Embodiments described herein relate to methods and apparatus for forming gratings having a plurality of fins with different slant angles on a substrate and forming fins with different slant angles on successive substrates using angled etch systems and/or an optical device. The methods include positioning portions of substrates retained on a platen in a path of an ion beam. The substrates have a grating material disposed thereon. The ion beam is configured to contact the grating material at an ion beam angle ϑ relative to a surface normal of the substrates and form gratings in the grating material.

Provided is an optical device manufacturing method including forming a reflection layer on a substrate, forming a dielectric layer on the reflection layer, and inserting a phase change material layer into the dielectric layer, wherein the inserting of the phase change material layer includes adjusting a position of the phase change material layer to be inserted into the dielectric layer according to a wavelength of incident light incident to the dielectric layer.

Methods and apparatuses related to fiducial designs for fiducial markers on glass substrates, or other transparent or translucent substrates, are disclosed. Example fiducial designs can facilitate visual recognition by enhancing edge detection in visual perception. In example fiducial designs, optical features on glass substrates can re-direct light so as to present a bright image region. Such optical features can include surface relief patterns formed in a coating on the surface of glass substrates. An exemplary method for manufacturing the fiducial markers can involve transfers of a fiducial design across a master mold or plate, a submaster mold or plate, and a target glass substrate. A fiducial marker can facilitate the use of the substrate in a variety of applications, including machine vision systems that facilitate automated performance of manufacturing processes on input working material.

There is provided a diffractive optical element including a substrate, and an array of optical nanoantennas arranged on the substrate, the array of optical nanoantennas being spaced apart periodically in a lateral direction for supporting a plurality of diffraction orders at a predetermined wavelength. In particular, each optical nanoantenna in the array of optical nanoantennas is configured to control distribution of electromagnetic energy from an incident light having the predetermined wavelength amongst the plurality of diffraction orders so as to promote scattering of the electromagnetic energy in at least a first direction and suppress scattering of the electromagnetic energy in at least a second direction, the first direction and the second direction corresponding to a first diffraction order and a second diffraction order of the plurality of diffraction orders, respectively. There also provided a corresponding method of forming the diffractive optical element and a flat optical element, such as a flat lens.

An apparatus including a first substrate including a first incoupling diffractive optical element configured to couple light into the first substrate, and a first outcoupling diffractive optical element configured to output, from the first substrate, light that has been coupled into the first substrate; and a second substrate including a second incoupling diffractive optical element configured to couple light into the second substrate, and a second outcoupling diffractive optical element configured to output, from the second substrate, light that has been coupled into the second substrate; wherein the first and second incoupling diffractive optical elements are substantially inverse of each other and the first and second outcoupling diffractive optical elements are substantially inverse of each other.

The disclosure provides a method that includes filling a cavity in a substrate with a second material, wherein the substrate includes a first material. The method also includes using galvanic and/or chemical deposition of a third material to apply an overcoating to a first surface of the substrate in a region of the cavity. The method further includes removing the second material from the cavity. In addition, the method includes, before or after removing the second material from the cavity, applying a reflective layer to the overcoating. The disclosure also provides related optical articles and systems.

The invention relates to a diffractive optical element with a spatial variation in the refractive index, wherein a sequence of adjacent sections, which form a diffractive structure, is formed by the spatial variation in the refractive index, within which sections the refractive index varies in each case. Over a spectral range extending over at least 300 nm, the diffractive structure has a diffraction efficiency of at least 0.95, averaged over the entire spectral range. The value of the diffraction efficiency of at least 0.95, averaged over the entire spectral range, is realized by a single single-layer diffractive structure with an optimized combination of at least two refractive indices and at least two Abbe numbers within each section of the sequence of adjacent sections. The refractive index variation can be achieved by means of doping, material mixing, or structuring into sub-wavelength ranges.

Embodiments described herein relate to methods and apparatus for forming gratings having a plurality of fins with different slant angles on a substrate and forming fins with different slant angles on successive substrates using angled etch systems and/or an optical device. The methods include positioning portions of substrates retained on a platen in a path of an ion beam. The substrates have a grating material disposed thereon. The ion beam is configured to contact the grating material at an ion beam angle ϑ relative to a surface normal of the substrates and form gratings in the grating material.

Antireflection coatings for metasurfaces are described herein. In some embodiments, the metasurface may include a substrate, a plurality of nanostructures thereon, and an antireflection coating disposed over the nanostructures. The antireflection coating may be a transparent polymer, for example a photoresist layer, and may have a refractive index lower than the refractive index of the nanostructures and higher than the refractive index of the overlying medium (e.g., air). Advantageously, the antireflection coatings may reduce or eliminate ghost images in an augmented reality display in which the metasurface is incorporated.

The present disclosure provides an article including a layer having a nanostructured first surface including nanofeatures and an opposing second surface, and an inorganic layer including a major surface bonded to a portion of the nanostructured first surface. The nanostructured first surface includes protruding features that are formed of a single composition and/or recessed features. The article includes at least one enclosed void defined in part by the nanostructured first surface. The present disclosure also provides a method of making the article including treating a major surface of an inorganic layer with a coupling agent, contacting a nanostructured surface of a layer with the treated inorganic layer, and securing the two layers together via a bonded coupling agent by bonding at least one of the nanostructured surface or the treated inorganic layer. In addition, the present disclosure provides an optical element including the article. The nanostructured surface of the article is protected from damage and contamination by the inorganic layer.