An x-ray tube source is disclosed that allows differential phase shift, attenuation, and x-ray scattering features of an object to be acquired in a single exposure. Such multiplexed x-ray tube source includes multiple x-ray spot origins controlled in such a way that each slightly separated spot is temporally modulated “ON and OFF” at differing frequencies. In an x-ray interferometer system, such x-ray tube source forms multiple illumination beams of a single angular view of an object's feature but each with different interference fringe locations. A composite image can be acquired with a high frame-rate digital detector as a component element in such x-ray interferometer system. Such composite image can be subsequently de-multipexed and separately presented according to each spot-source illumination beam. Such isolated images of an object's feature, each having different fringe locations, allows for post-acquisition “fringe-mapping” analysis of the feature's full interaction with x-rays, including refraction, scattering, and absorption.

The X-ray phase imaging apparatus includes a position switching mechanism for switching a relative position of one or more gratings between a retreated position which is an outside of a detection range on a detection surface of an image signal detector and a detection positon which is an inside of the detection range on the detection surface of the image signal detector and a focal diameter changing unit configured to change a focal diameter of the X-ray source in conjunction with switching of the relative position of the one or more gratings.

An X-ray generation target includes a plurality of long target parts generating X-rays in response to incidence of an electron beam and a target part holder in which the plurality of target parts are buried to be parallel to each other. The target part holder includes a mark part indicating an arrangement state of the target parts.

The present invention relates to a grating for X-ray phase contrast and/or dark-field imaging. It is described to form a photo-resist layer on a surface of a substrate. The photo-resist layer is illuminated with radiation using a mask representing a desired grating structure. The photo-resist layer is etched to remove parts of the photo-resist layer, to leave a plurality of trenches that are laterally spaced from one across the surface of the substrate. A plurality of material layers are formed on the surface of the substrate. Each layer is formed in a trench. A material layer comprises a plurality of materials, wherein the plurality of materials are formed one on top of the other in a direction perpendicular to the surface of the substrate. The plurality of materials comprises at least one material that has a k-edge absorption energy that is higher than the k-edge absorption energy of Gold and the plurality of materials comprises Gold.

The present invention relates to a grating in X-ray imaging. In order to provide a grating with a facilitated stabilization, a grating (10) for X-ray imaging is provided that comprises a grating structure (12) with a first plurality of bar members (14) and a second plurality of gaps (16). A fixation structure (18) is arranged between the bar members to stabilize the grating bar members. The bar members are extending in a length direction (20) and in a height direction (22). The bar members are also spaced from each other by one of the gaps in a direction transverse to the height direction. The gaps are arranged in a gap direction parallel to the length direction. The fixation structure comprises a plurality of bridging web members (24) that are provided between adjacent bar members. Further, the web members are longitudinal web members that are extending in the gap direction and that are provided in an inclined manner in relation to the height direction. The inclination is provided in the gap direction.

A phase contrast X-ray imaging system includes: an illumination source adapted to illuminate a region of interest; a diffraction grating adapted to receive illumination from the illuminated region of interest, the diffraction grating comprising a spatial structure having a first periodicity superimposed with a second periodicity that is different from the first periodicity; and a detector adapted to detect illumination passing through the diffraction grating, wherein the spatial structure is defined by varying height and/or pitch, and wherein the spatial structure imparts a first phase dependence based on the first periodicity and an additional phase dependence based on the second periodicity on the illumination passing through the diffraction grating.

The present invention relates to a device for aligning an X-ray grating to an X-ray radiation source, the device (10) comprising at least two flat X-ray grating segments (11-19); at least one alignment unit (31-39) for aligning one of the at least two flat X-ray grating segments; wherein the at least two flat X-ray grating segments (11-19) are arranged in juxtaposition and are forming an X-ray grating (20); wherein the at least two flat X-ray grating segments (11-19) each comprise a grating surface (41-49) for X-ray radiation, each grating surface (41-49) comprising a geometrical center; wherein normals (21-29) to each of the grating surfaces (41-49) define a common plane (73), wherein the normals (21-29) intersect the geometrical center of the grating surface (41-49); wherein at least a first of the at least two flat X-ray grating segments (11-19) is rotatable around an axis (131-139) that is perpendicular to the common plane (73); and wherein the first of the at least two flat X-ray grating segments (11-19) that is rotatable around the axis (131-139) is connected to a first of the at least one alignment unit (31-39). The invention provides a device (10) and a method (100) which provide an improved X-ray grating (20).

The present invention discloses an imaging device, an imaging method, and an imaging system, belonging to the field of sample image data acquisition and imaging technology. The imaging device includes: a charged particle source, a convergence system, a scanning control system, a detection module, and a spectral analysis module disposed below the detection module, where the detection module includes a plurality of pixelated detector units; and the detection module is provided with a hole thereon. The diffraction pattern is obtained by using the detection module, and the spectral analysis module performs spectral analysis on a charged particle beam passing through the hole, so as to obtain the diffraction pattern and spectral signal simultaneously by one scanning. The imaging method of the present invention is based on a hollow ptychography method, which enables toper form imaging on the diffraction pattern obtained through the detection module, with good imaging effects.

A method for electroplating a nonmetallic grating including providing a nonmetallic grating; performing an atomic layer deposition (ALD) reaction to form a seed layer on the nonmetallic grating; and electroplating a metallic layer on the seed layer such that the metallic layer uniformly and conformally coats the nonmetallic grating. An apparatus including a silicon substrate having gratings with an aspect-ratio of at least 20:1; a atomic layer deposition (ALD) seed layer formed on the gratings; and an electroplated metallic layer formed on the seed layer, wherein the electroplated metallic layer uniformly and conformally coats the gratings.

A system for high-resolution high-contrast x-ray ghost diffraction comprises: A) a laboratory x-ray source configured to provide an input beam; B) a diffuser configured to induce intensity fluctuations in the input beam; C) a beam splitter configured to split the input beam into: i) a test arm comprising an object and a single-pixel detector; and ii) a reference arm comprising one of: (a) a multi-pixel detector and (b) a single-pixel detector and an aperture or a scanning slit configured to simulate a one or two dimensional multi-pixel detector; and D) a processor configured to receive output intensity measurements of the detectors in the test arm and the reference arm, to record the output intensity measurements at different rotational positions of the rotating diffuser, to correlate the output intensity measurements, and to use the correlated output measurements to reconstruct a diffraction pattern of the object; wherein the object is placed as close as possible to the beam splitter and the detectors in the test arm and the reference arm are equidistant from the beam splitter.