A high harmonic radiation source and associated method of generating high harmonic radiation is disclosed. The high harmonic radiation source is configured to condition a gas medium by irradiating the gas medium with a pre-pulse of radiation, thereby generating a plasma comprising a pre-pulse plasma distribution; and irradiate the gas medium with a main pulse of radiation to generate said high harmonic radiation. The conditioning step is such that the plasma comprising a pre-pulse plasma distribution acts to configure a wavefront of said main pulse to improve one or both of: the efficiency of the high harmonic generation process and the beam quality of the high harmonic radiation. The high harmonic radiation source further may comprise a beam shaping device configured to shape said customized pre-pulse prior to said conditioning.

A high harmonic radiation source and associated method of generating high harmonic radiation is disclosed. The high harmonic radiation source is configured to condition a gas medium by irradiating the gas medium with a pre-pulse of radiation, thereby generating a plasma comprising a pre-pulse plasma distribution; and irradiate the gas medium with a main pulse of radiation to generate said high harmonic radiation. The conditioning step is such that the plasma comprising a pre-pulse plasma distribution acts to configure a wavefront of said main pulse to improve one or both of: the efficiency of the high harmonic generation process and the beam quality of the high harmonic radiation. The high harmonic radiation source further may comprise a beam shaping device configured to shape said customized pre-pulse prior to said conditioning.

The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.

The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluorescence (XRF) systems which employ such X-ray emitting targets.

A residual stress detection device for a curved surface coating and a detection method thereof is provided, where its structure includes: a detection piece carrier, configured to fix the detection piece, so that a to-be-detected point on the detection piece remains at a highest point; an X-ray generation source, radiating an X-ray to the to-be-detected point fixedly or along a path; a detection element, including a moving mechanism, where the moving mechanism moves the detection element along a path extending toward a direction orthogonal to an incident direction of the X-ray, so that the detection element receives and detects intensity of a diffraction X-ray at a position of the diffraction X-ray; and a stress calculation module, obtaining a strain value based on an intensity peak of the diffraction X-ray detected by the detection element, and calculating a residual stress value of the detection piece by using a formula.

A sample inspection system contains a source of electromagnetic radiation and an apparatus that includes a beam former, a collimator and an energy resolving detector. The beam former is adapted to receive electromagnetic radiation from the source to provide a polygonal shell beam formed of at least three walls of electromagnetic radiation. The collimator has a plurality of channels adapted to receive diffracted or scattered radiation at an angle. The energy resolving detector is arranged to detect radiation diffracted or scattered by a sample upon incidence of the polygonal shell beam onto the sample and transmitted by the collimator.

An object of the present invention is to provide a novel method for determining the structure of a target substance contained in a multicomponent sample. The present invention provides a method of determining the structure of a target substance contained in a mixture of two or more substances, wherein the method includes the steps of: isolating the target substance from the mixture by means of supercritical fluid chromatography, soaking the isolated target substance into a crystalline sponge to produce a sample for crystallography, and performing a crystallographic analysis on the sample for crystallography. A volatile solvent can be used as a mobile phase in the supercritical fluid chromatography.

A detection scheme for x-ray small angle scattering is described. An x-ray small angle scattering apparatus may include a first grating and a complementary second grating. The first grating includes a plurality of first grating cells. The complementary second grating includes a plurality of second grating cells. The second grating is positioned relative to the first grating. A configuration of the first grating, a configuration of the second grating and the relative positioning of the gratings are configured to pass one or more small angle scattered photons and to block one or more Compton scattered photons and one or more main x-ray photons.

A detection scheme for x-ray small angle scattering is described. An x-ray small angle scattering apparatus may include a first grating and a complementary second grating. The first grating includes a plurality of first grating cells. The complementary second grating includes a plurality of second grating cells. The second grating is positioned relative to the first grating. A configuration of the first grating, a configuration of the second grating and the relative positioning of the gratings are configured to pass one or more small angle scattered photons and to block one or more Compton scattered photons and one or more main x-ray photons.

Method, apparatus, system, and computer program product for inspecting a joining feature on an object. A portable housing with an x-ray system is moved along the joining feature on the object. The x-ray system is controlled to direct an x-ray beam through an opening in the portable housing to scan an area of the object containing the joining feature as the portable housing moves along the joining feature on the object. Sensor data generated from a backscatter detected by a sensor system is received. The backscatter is generated in response to the x-ray beam encountering the area of the object including the joining feature. A determination is made as to whether an inconsistency is present in the area of the object including the joining feature using the sensor data.