A stop is configured to be arranged in a constriction of an EUV illumination light beam between an EUV light source for EUV illumination light and an EUV illumination optical unit. The stop has a beam entrance section, a beam exit section and an intervening beam tube section. The entrance section has a cross section that decreases in the propagation direction of the EUV illumination light beam. The cross section of the exit section increases in the propagation direction. The cross section of the tube section is constant. An inner wall of the beam tube section is embodied as reflective for the EUV illumination light. The result is a stop that can have a defined predetermination of the illumination light beam in conjunction with a good thermal loading capacity of the stop.

The present application relates to a linear light source using ultraviolet light emitting diodes (LEDs), and a photopolymer 3D printer comprising the linear light source. The linear light source may include a substrate distanced from a polymer case of the photopolymer 3D printer and an ultraviolet LED array in which a plurality of ultraviolet LEDs, which project ultraviolet rays toward the polymer case, are arranged on the substrate in multiple rows in the X-axis direction. The arrangement of the multiple columns in the Y-axis direction is at an oblique angle to the multiple rows.

The present disclosure discloses a real-time micro/nano optical field generation and manipulation system and method. The system comprises a light source, a spatial filtering unit, an optical 4F system and a light wave manipulation unit, and the optical 4F system comprises a first lens (set) and a second lens (set) sequentially arranged along a light path. The present disclosure achieves real-time modulation on an incident wavefront through a phase element or a phase element assemble. By dynamically manipulating an incident light sub-wavefront, or the light wave modulation optical element, or different areas of the optical element, or different parts of the optical field in an imaging plane and/or the like by the spatial filtering unit, real time light fields with different parameters are generated in the image plane of the system. By spatial filtering/spatial time division filtering/spatio-temporal multiplexing filtering and/or the change of the phase elements, flexible manipulation on patterns, pattern distribution areas and structural parameters such as the patterns' frequency, their orientations, duty ratios, phases or phase shifts and the like are realized. The system can be flexibly integrated into various lithography or microscopy systems for real-time micro/nano structure fabrication and dynamical or 3D detection with a real time manipulated structural illumination.

A LiDAR device is an optical device, including a light-emitting unit, a scanning unit, a light-receiving unit, and an optical unit. The light-emitting unit includes a plurality of laser oscillation elements respectively emitting a beam in an arrangement along a light source array direction at intervals from each other. The scanning unit projects the beam to a measurement area by scanning of the beam that is emitted from the light-emitting unit. The light-receiving unit receives a reflected beam from the measurement area. The optical unit is positioned on an optical path of the beam directed from the light-emitting unit to the scanning unit. The optical unit includes a collimator lens having a positive power in a transmission direction of the beam, and a beam shaping lens positioned behind the collimator lens and having a positive power in the transmission direction on a sub-scanning plane.

A texture image acquiring device, a display device and a collimator are disclosed. The texture image acquiring device includes a collimator and an image sensor. The collimator includes a lens array and diaphragm component. The diaphragm component includes a first diaphragm layer and a second diaphragm layer. The lens array is configured to allow light rays to be converged and incident on the diaphragm component. The diaphragm component is configured to allow light rays to pass through, and to restrict an angle of light rays capable of passing through the diaphragm component. The image sensor is configured to sense light rays incident on the image sensor for acquiring a texture image.

An optical assembly includes a light source for providing a beam of light, a lens system configured to expand and collimate the beam of light, and a configurable beam injector, wherein the beam injector contains a first grid plate and a second grid plate to block individual beams of light. The first grid plate and the second grid plate may be configured such that each grid plate respectively corresponds to particular MEMS mirrors. The grid plates can be configured to have pathways that allow for beams of light to be passed through and other pathways which are blocked to prevent the passage of light. The first grid plate and second grid plate may thus block or allow for transmission of beams of lights to those particular MEMS mirrors. The second grid plate can be configured to be easily swappable during or removable to allow for a different set of beams of light, corresponding to a different set of MEMS mirrors, to be blocked. The second grid plate can be configured to be rotated or slid linearly within a housing.

A light blocking sheet having a central axis includes a central hole and a plurality of inner extended portions. The central axis passes through the central hole, which is enclosed by a hole inner surface. The hole inner surface has a first corresponding circle and a second corresponding circle, wherein a diameter of the first corresponding circle is greater than a diameter of the second corresponding circle. The inner extended portions are adjacent to and surround the central hole, wherein each of the inner extended portions is extended and tapered from the first corresponding circle towards the second corresponding circle and includes an inner surface, and the inner surface includes a line pair. The line pair includes two line sections, wherein one end of one line section thereof and one end of the other line section thereof are towards the second corresponding circle and approach to each other.

A system and method for performing Optical Coherence Tomography on a sample utilizes collimated, phase modulated beams of light in an interferometer. At least one of the beams of light utilized exists as an Airy beam for at least a portion of the procedure, obviating any deleterious impact caused by the Gaussian beam diffraction. The system may incorporate a light source, polarization beam splitter, delay line, non-polarization beam splitters, lenses, phase masks, waveplates, and mirrors, any or all of which may be controlled by a computing element.

A Koehler integrator device (10) comprises a collimating lens (11) being arranged for collimating a light field created by an incoherent or partially coherent light source, a pair of planar first and second micro-lens arrays (12, 13) being arranged for relaying portions of the collimated light field along separate imaging channels, wherein all micro-lenses of the first and second micro-lens arrays (12, 13) have an equal micro-lens focal length and pitch and the micro-lens arrays (12, 13) are arranged with a mutual distance equal to the micro-lens focal length, and a collecting Fourier lens (4) having a Fourier lens diameter and a Fourier lens focal length defining a Fourier lens front focal plane and a Fourier lens back focal plane, wherein the Fourier lens (14) is arranged for superimposing light from all imaging channels in the Fourier lens front focal plane and wherein the second micro-lens array (13) is arranged in the Fourier lens back focal plane, wherein a third micro-lens array (15) is arranged in the Fourier lens front focal plane for creating a wavelength independent array of illumination spots. Furthermore, a confocal microscope apparatus, which comprises the Koehler integrator device, and a method of using the confocal microscope apparatus are described.

A device includes a laser light source configured to generate a raw laser beam, and an optical arrangement configured to shape the raw laser beam into an illumination beam. The optical arrangement includes a beam transformer with an exit aperture, a first group of optical elements and a second group of optical elements for beam shaping. The beam transformer is configured to expand the raw laser beam in the direction of a long axis. The first group of optical elements comprises a homogenizer configured to homogenize the expanded raw laser beam. The second group of optical elements comprises at least one lens configured to image the exit aperture of the beam transformer. The first group of optical elements generates an intermediate image. The device further includes an imaging optical unit configured to image the intermediate image into the work plane.