply system includes a tank that stores a processing liquid supplied from a processing liquid supply, a circulation passage that is connected to the tank, a plurality of supply passages that is connected to the circulation passage and supplies the processing liquid to each of a plurality of liquid processing units that perform a liquid processing on a substrate, a first pump filter set that is a combination of a first pump and a plurality of first filters provided downstream of the first pump, and a second pump filter set that is a combination of a second pump and a plurality of second filters provided downstream of the second pump. The first pump filter set and the second pump filter set are arranged in series in the circulation passage such that the first pump filter set is located upstream of the second pump filter set.

A control system having a pressure regulator, first pilot, and second pilot. The pressure regulator has a fluid inlet, fluid outlet, and actuator assembly with a cavity divided into a first chamber in fluid communication with the fluid outlet and a second chamber. The first pilot has a first setpoint and the second pilot has a second setpoint, less than the first setpoint. The first and second pilots fluidly couple the second chamber to the fluid outlet and isolate the second chamber from the fluid inlet in a first mode of operation, isolate the second chamber from the fluid outlet and fluid inlet in a second mode of operation, and fluidly couple the second chamber to the fluid inlet in a third mode of operation.

A pneumatic controller for connecting to a vacuum source and providing a vacuum output signal. The pneumatic controller includes a valve body defining a number of different chambers. At least two of the chambers that are separated by diaphragm and one of these chambers is maintained at vacuum pressure. In response to a pressure differential between the two chambers, the diaphragm deforms causing a valve to move from a first position, where an output port is coupled to atmospheric pressure, to a second position, where the output port is coupled to vacuum pressure. The valve is inhibited for moving between the first and second positions unless a sufficient vacuum pressure is present. Movement of the valve from the second position to the first position is also delayed until the two chambers are substantially equalized.

A feedback control apparatus includes: a detector configured to detect an output value based on a controlled object; a P control circuit including a differential amplifier circuit and an analog circuit, the differential amplifier circuit being configured to receive a detection value of the detector and a target value, the analog circuit being configured to output a P control component V.sub.P to an output of the differential amplifier circuit; an I control unit configured to output an I control component V.sub.I by integrating a deviation of the detection value from the target value by digital processing; and a driver element configured to be driven based on the P control component V.sub.P from the P control circuit and the I control component V.sub.I from the I control unit to control the controlled object.

The invention generally provides a static back pressure regulator. In exemplary embodiments, the static back pressure regulator includes a seat that defines part of a fluid pathway, a poppet, a spring arranged to bias the poppet toward the seat to restrict fluid flow through the fluid pathway, and a calibration element configured to adjust a force applied to the poppet by the spring. The calibration element can include a through hole that forms part of the fluid pathway. The poppet can include a first guiding portion that extends into the through hole of the calibration element and inhibits tipping of the poppet relative to the seat.