Patent classifications
G01D3/032
Method for improving EMC robustness of integrated capacitive sensors
A method is provided for improving the EMC robustness of Integrated Capacitive Sensor systems with a sensor Signal-Conditioner (SSC). The SSC is connected with a capacitive integrating converter to convert a received signal into a bit stream. An oscillator provides a plurality of sampling frequencies. A counter connected with the capacitive integrating converter collects the bit stream and calculates the digital representative of the physical input which is than stored in an output register. The method includes performing some conversions with different sampling frequencies from the oscillator or a frequency divider by the capacitive integrating Signal-Converter; storing the results of the samplings and using the results in the following cycle to calculate for each sampling frequency a difference to the prior sampling of the same frequency; and calculating the digital representative of the input signal from the external sensing capacitor as the reverse weighted average of the samplings of the different frequencies.
ELECTRIC MOTOR CONTROL DEVICE
An electric motor control device that can accurately calculate the rotating speed of an electric motor. The electric motor control device includes a speed calculating unit configured to receive, from a position detector that detects a rotational position of an electric motor and outputs a position detection signal including a periodic error determined according to the rotational position, an input of the position detection signal, receive, from a time detector that outputs a position change time signal obtained by detecting a time period in which the position detection signal output from the position detector changes, an input of the position change time signal, and calculate rotating speed of the electric motor based on the position detection signal and the position change time signal. Further, there is a speed correcting unit for correcting a periodic speed error determined according to the rotational position of the electric motor.
APPARATUS WITH HALL SENSOR COMMON MODE VOLTAGE ADJUSTMENT AND APPARATUS WITH LENS MODULE CONTROL
An apparatus with hall sensor common mode voltage adjustment includes: a bias provider configured to provide a bias current to the hall sensor; a first voltage regulator configured to vary a first voltage difference between the hall sensor and the bias provider, based on the bias current; and a second voltage regulator configured to vary a second voltage difference between the hall sensor and a ground, based on the bias current. The first and second voltage differences are variable such that a difference between the first voltage difference and the second voltage difference corresponds to a difference between a common mode voltage of first and second hall sensor output terminals of the hall sensor and a reference voltage.
Event analysis in an electric power system
According to some embodiments, system and methods are provided including receiving, via a communication interface of an event detection and classification module comprising a processor, data from one or more sensors in a system; determining an event occurred based on the received data; applying a coherency similarity process to the received data via a classification module; determining whether the event is an actual event or a mal-doer event based on an output of the classification module; transmitting the determination of the event as the actual or the mal-doer event; and modifying operation of the system based on the transmitted output. Numerous other aspects are provided.
Event analysis in an electric power system
According to some embodiments, system and methods are provided including receiving, via a communication interface of an event detection and classification module comprising a processor, data from one or more sensors in a system; determining an event occurred based on the received data; applying a coherency similarity process to the received data via a classification module; determining whether the event is an actual event or a mal-doer event based on an output of the classification module; transmitting the determination of the event as the actual or the mal-doer event; and modifying operation of the system based on the transmitted output. Numerous other aspects are provided.
Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method
The invention relates to an electronic system for an accelerometer having a piezoelectric element and a first mechanical resonance frequency, comprising: a) a damping circuit configured to: —receive an acceleration signal from the piezoelectric element; —electronically dampen an amplitude of the first mechanical resonance frequency; and—generate a damped acceleration signal, b) an extender configured to: —receive the damped acceleration signal; —extend the frequency response; and—output an extended damped acceleration signal, wherein the extender is configured to have a first electronic anti-resonance frequency matching the damped first mechanical resonance frequency, and to have a frequency response between the first electronic anti-resonance frequency and a higher second frequency that is substantially opposite to a corresponding frequency response of the combination of the accelerometer and the damping circuit.
Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method
The invention relates to an electronic system for an accelerometer having a piezoelectric element and a first mechanical resonance frequency, comprising: a) a damping circuit configured to: —receive an acceleration signal from the piezoelectric element; —electronically dampen an amplitude of the first mechanical resonance frequency; and—generate a damped acceleration signal, b) an extender configured to: —receive the damped acceleration signal; —extend the frequency response; and—output an extended damped acceleration signal, wherein the extender is configured to have a first electronic anti-resonance frequency matching the damped first mechanical resonance frequency, and to have a frequency response between the first electronic anti-resonance frequency and a higher second frequency that is substantially opposite to a corresponding frequency response of the combination of the accelerometer and the damping circuit.
Actuator device and method for compensating for a stray magnetic field in the case of an actuator device
An electromagnetic actuator device includes an actuator having an actuator coil and a tappet that can be moved in and against a longitudinal direction. The actuator device includes a sensor device having a transmitter element arranged on the tappet and a sensor element for generating a measurement signal, containing information about a current actual position of the tappet, depending on a magnetic field generated by the transmitter element. The actuator device includes a control unit with a controller, which applies a control voltage to the actuator coil for generating an electromagnetic field during operation in dependence on a position signal based on the measurement signal, so that the tappet moves into a target position. During operation, a stray magnetic field is generated by the at actuator coil, an adaptation of the measurement signal is performed to compensate for the influence on the measurement signal caused by the stray field.
Actuator device and method for compensating for a stray magnetic field in the case of an actuator device
An electromagnetic actuator device includes an actuator having an actuator coil and a tappet that can be moved in and against a longitudinal direction. The actuator device includes a sensor device having a transmitter element arranged on the tappet and a sensor element for generating a measurement signal, containing information about a current actual position of the tappet, depending on a magnetic field generated by the transmitter element. The actuator device includes a control unit with a controller, which applies a control voltage to the actuator coil for generating an electromagnetic field during operation in dependence on a position signal based on the measurement signal, so that the tappet moves into a target position. During operation, a stray magnetic field is generated by the at actuator coil, an adaptation of the measurement signal is performed to compensate for the influence on the measurement signal caused by the stray field.
METHOD FOR IMPROVING EMC ROBUSTNESS OF INTEGRATED CAPACITIVE SENSORS
A method is provided for improving the EMC robustness of Integrated Capacitive Sensor systems with a sensor Signal-Conditioner (SSC). The SSC is connected with a capacitive integrating converter to convert a received signal into a bit stream. An oscillator provides a plurality of sampling frequencies. A counter connected with the capacitive integrating converter collects the bit stream and calculates the digital representative of the physical input which is than stored in an output register. The method includes performing some conversions with different sampling frequencies from the oscillator or a frequency divider by the capacitive integrating Signal-Converter; storing the results of the samplings and using the results in the following cycle to calculate for each sampling frequency a difference to the prior sampling of the same frequency; and calculating the digital representative of the input signal from the external sensing capacitor as the reverse weighted average of the samplings of the different frequencies.