A MEMS force sensor including a first substrate, a second substrate and a plurality of conductive terminals is provided. The second substrate is disposed opposite to the first substrate and includes a deformable portion and a force receiving portion. The deformable portion has a plurality of sensing elements. The force receiving portion protrudes from a surface of the deformable portion which is back facing to the first substrate, such that a cavity is formed above the deformable portion. The conductive terminals are electrically connected to the sensing elements, and the conductive terminals are centrally disposed under the cavity. The second substrate is fixed with the first substrate through the conductive terminals. A force sensing apparatus is also provided.

In one embodiment, a ruggedized wafer level microelectromechanical (“MEMS”) force sensor includes a base and a cap. The MEMS force sensor includes a flexible membrane and a sensing element. The sensing element is electrically connected to integrated complementary metal-oxide-semiconductor (“CMOS”) circuitry provided on the same substrate as the sensing element. The CMOS circuitry can be configured to amplify, digitize, calibrate, store, and/or communicate force values through electrical terminals to external circuitry.

A sensor module includes a substrate; a resistor formed of a-film containing Cr, CrN, and Cr2N, on one surface of the substrate; an electronic component mounted on the one surface of the substrate, to be electrically connected to the resistor; and a power source mounted on the one surface of the substrate or on another surface of the substrate, to be electrically connected to the electronic component, to supply power to the electronic component.

A mechanical component for a vehicle, having a measurement region with a surface, and a force sensor is associated with the measurement region for detecting a force to which the component is exposed. The force sensor includes a layer of carbon nanotubes applied to the surface of the measurement region.

By combining at least two strain sensors in a symmetric configuration, a dual use sensor may be realized. This may reduce the footprint, cost, and complexity of employing two different sensors. It may also improve the accuracy of the measurements as two different parameters i.e., strain and environmental information are measured at the same physical location. This dual use sensor may be deployed in an array over a large area or space, providing systemic information of the subject that is previously difficult to detect.

A load sensor disposed between an air suspension assembly of a vehicle and a vehicle suspension, wherein the load sensor generates a load signal which varies based on an amount of force transferred from said vehicle frame to said vehicle suspension, wherein the load signal can be received by a load calculator to allow calculation of the load exerted from said vehicle frame to the vehicle suspension.

A magnetic angle sensor system includes a first magnetic sensor configured to generate a first sensor signal, a second magnetic sensor configured to generate a second sensor signal, and at least one signal processor configured to: generate an angle signal including an angular value corresponding to an orientation of a magnetic field based on the first sensor signal and the second sensor signal; generate a vector length signal comprising a plurality of vector lengths corresponding to the first sensor signal and the second sensor signal; determine a vector length variance between at least two consecutively sampled vector lengths of the plurality of vector lengths; compare the determined vector length variance to a tolerance range defined by at least one of a minimum tolerance threshold and a maximum tolerance threshold; and generate a warning signal on a condition that the determined vector length variance is outside the tolerance range.

A deformable differential semiconductor sensor system of pressure and/or compressive displacement is provided. The pressure sensor system includes a deformable and elastic rubber substrate, first and second carbon nanotubes conductive layers, metal free phthalocyanine-carbon nanotubes composite semiconductive layers, first and second terminals on the carbon nanotubes conductive layers and a rubber cover for receiving inputs. The conductive and semiconductive layers of the sensor system are embedded in deformable substrates by using rubbing-in technology.

The invention relates to a strain-measuring structure, comprising a carrier, which is divided into regions along the predetermined breaking points only after being joined to the object to be measured. After the separation along the predetermined breaking points, the regions individually joined in the joining zones can be moved freely relative to one another in the event of strain of the object, without the strain-measuring structure applying significant forces to the object to be measured, which could distort the strain measurement. Measuring assemblies for measuring strain lie between the regions. Said measuring assemblies can be based on different principles, depending on the application. The invention further relates to a method for producing the strain-measuring structure, to a method for measuring the strain of objects, and to the use of the structure to measure strain. The invention further preferably relates to a system comprising the strain-measuring structure and a control device for reading out and preferably activating and joining the structure.

The present disclosure concerns a pressure sensor, comprising at least two adjacent electrically conductive leads disposed in a pattern on a face of a first elastomeric carrier; and an electrically resistive layer formed of a electrically resistive composite material for shunting the at least two adjacent electrically conductive leads, said electrically conducting layer disposed on a face of a second elastomeric carrier. The first and second carriers are stacked across a spacer such that the at least two adjacent electrically conductive leads faces the electrically resistive layer across a gap defined by the spacer. The gap is formed by a pocket between the carriers. The first carrier including the at least two adjacent electrically conductive leads and/or the second carrier including the electrically resistive layer are stretchable such as to upon receiving a force, exerted in a direction across the gap, reduce the gap between the electrically resistive layer and the at least two adjacent electrically conductive leads. Upon closing the gap the adjacent electrically conductive leads are shunted over a force dependent contact area and contact resistance. A gas in a gas confining structure between the carriers at least partly counteracts the exerted force.