A magnetometer has a resonating structure which is naturally resonant in at least first and second resonant modes, a resonant frequency of the second mode being at least an order of magnitude greater than a resonant frequency of the first mode, the resonating structure having two sense electrodes disposed on opposing major surfaces of the resonating structure and having a conductive path formed as a loop, the loop being disposed near or at edges of the resonating structure and the two sense electrodes being formed inwardly of the edges of the resonating structure and also inwardly of said loop. First and second oscillators are provided, the first oscillator being coupled to the loop for applying an oscillating current to the loop, the oscillating current having a frequency essentially equal to the resonant frequency of the first mode of the resonating structure, the second oscillator being coupled to said sense electrodes, the second oscillator oscillating with a fundamental frequency corresponding to the resonant frequency of the second mode of the resonating structure, the second oscillator also producing sidebands indicative of the magnetometer sensing an external magnetic field.

A Hall sensor may include a Hall sensing element configured to produce a Hall voltage indicative of a magnetic field when traversed by an electric current, and a first pair of bias electrodes mutually opposed in a first direction across the Hall sensing element. The Hall sensor may include a second pair of bias electrodes mutually opposed in a second direction across the Hall sensing element. The Hall sensor may include a first pair of sensing electrodes mutually opposed in a third direction across the Hall sensing element, and a second pair of sensing electrodes mutually opposed in a fourth direction across the Hall sensing element. The fourth direction may be orthogonal to the third direction, each sensing electrode being between a bias electrode of the first pair and a bias electrode of the second pair.

A sensor die may include a set of sensing elements and a test structure associated with determining a magnetic sensitivity of the set of sensing elements. The test structure includes a first test sensing element sensitive in a direction in a plane defined by a surface of the sensor die, a second test sensing element sensitive in the direction in the plane defined by the surface of the sensor die, and a wire on chip (WoC) associated with applying a magnetic field to the first test sensing element and the second test sensing element. The first test sensing element, the second test sensing element, and the WoC may be arranged such that, when current flows through the WoC, the first test sensing element senses a component of the magnetic field in the direction, and the second test sensing element senses a component of the magnetic field in a perpendicular direction.

A magnetic field sensor includes a die and a current generator in the die. The current generator generates a driving current. A Lorentz force transducer is also formed in the die and coupled to the current generator to obtain measurements of a magnetic field based upon the Lorentz force. The magnetic field has a resonance frequency and the current generator drives the Lorentz force sensor with the driving current having a non-zero frequency different from the resonance frequency.

A magnetic-field sensor, including: a die, a current generator in the die. The current generator generating a driving current. A Lorentz force transducer also in the die and being configured to obtain measurements of magnetic field based upon the Lorentz force is coupled to the current generator. The transducer having a resonance frequency. The current generator is such that the driving current has a non-zero frequency different from the resonance frequency.

A two-axes MEMS magnetometer includes, in one plane, a freestanding rectangular frame having inner walls and four torsion springs, wherein opposing inner walls of the frame are contacted by one end of only two torsion springs, each torsion spring being anchored by its other end, towards the center of the frame, to a substrate. In operation, the magnetometer measures the magnetic field in two orthogonal sensing modes using differential capacitance measurements.

A magnetic field sensor comprises a substrate and a moving part which is displaced when subjected to a Laplace force. There is a gauge for measuring the displacement of the moving part. There is a suspended lever that is rotationally displaced about an axis of rotation at right angles to the direction of displacement of the moving part. The lever is connected to the moving part to transmit displacement of the moving part to the lever to cause rotation of the lever about the axis of rotation. The lever is also connected to a first part of the gauge. The sensor comprises a hinge that connects the lever to the substrate. The hinge allows the rotation of the lever about its axis of rotation and is rigid to allow for a lever arm effect. The second part of the gauge is fixed with no degree of freedom to the substrate.

A Hall sensor may include a Hall sensing element configured to produce a Hall voltage indicative of a magnetic field when traversed by an electric current, and a first pair of bias electrodes mutually opposed in a first direction across the Hall sensing element. The Hall sensor may include a second pair of bias electrodes mutually opposed in a second direction across the Hall sensing element. The Hall sensor may include a first pair of sensing electrodes mutually opposed in a third direction across the Hall sensing element, and a second pair of sensing electrodes mutually opposed in a fourth direction across the Hall sensing element. The fourth direction may be orthogonal to the third direction, each sensing electrode being between a bias electrode of the first pair and a bias electrode of the second pair.

Various exemplary embodiments relate to a magnetometer device to measure oscillation frequency, including a feedthrough loop including an amplifier and a voltage bias connected to a first input of a metallic membrane; a membrane ground connected to a membrane output; a fixed plate including a first fixed plate output connected to a second input of the amplifier, wherein the fixed plate is physically separated from the metallic membrane but connected to the metallic membrane by a Lorentz force, and where the physical separation differs due to an angle of a magnetic field relative to a direction of a current; a second fixed plate output sensitive to the Lorentz force; and a circuit connected to the second fixed plate output to calculate an angle of the magnetic force based upon the Lorentz force.

A sensor system includes a first group of sensor elements sensitive to a magnetic field in a predetermined direction, wherein the first group of sensor elements supplies a first signal indicative of the magnetic field in the predetermined direction. Further, the sensor system includes a second group of sensor elements sensitive to the magnetic field in the predetermined direction, wherein the second group of sensor elements supplies a second signal having a relative phase shift relative to the first signal. A combination of the first signal and the second signal indicates a rotational angle of an object.