A MEMS microforce sensor for high temperature nanoindentation is used for determining a mechanical property of a sample by sensing a deflection and measuring a force. The MEMS microforce sensor includes at least a cold movable body, a heatable movable body, a heating resistor and capacitor electrodes. The cold movable body and the heatable movable body are mechanically connected by at least one bridge and the capacitor electrodes measure a force applied on the sample by sensing the deflection of the cold movable body relative to the outer frame by a change of electrical capacitance.

Provided is a scanning probe microscope with which measurement data and a distribution image of differential data of the measurement data can be displayed selectively or together, an edge enhancement image can be obtained, and user convenience is improved. A scanning probe microscope (200) includes: a distribution image calculator (40a) configured to calculate a one-dimensional or two-dimensional first distribution image (201) of measurement data, and a one-dimensional or two-dimensional second distribution image (202) of differential data of adjacent data elements of the measurement data; and a display controller (40b) configured to instruct the distribution image calculator to calculate at least one of the first distribution image or the second distribution image, and to display the calculated distribution image on a predetermined display.

An acoustic analysis device based on atomic force microscopy for the volume analysis of an organic or inorganic sample includes a support on which the sample is immobilized, and an atomic force microscopy lever having a free end provided with a part that interacts with an upper face of the sample and scans said upper face, one or at least two of the independent piezoelectric actuators supplying ultrasonic waves with interferential coupling, and acoustic measurement and analysis bodies associated with the atomic force microscopy lever. The support is a total reflection prism to which the piezoelectric actuators are applied, and the piezoelectric actuators are applied in determined positions on said prism in order to define determined angles of excitation of the ultrasonic waves.

A large radius probe for a surface analysis instrument such as an atomic force microscope (AFM). The probe is microfabricated to have a tip with a hemispherical distal end or apex. The radius of the apex is the range of about a micron making the probes particularly useful for nanoindentation analyses, but other applications are contemplated. In particular, tips with aspect ratios greater than 2:1 can be made for imaging, for example, semiconductor samples. The processes of the preferred embodiments allow such large radius probes to be batch fabricated to facilitate cost and robustness.

Surface measurement probe comprising: a hollow probe body extending along a longitudinal axis and comprising a proximal end adapted to be mounted to a test apparatus and a distal end; a retaining arrangement situated inside the probe body and extending along said longitudinal axis, the retaining arrangement being arranged to maintain the surface measurement probe in an assembled state; a probe tip supported at the distal end of the probe body and arranged to contact a sample; a bead situated inside the probe body and interposed between the probe tip and the retaining arrangement, the bead comprising a thermally-insulating material.

Provided is a scanning probe microscope with which measurement data and a distribution image of differential data of the measurement data can be displayed selectively or together, an edge enhancement image can be obtained, and user convenience is improved. A scanning probe microscope (200) includes: a distribution image calculator (40a) configured to calculate a one-dimensional or two-dimensional first distribution image (201) of measurement data, and a one-dimensional or two-dimensional second distribution image (202) of differential data of adjacent data elements of the measurement data; and a display controller (40b) configured to instruct the distribution image calculator to calculate at least one of the first distribution image or the second distribution image, and to display the calculated distribution image on a predetermined display.

An acoustic analysis device based on atomic force microscopy for the volume analysis of an organic or inorganic sample includes a support on which the sample is immobilized, and an atomic force microscopy lever having a free end provided with a part that interacts with an upper face of the sample and scans said upper face, one or at least two of the independent piezoelectric actuators supplying ultrasonic waves with interferential coupling, and acoustic measurement and analysis bodies associated with the atomic force microscopy lever. The support is a total reflection prism to which the piezoelectric actuators are applied, and the piezoelectric actuators are applied in determined positions on said prism in order to define determined angles of excitation of the ultrasonic waves.

An apparatus and method of positioning a probe of an atomic force microscope (AFM) includes using a dual probe configuration in which two probes are fabricated with a single base, yet operate independently. Feedback control is based on interaction between the reference probe and surface, giving an indication of the location of the surface, with this control being modified based on the difference in tip heights of the two probes to allow the sensing probe to be positioned relative to the sample at a range less than 10 nm.

An apparatus and method of positioning a probe of an atomic force microscope (AFM) includes using a dual probe configuration in which two probes are fabricated with a single base, yet operate independently. Feedback control is based on interaction between the reference probe and surface, giving an indication of the location of the surface, with this control being modified based on the difference in tip heights of the two probes to allow the sensing probe to be positioned relative to the sample at a range less than 10 nm.

The invention relates to an arrangement and to a method for the synchronous determination of the shear modulus and of the Poisson's number on samples of elastically isotropic and anisotropic materials. In the arrangement, an indenter is movable in parallel with its longitudinal axis (A) in the direction of the surface of a sample such that a force action is exerted on the material by its tip. The force can be determined by a device for measuring this force and the indenter is additionally deflected in translation along at least one further axis. The longitudinal axis (A) of the indenter is aligned at an angle 90 with respect to the surface of the sample and the indenter carries out an upward movement and a downward movement. In this respect, a device is present for calculating the shear modulus G and the Poisson's number v from the contact stiffness k determined in this manner, from the acting normal force P, from the indentation modulus M.sub.S and from the shear modulus-related parameter N.sub.S of the sample while taking account of the respective angle .