Methods and apparatus to determine a position of a rotatable shaft of a motor are disclosed. An example apparatus to determine a position of a rotatable shaft of a motor includes a sensor printed circuit board (PCB) structured to be mounted to a motor, the sensor PCB including a plurality of capacitive sensors, the plurality of capacitive sensors having respective ones of a plurality of capacitances that independently change as a conductor moves relative to the sensor PCB in conjunction with a rotatable shaft of the motor during an operation of the motor, and a controller electrically coupled to the sensor PCB, the controller configured to determine a position of the rotatable shaft based on the plurality of capacitances.

A method for measuring a capacitance value of a capacitive sensor uses an integration process involving charge quantities being transferred in successive integration cycles from the capacitive sensor to an integration capacitor. The method includes performing the integration process until the number of integration cycles carried out has reached a number N of integration cycles to be carried out, wherein a starting value N.sub.Start is set to N and an end value N.sub.End is determined. An A/D converter measures a voltage value U.sub.CI(N) at the integration capacitor and the voltage value is added to a voltage sum value U.sub.Total. The number N is increased by a value n, where n is at least one and is less than N.sub.Diff=N.sub.End−N.sub.Start. The steps are repeated until the number N exceeds the end value N.sub.End. The ending voltage sum value is indicative of the capacitance value of the capacitive sensor.

A capacitive angular position sensor, including a stationary disk and a rotary disk, the disks disposed parallel to each other and each having, on one of its faces, a patterned conductive layer, wherein the conductive layer on the stationary disk includes—a plurality of first electrodes, each capacitively coupled to at least a portion of the conductive layer on the rotary disk, the capacitive coupling being variable with the angular position,

a second electrode, formed as a ring and capacitively coupled with at least a portion of the conductive layer on the rotary disk and

a third electrode, formed as a ring and disposed so as to have capacitive coupling with the conductive layer on the rotary disk, the capacitive coupling being significantly lower than the capacitive coupling between the second electrode and the conductive layer on the rotary disk.

A high-resolution index (HRI) detector module for use with a meter including an HRI wheel therein having a modulator thereon is provided. The HRI detector module includes a plurality of capacitive sensors positioned on a printed circuit board (PCB). The plurality of capacitive sensors is configured to detect a change in capacitance caused by the modulator of the HRI wheel when the modulator enters into an electric field generated by the plurality of capacitive sensors. Related systems are also provided.

Methods and apparatus to determine a position of a rotatable shaft of a motor are disclosed. An example apparatus to determine a position of a rotatable shaft of a motor includes a sensor printed circuit board (PCB) structured to be mounted to a motor, the sensor PCB including a plurality of capacitive sensors, the plurality of capacitive sensors having respective ones of a plurality of capacitances that independently change as a conductor moves relative to the sensor PCB in conjunction with a rotatable shaft of the motor during an operation of the motor, and a controller electrically coupled to the sensor PCB, the controller configured to determine a position of the rotatable shaft based on the plurality of capacitances.

A capacitive detection device comprising: a capacitive detector comprising a ribbon made of a dielectric material, a pair of electrodes formed on a first face of said ribbon and comprising a first electrode and a second electrode in the form of combs whose branches are arranged alternately between one another; and a third electrode in the form of a layer formed on the other face of said ribbon; and further comprising a containment electrode arranged at least partly facing and at a distance from said pair of electrodes, this containment electrode being electrically connected to said third electrode. Measurement devices including this capacitive detection device are also disclosed.

Methods and apparatus to determine a position of a rotatable shaft of a motor are disclosed. An example apparatus to determine a position of a rotatable shaft of a motor includes a sensor printed circuit board (PCB) structured to be mounted to a motor, the sensor PCB including a plurality of capacitive sensors, the plurality of capacitive sensors having respective ones of a plurality of capacitances that independently change as a conductor moves relative to the sensor PCB in conjunction with a rotatable shaft of the motor during an operation of the motor, and a controller electrically coupled to the sensor PCB, the controller configured to determine a position of the rotatable shaft based on the plurality of capacitances.

A detection device, a substrate holder and a method for detecting a position of a substrate on a substrate holder are disclosed. The detection device of the present disclosure is used to detect the position of the substrate carried on the substrate holder, and the substrate holder includes a plurality of carrying positions, each of which is used to carry a substrate. The detection device includes an emitting electrode connected to a signal source, which is disposed at an edge of each carrying position and located at one of upper and lower sides of the substrate carried by the carrying position; and at least one receiving electrode connected to a detector, which is disposed opposite to the emitting electrode and located at the other of the upper and lower sides of the substrate carried by the carrying position.

Sensor devices and methods are provided where a test signal is applied to a capacitive sensor. Furthermore, a bias voltage is applied to the capacitive sensor via a high impedance component. A path for applying the test signal excludes the high impedance component. Using this testing signal, in some implementations a capacity imbalance of the capacitive sensor may be detected.

A robot includes a body and a bumper. The body is movable relative to a surface and includes a first portion of a sensor. The bumper is mounted on the body and movable relative to the body and includes a backing and a second portion of the sensor. The backing is movable relative to the body in response to a force applied to the bumper. The second portion of the sensor is attached to the backing and movable with the backing relative to the first portion of the sensor in response to a force applied to the bumper. The sensor is configured to output an electrical signal in response to a movement of the backing. The electrical signal is proportional to an amount of displacement of the second portion relative to the first portion.