A reaction control and mass spectrometry workstation for coupling an X-ray spectroscopic characterization instrument with an in-situ reaction cell, including a reactant gas composition control module and an online gas composition analyzing module. The workstation further involves a modification based on the original vacuum pipeline section. After the modification, the original vacuum pipeline section is connected to three customized gas ports, and the modification is characterized in that the vacuum manifold unit is additionally provided with a mass spectrometer sampling port, a sampling capillary, and control valves. The present disclosure has the following advantages. The sampling time delay can be ignored in the mass spectrometry, and the sampling is continuous real-time in-situ analysis with high time resolution. Under the working conditions of the X-ray spectroscopic characterization instrument, the electronic structure/crystal structure information and the precise information of the ambient gas composition are obtained simultaneously.

A chemical state analysis apparatus 10 includes: an excitation source 11 configured to irradiate an irradiation region A of a predetermined surface in a sample S containing a battery material with an excitation rays for generating characteristic X-rays of the battery material; an analyzing crystal 13 of a flat plate arranged so as to face the irradiation region A; a slit 12 arranged between the irradiation region A and the analyzing crystal 13, the slit being arranged in parallel to the irradiation region A and a predetermined crystal plane of the analyzing crystal 13; an X-ray linear sensor 15 in which linear detecting elements 151 each having a length in a direction parallel to the slit 12 are arranged in a direction perpendicular to the slit; a wavelength spectrum generation unit 161 configured to generate a wavelength spectrum based on intensity of the characteristic X-rays detected by the X-ray linear sensor 15; a peak wavelength determination unit 162 configured to determine a peak wavelength which is a wavelength in a peak of the wavelength spectrum; and a chemical state specification unit 163 configured to specify a value for specifying a chemical state of the battery material in the sample S from the peak wavelength determined by the peak wavelength determination unit 162 and a standard curve representing a relation between a value representing the chemical state and the peak wavelength.

A spectroscopic element and a detector are disposed along a circumference of one Rowland circle. The spectroscopic element has a spectral surface whose length, measured along the Rowland circle, is shorter than a length in the Rowland circle plane, of an irradiation surface irradiated with excitation beams emitted to a sample holder. The spectroscopic element and the sample holder are disposed to separate a group of characteristic X-rays within a common spectral range of the spectroscopic element.

A sequential X-ray fluorescence spectrometer according to the present invention includes a total analysis time display unit configured to measure, for each kind of analytical sample, a standard sample which contains a component at a known content as a standard value to determine a measured intensity of each measurement line corresponding to the component. The total analysis time display unit is further configured to calculate, for each component, a counting time which gives a specified analytical precision by using the standard value and the measured intensity and to calculate a total counting time as a sum of the counting times of respective components. The total analysis time display unit is configured to calculate a total analysis time as a sum of the total counting time and a total non-counting time and to output the calculated total analysis time and the calculated counting times of the respective components.

The present invention provides an X-ray analysis device and a peak search method capable of realizing highly accurate peak searches without significantly increasing a processing time. Peak search processing includes: a step (S220) for acquiring a profile of a spectrum; a step (S240) for narrowing down a wavelength range where a true value of a peak wavelength (peak intensity) may be present, taking into account statistical fluctuation of a measured value; a step (S250) for measuring the intensity of the X-rays at the long wavelength end, the short wavelength end, and the intermediate wavelength in the narrowed wavelength range; a step (S255) for calculating a quadratic function passing through the respective measured values in the above-described three wavelengths; and a step (S260) for calculating the wavelength of the vertex of the calculated quadratic function as the peak wavelength.

A two-dimensional X-ray diffractometer uses an X-ray source that emits a divergent beam toward a sample under test. The divergent beam has a substantially fixed width in a first direction perpendicular to its propagation direction, and a thickness in a second direction perpendicular to the propagation direction that increases proportionally to a distance from the source. An aperture may be used to block a portion of the beam in the second direction, and the sample is positioned so that the beam illuminates a two-dimensional area of the sample surface. The detector detects an X-ray signal diffracted from the sample across a two-dimensional detection area, and may use a one-dimensional detector array that collects diffracted X-ray signal at a number of different positions. The source, detector and sample may be mounted to a goniometer to maintain them in a desired relative orientation.

A X-ray fluorescence spectrometer of the present invention simultaneously generates an analytical pulse-height width profile and a narrow pulse-height width profile that are distributions of intensities of secondary X-rays (7) against scan angles (2θ) set by an interlocking unit (10) on the basis of a differential curve which is output by a multichannel pulse-height analyzer (13), as well as a predetermined analytical pulse-height width for an analytical line that is a primary reflection line and a predetermined narrow pulse-height width that is narrower than the analytical pulse-height width. Identification of the analytical lines is performed for the analytical pulse-height width profile and the narrow pulse-height width profile, and any analytical line identified only in the narrow pulse-height width profile is added to the analytical lines identified in the analytical pulse-height width profile to obtain an identification result of the analytical lines.

An X-ray spectrometer includes: an excitation source that irradiates a predetermined irradiation region on a surface of a sample with an excitation ray generating a characteristic X-ray; a flat plate analyzing crystal facing the irradiation region; a slit provided between the irradiation region and the analyzing crystal, the slit being parallel to a predetermined crystal plane of the analyzing crystal; a linear sensor including linear detection elements having a length in a direction parallel to the slit are arranged in a direction perpendicular to the slit; and an energy calibration unit that measures two characteristic X-rays in which energy is known by irradiating a surface of a standard sample generating the two characteristic X-rays with the excitation ray from the excitation source, and calibrates the energy of the characteristic X-ray detected by each detection element of the X-ray linear sensor based on the measured energies of the two characteristic X-rays.

An X-ray spectrometer is provided with: an excitation source configured to irradiate excitation rays onto an irradiation area of a sample, a diffraction member provided to face the irradiation area; a slit member provided between the irradiation area and the diffraction member, the slit member having a slit extending parallel to the irradiation area and a prescribed surface of the diffraction member; an X-ray linear sensor having a light-incident surface in which a plurality of detection elements are arranged in a direction perpendicular to a longitudinal direction of the slit; a first moving mechanism configured to change an angle between the sample surface and the prescribed surface, and/or a distance between the sample surface and the prescribed surface by moving the diffraction member within a plane perpendicular to the longitudinal direction; and a second moving mechanism configured to position the X-ray linear sensor on a path of characteristic X-rays passed through the slit and diffracted by the prescribed surface by moving the X-ray linear sensor within a plane perpendicular to the longitudinal direction.

A X-ray fluorescence spectrometer of the present invention simultaneously generates an analytical pulse-height width profile and a narrow pulse-height width profile that are distributions of intensities of secondary X-rays (7) against scan angles (2θ) set by an interlocking unit (10) on the basis of a differential curve which is output by a multichannel pulse-height analyzer (13), as well as a predetermined analytical pulse-height width for an analytical line that is a primary reflection line and a predetermined narrow pulse-height width that is narrower than the analytical pulse-height width. Identification of the analytical lines is performed for the analytical pulse-height width profile and the narrow pulse-height width profile, and any analytical line identified only in the narrow pulse-height width profile is added to the analytical lines identified in the analytical pulse-height width profile to obtain an identification result of the analytical lines.