Methods and systems for reducing the effect of finite source size on illumination beam spot size for Transmission, Small-Angle X-ray Scatterometry (T-SAXS) measurements are described herein. A beam shaping slit having a slender profile is located in close proximity to the specimen under measurement and does not interfere with wafer stage components over the full range of angles of beam incidence. In one embodiment, four independently actuated beam shaping slits are employed to effectively block a portion of an incoming x-ray beam and generate an output beam having a box shaped illumination cross-section. In one aspect, each of the beam shaping slits is located at a different distance from the specimen in a direction aligned with the beam axis. In another aspect, the beam shaping slits are configured to rotate about the beam axis in coordination with the orientation of the specimen.

Methods and devices are disclosed for the tomographic imaging of a biological sample from almost all rotational perspectives in three-dimensional space and with multiple imaging modalities. A biological sample is positioned on an imaging stage that is capable of nearly full 360-degree rotation in at least one of two substantially orthogonal axes. Positioned about the stage is an X-ray imaging module enabling the recording of a series of images. A reflected light imaging module can also be positioned about the stage to enable recording of black and white or color white light images. A computer can use the images to construct three-dimensional models of the sample and to render images of the sample conveying information from one or more imaging channels.

The invention relates to an industrial X-ray workpiece measuring system comprising an X-ray source (4), which is arranged in an X-ray protective housing (2) and has an X-ray focal spot (3), workpiece carrier means, which are arranged in the X-ray protective housing, for accommodating a non-medical workpiece (5) to be examined, and X-ray detector means (10a, 10b, 10c) which are provided on and/or in the X-ray protective housing, are designed to detect an X-ray beam from the X-ray source, which X-ray beam penetrates the workpiece held on the workpiece carrier means, and downstream of which X-ray detector means electronic evaluating means can be connected.

A spectrum measurement and estimation method for tomographic reconstruction, beam hardening correction, dual-energy CT and system diagnosis, etc., comprises determining the spectra for combinations of source acceleration voltage, pre-filters and/or detectors and after measuring the transmission values of several pre-filters, calculating corrected spectra for the combinations of the source acceleration voltage, pre-filters and/or detectors.

An equipment mount for an x-ray apparatus is disclosed. The mount comprises a main shield element, a peripheral shield element and a secondary shield element arranged to permit a mounting element to pass through the main shield element in a shielded manner. A support apparatus for an x-ray apparatus is also disclosed. The support apparatus comprises a separable bearing for translating a support part between a first position and a second position and an elevator mechanism for translating the support part from the second position to a third position, thereby separating the bearing. A manipulator stage for an x-ray apparatus is also disclosed. The stage comprises a first support structure arranged to support a sample stage and supported at first and second positions either side of the sample stage by second and third support structures, the second and third support structures being configured to allow the first support structure to raise and lower while remaining supported at both ends.

A ball-mapping system connectable to an X-ray diffraction apparatus, for collecting X-ray diffraction data at measurement points located on a ball-shaped sample is provided. The system includes a sample stage, including a sample-contacting surface and a guide assembly cooperating with the sample-contacting surface for guiding the sample-contacting surface along a first axis and along a second axis unparallel to the first axis. The system includes a sample holder for keeping the ball-shaped sample in contact with the sample stage and a motor assembly in driving engagement with the guide assembly, the motor assembly driving the sample-contacting surface in translational movement along the first axis and the second axis, the translational movement of the sample-contacting surface causing the ball-shaped sample to rotate, on the sample-contacting surface along the first axis and the second axis. A method for mapping the ball-shaped sample is also provided.

An X-ray apparatus includes: a mounting unit upon which an object to be measured is mounted; an X-ray generation unit that irradiates X-rays, from above the mounting unit or from below the mounting unit, to the object to be measured upon the mounting unit; an X-ray detector that acquires a transmission image of the object to be measured being irradiated by the X-rays; a first movement unit that moves at least one of the mounting unit, the X-ray generation unit, and the X-ray detector along a direction of irradiation of the X-rays; a position detection unit that detects a relative position of the mounting unit, the X-ray generation unit, and the X-ray detector; and a calculation unit that calculates a magnification of a transmission image of the object to be measured acquired by the X-ray detector, in a state in which deflection of the mounting unit has occurred while the object to be measured is mounted upon the mounting unit.

A shielded X-ray radiation apparatus is provided comprising an X-ray source, an X-ray attenuation shield including an elongate cavity to house the X-ray source and incorporating a region to accommodate a sample, a neutron attenuation shield, and a gamma attenuation shield. The neutron attenuation shield is situated adjacent to and substantially surrounds the X-ray attenuation shield and the gamma attenuation shield is adjacent to and substantially surrounds the neutron attenuation shield. In some embodiments a removable sample insertion means is provided to insert samples into the elongate cavity and which is composed of adjacent blocks of material, each respective block having a thickness and a composition which substantially matches the thickness and a composition of one of the X-ray attenuation, neutron attenuation and gamma-ray attenuation shields.

The invention relates to a vacuum chuck for clamping workpieces (19), in particular wafers, and a measuring device and a method for checking workpieces, in particular wafers, by means of X-ray fluorescent radiation.

A specimen radiography system may include a controller and a cabinet. The cabinet may include an x-ray source, an x-ray detector, and a specimen drawer disposed between the x-ray source and the x-ray detector. The specimen drawer may be automatically positionable along a vertical axis between the x-ray source and the x-ray detector.