Patent classifications
G02F1/354
SOLID-STATE LASER SYSTEM, PHASE MATCHING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
A solid-state laser system according to an aspect of the present disclosure includes a first non-linear crystal that generates first wavelength-converted light based on a first laser beam, a first adjustment unit configured to perform phase matching of the first wavelength-converted light in the first non-linear crystal, a second non-linear crystal that generates second wavelength-converted light based on a second laser beam and the first wavelength-converted light, a second adjustment unit configured to perform phase matching of the second wavelength-converted light in the second non-linear crystal, a light detection unit configured to detect light having a selected wavelength, and a processor configured to control the first adjustment unit based on intensity of at least one of the first wavelength-converted light and the first laser beam and to control the second adjustment unit based on intensity of at least one of the second wavelength-converted light and the first wavelength-converted light.
SOLID-STATE LASER SYSTEM AND LASER APPARATUS USED FOR EXPOSURE APPARATUS
A solid-state laser system may include a first solid-state laser unit, a second solid-state laser unit, a wavelength conversion system, a wavelength detector, and a wavelength controller. The wavelength conversion system may receive a first pulsed laser light beam with a first wavelength and a second pulsed laser light beam with a second wavelength, and output a third pulsed laser light beam with a third wavelength converted from the first and second wavelengths. The wavelength controller may control the first solid-state laser unit to vary the first wavelength on a condition that an absolute value of a difference between a value of a target wavelength and a value of the third wavelength detected by the wavelength detector is equal to or less than a predetermined value, and control the second solid-state laser unit to vary the second wavelength on a condition that the absolute value exceeds the predetermined value.
Harmonic light-generating metasurface
A harmonic light-generating metasurface includes a base substrate and a plurality of structures, that include nonlinear material, that are disposed in a pattern on a surface of the base substrate. Each structure of the plurality of structures individually supports a magnetic dipole mode. An electromagnetic field enhancement of the magnetic dipole mode induces generation of a harmonic signal by the plurality of structures. Alternatively, a harmonic light-generating metasurface, includes a base substrate, a supporting substrate that includes a nonlinear material, and a plurality of paired structures disposed in a pattern on a surface of the supporting substrate. Each paired structure, of the plurality of paired structures, collectively supports a toroidal dipole mode. An electromagnetic field enhancement of the toroidal dipole mode penetrates the supporting substrate to induce generation of a harmonic signal by the supporting substrate.
OPTICAL RESPONSE MEASURING DEVICE AND OPTICAL RESPONSE MEASURING METHOD
An optical response measuring device is provided with a light source, first and second wavelength conversion elements, and a light intensity sensor array. The light source generates a pair of light beams including light beams of first and second wavelengths. The first wavelength conversion element generates measurement light of a wavelength whose phase is maintained with relative to the pair of light beams incident thereon. The measurement light is irradiated to an object for measurement. The detected light is then made incident on the second wavelength conversion element. Reference light carries the phase of the pair of light beams and light for which the phase is to be determined in the detection light, from which the second wavelength conversion element generates modulated reference light. The modulated reference light is modulated to have first and second local intensities, which are then measured by the light intensity sensor array.
HIGHLY EFFICIENT, SINGLE-PASS, HARMONIC GENERATOR WITH ROUND OUTPUT BEAM
An extra cavity harmonic generator system may produce a round, non-astigmatic third harmonic output beam from a nominally round, non-astigmatic, diffraction limited input fundamental beam. The system may include a second harmonic generation crystal. An input fundamental beam size is expanded in a non-walkoff direction for the SHG crystal at the SHG crystal input face. A higher harmonic generation crystal has an output face oriented at an oblique angle of incidence in a non-walkoff direction for the HHG crystal such that an output higher harmonic beam size is contracted in this direction. Expansion of the input fundamental beam at the SHG crystal input face exceeds reduction of third harmonic beam at the HHG crystal output face.
LIGHT DETECTION AND RANGING (LIDAR) SYSTEM USING A WAVELENGTH CONVERTER
Embodiments of the disclosure provide an apparatus for emitting laser light and a system and method for detecting laser light returned from an object. The system includes a transmitter and a receiver. The transmitter includes one or more laser sources, at least one of the laser sources configured to provide a respective native laser beam having a wavelength above 1,100 nm. The transmitter also includes a wavelength converter configured to receive the native laser beams provided by the laser sources and convert the native laser beams into a converted laser beam having a wavelength below 1,100 nm. The transmitter further includes a scanner configured to emit the converted laser beam to the object in a first direction. The receiver is configured to detect a returned laser beam having a wavelength below 1,100 nm and returned from the object in a second direction.
SOLID-STATE LASER SYSTEM
A solid-state laser system may include first and second solid-state laser units, a wavelength conversion system, an optical shutter, and a controller. The first solid-state laser unit and the second solid-state laser unit may output first pulsed laser light with a first wavelength and second pulsed laser light with a second wavelength, respectively. The controller may perform first control and second control. The first control may cause the first and second pulsed laser light to enter the wavelength conversion system at a substantially coincidental timing, thereby causing the wavelength conversion system to output third pulsed laser light with a third wavelength converted from the first wavelength and the second wavelength, and the second control may prevent the first and second pulsed laser light from entering the wavelength conversion system at the coincidental timing, thereby preventing the wavelength conversion system from outputting the third pulsed laser light.
Microwave to Optical Conversion Device and Method for Converting a Microwave Photon to an Optical Photon
A microwave to optical conversion device comprising: a superconducting microwave resonator, and an optical resonator including an electro-optical material, the superconducting microwave resonator and the optical resonator being arranged one with respect to the other so as to be electro-magnetically coupled.
MULTI-MODE CAVITIES FOR HIGH-EFFICIENCY NONLINEAR WAVELENGTH CONVERSION FORMED WITH OVERLAP OPTIMIZATION
A dual frequency optical resonator configured for optical coupling to light having a first frequency ω1. The dual frequency optical resonator includes a plurality of alternating layer pairs stacked in a post configuration, each layer pair having a first layer formed of a first material and a second layer formed of a second material, the first material and second materials being different materials. The first layer has a first thickness and the second layer has a second thickness, the thicknesses of the first and second layer being selected to create optical resonances at the first frequency ω1 and a second frequency ω2 which is a harmonic of ω1 and the thicknesses of the first and second layer also being selected to enhance nonlinear coupling between the first frequency ω1 and a second frequency ω2.
183NM laser and inspection system
A laser assembly for generating laser output light at an output wavelength of approximately 183 nm includes a fundamental laser, an optical parametric system (OPS), a fifth harmonic generator, and a frequency mixing module. The fundamental laser generates fundamental light at a fundamental frequency. The OPS generates a down-converted signal at a down-converted frequency. The fifth harmonic generator generates a fifth harmonic of the fundamental light. The frequency mixing module mixes the down-converted signal and the fifth harmonic to produce the laser output light at a frequency equal to a sum of the fifth harmonic frequency and the down-converted frequency. The OPS generates the down-converted signal by generating a down-converted seed signal at the down-converted frequency, and then mixing the down-converted seed signal with a portion of the fundamental light. At least one of the frequency mixing, frequency conversion or harmonic generation utilizes an annealed, deuterium-treated or hydrogen-treated CLBO crystal.