Disclosed is an apparatus for measuring a fluid flow through a pipe of a semiconductor manufacturing device, in particular a coater or a bonder. The apparatus includes a sealing structure arranged in the pipe, a flow structure having a fluid inlet arranged upstream of the sealing structure and a fluid outlet arranged downstream of the sealing structure, a first chamber arranged in the pipe upstream of the sealing structure, and a second chamber arranged in the pipe downstream of the sealing structure, and a measuring device, wherein the measuring device is adapted to measure a first fluid pressure in the first chamber and a second fluid pressure in the second chamber, wherein the measuring device is configured to determine the fluid flow based on the first and second fluid pressure.

A wellbore system includes a wellbore tubular with local inner diameter variation. The system includes a wellbore tubular that is positionable in a wellbore for producing hydrocarbon fluid. The wellbore tubular includes at least one portion of an inner wall with a greater inner diameter than other portions of the inner wall of the wellbore tubular. The system includes a fiber optic cable of a fiber optic sensing system that is positionable in the wellbore for measuring flow disturbance of production fluid at the at least one portion of the inner wall to monitor hydrocarbon production flow.

In some examples, a pressure reducing valve includes a valve body defining a defining a flow path and a restricting element within the flow path. A sensing element is configured to modify a position of the restricting element in the flow path. The sensing element defines a first area in fluid communication with the flow path and a second area fluidly isolated from the flow path. The pressure reducing valve includes control circuitry configured to determine a differential pressure over a section of the flow path, determine a position of the restricting element, and determine a flow rate based on the differential pressure and the position of the restricting element.

An electronic device manufacturing system includes: a gas supply; a mass flow controller (MFC) coupled to the gas supply; an inlet coupled to the MFC; an outlet; a control volume serially coupled to the inlet to receive a gas flow; and a flow restrictor serially coupled to the control volume and the outlet. A controller is adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. A process chamber is coupled to a flow path, which is coupled to the mass flow controller, the process chamber to receive one or more process chemistries via the mass flow controller.

A method for calibrating flow meters measuring fluid passing through a pipe wherein fluid pressures are detected and used to determine a volume or mass flow rate using an energy correlation calculation. The energy correlation calculation equates a change in potential energy for the flowing fluid with a change in kinetic energy for the flowing fluid. The energy correlation method of calculating flow rate offers lower measurement uncertainty than calculating flow by the Reynolds number versus discharge coefficient method.

A sensor apparatus may include a channel structure configured to couple with an external element and a fluid conduit, such that the channel structure may receive a fluid, at least partially drawn through the external element from an ambient environment, and direct the fluid through the fluid conduit. A sensor may generate sensor data indicating a flow rate of the fluid through the fluid conduit based on monitoring a variation in a pressure at a location in hydrodynamic contact with the fluid conduit and in relation to an ambient pressure of the ambient environment. The sensor apparatus may enable generation of improved topography information associated with flows of fluid drawn from the external element based on measuring a local pressure at the location in hydrodynamic contact with the fluid conduit and determining the ambient pressure based on monitoring the local pressure over time.

A system for operating a flow meter in a pipeline includes at least one flow conditioner or mixer installed in a pipeline; at least one volumetric flow meter installed downstream from the at least one flow conditioner or mixer for measuring velocity of a fluid in the pipeline; a pair pressure transmitters for measuring fluid pressure at a first side and a second side of the at least one flow conditioner or mixer; and a flow computer, connected to the pair of pressure transmitters and to the at least one flow meter. The flow computer includes 1) at least one database having experimental Reynolds number data for the at least one flow meter for a plurality of fluids, and 2) a processor having programmable logic for calculating viscosity of a fluid in the pipeline and operating the flow meter when the fluid in the pipeline changes.

An airflow measurement device that is configured to measure airflow in an air handling system. The airflow measurement device can include a flow conditioning plate formed with a plurality of plate apertures or holes. A flow sensor is associated with each aperture. The flow sensors can be any type(s) of flow sensors that are suitable for sensing or characterizing one or more aspects of air flowing into and through the apertures, such as pitot sensors, vane anemometers, hot wire anemometers, or the like. The flow sensors can be used to quantify the volumetric airflow rate of the airflow, the speed of the airflow, or any other variable of the airflow from which one can formulate a judgment about the operating efficiency of the air handling equipment.

A method for determining an aerosol dose rate of an aerosol stream by a sensor module includes providing the aerosol stream to a patient by an inhalation device. The sensor module and the method allow an accurate determination of the aerosol dose rate actually received by the patient from the aerosol stream when using the inhalation device, the inhaled dose per breath, and the total inhaled dose per application. The sensor module can be used with existing or new inhalation devices which benefit from the determination of the actually received aerosol dose rate while the patient can maintain using the familiar inhalation device.

Embodiments include a multiphase flowmeter system (300). The multiphase flowmeter system (300) may include a first inline flow conditioner (310) for reducing a slip velocity between a liquid phase and a gas phase of a multiphase fluid, a flowmeter for measuring a flow rate of the multiphase fluid, a second inline flow conditioner (350) for separating the liquid phase and the gas phase of the multiphase fluid, a non-radioactive sensor system for measuring one or more of a gas void fraction of the multiphase fluid and a water-cut of the multiphase fluid, and a processor (480) for computing one or more flow rates of the multiphase fluid. Embodiments further include methods of measuring one or more flow rates of a multiphase fluid and other related methods, apparatuses, devices, and systems.