A resolver signal processing device includes an output signal state detection unit and a disconnection detection unit. The output signal state detection unit calculates a sum of squares of a signal with a first phase and a signal with a second phase which are output signals of a two-phase output type resolver based on the output signals. The disconnection identification unit outputs information representing a disconnection state of any of a first signal system which supplies an excitation signal of the resolver and a second signal system of the output signals based on a size of a variation range in which the sum of squares periodically changes.

A rotational angle sensor includes a stator element and rotor element. The stator element has a stator transmitting coil and stator receiving coil. The rotor element is rotatably mounted about a rotation axis, relative to the stator element, and has a rotor receiving coil and rotor transmitting coil electrically connected to each other. The rotor receiving coil is inductively coupled to the stator transmitting coil such that an electromagnetic field produced by the stator transmitting coil induces a current in the rotor receiving coil that flows through the rotor transmitting coil and causes the rotor transmitting coil to produce a further electromagnetic field. The stator receiving coil is inductively coupled to the rotor transmitting coil such that the inductive coupling between the stator receiving coil and the rotor transmitting coil is configured with reference to a rotational angle between the stator element and the rotor element, and such that the further electromagnetic field induces an angle-dependent alternating voltage in the stator receiving coil. The stator transmitting coil has a first circular outer partial winding, and a first circular inner partial winding positioned within and electrically connected to the first outer partial winding such that the first inner partial winding has an opposite current flow with respect to the first outer partial winding. The rotor receiving coil has a second circular outer partial winding and a second circular inner partial winding positioned within and electrically connected to the second outer winding such that the second inner winding has an opposite current flow with respect to the second outer partial winding. The first and second outer partial windings, and the first and second inner partial windings are oriented with respect to each other, respectively.

The disclosure relates to a method for operating a movement apparatus having a first assembly and a second assembly. The first assembly includes a base and several permanent-magnet arrangements that are connected to the base via actuators such that they move as a whole relative to the base in at least one degree of freedom by the assigned actuator, the second assembly including a base and a permanent-magnet arrangement arranged firmly relative to the base. Position controllers are provided, each with a controlled variable and with a correcting variable. The controlled variable is one of six possible degrees of freedom with regard to a relative position between the first and second assembly. The correcting variable represents a force or a torque that has been assigned to the degree of freedom. Desired positions of the actuators are computed from the correcting variables and the actuators are set accordingly.

An inductive angle sensor is provided with a stator with an excitation oscillating circuit and a pickup coil arrangement and also with a rotor which is arranged rotatably with respect to the stator and comprises an inductive target arrangement. The excitation oscillating circuit can be energizable with an alternating current, in order to induce an induction current in the target arrangement, and the target arrangement can be designed to generate a magnetic field in reaction to the induction current, which magnetic field in turn generates induction signals in the pickup coil arrangement. The angle sensor further comprises a circuit that is designed to derive an induction strength signal representing the signal strength of the induction signals from the induction signals and to ascertain the spatial clearance between the rotor and the stator on the basis of the induction strength signal, and to generate a corresponding clearance signal.

An improved system for determining the identification of movers in a motion control system is disclosed, where the motion control system includes multiple movers traveling on a track. The physical construction of at least one element of one of the movers is different on one mover than on each of the other movers. The control system for the movers detects the difference in construction and identifies the unique mover as a first mover. Each of the other movers along the track are assigned an identifier based on their relative position to the first mover. According to one embodiment, a position sensing system is utilized to identify the first mover. According to another embodiment, the drive system for the movers is utilized to identify the first mover. In still another embodiment, a combination of the position sensing system and the drive system is utilized to identify the first mover.

Provided is equipment for transferring a vacuum chamber that solves a problem of heat dissipation of a driver by (i) placing a permanent magnet, which is a stator structure of a linear motor and causes linear motion, inside a vacuum chamber and (ii) by placing a coil of a driver structure outside the vacuum chamber. Under this structure, (i) no cable is installed in inside the chamber, and (ii) heat generated from the driver structure can be smoothly dissipated. The transfer equipment includes: a first-axis linear coil (24) that is fixed to an outside of the vacuum chamber at a bottom surface of the housing (11) of the vacuum chamber (10); a first-axis slider (60) that is installed inside the vacuum chamber (10) and moves in a first-axis direction relative to a bottom of an inner space of the vacuum chamber (10); and a first-axis linear permanent magnet (63). The first-axis linear permanent magnet (63) is arranged in the first-axis direction, is installed in a lower portion of the first-axis slider (60), and slidingly moves together with the first-axis slider (60).

A rotational angle sensor includes a rotary plate and a printed circuit board in which a primary coil and a secondary coil group are arranged. Loops of the primary coil and the secondary coil group are along a surface of the printed circuit board. The rotary plate includes a target portion whose outer circumferential edge portion has a sine-wave shape. The primary coil overlaps with the target portion, and has a circular-arc shape along a rotational direction of the rotary plate. The secondary coil group includes 4n (n is a natural number) secondary coils arranged in a line along the rotational direction, on an inner circumferential side of the primary coil. The number of turns of a secondary coil on an end side in a line is smaller than that of a secondary coil on an inner side in the line.

An object is to respectively excite transmission coils with different voltages using a single power supply with low power consumption in an electromagnetic induction type encoder.

A detection head of an encoder includes a voltage adjustment circuit and a plurality of excitation circuits. The excitation circuit includes a resonant circuit that includes a driving capacitor and a transmission coil connected in series and generates an alternate-current magnetic field inducing currents in scale coils disposed in a plurality of scale tracks on a scale by connecting both ends of the resonant circuit in a state in which the driving capacitor is charged. The voltage adjustment circuit includes a first transformer capacitor and controls a charging voltage of the driving capacitor in a single excitation circuit using the charged first transformer capacitor.

A system, comprising a target, a first receiving coil array, and a second receiving coil array. The target includes: (i) a first array of conductive features that are arranged in a line or arc and separated from one another by voids, and (ii) a second array of conductive features that are arranged in a line or arc and separated from one another by voids, the conductive features in the first array being staggered with respect to the conductive features in the second array.; The first receiving coil array is configured to sense a first magnetic field that is associated with the first array of conductive features. The second receiving coil array is configured to sense a second magnetic field that is associated with the second array of conductive features.

A rotational angle sensor includes a stator element, and rotor element. The stator element has a stator transmitting coil and a stator receiving coil. The rotor element is mounted rotatably about a rotation axis relative to the stator element, and has a rotor receiving coil and a rotor transmitting coil electrically connected with each other. The rotor receiving coil is inductively coupled to the stator transmitting coil such that an electromagnetic field produced by the stator transmitting coil induces a current in the rotor receiving coil that flows through the rotor transmitting coil and causes the rotor transmitting coil to produce a further electromagnetic field. The stator receiving coil is inductively coupled to the rotor transmitting coil such that the inductive coupling is configured with reference to a rotational angle between the stator element and the rotor element so that the further electromagnetic field induces at least one angle-dependent alternating voltage in the stator receiving coil. The stator receiving coil has at least two circular-ring-sector-shaped partial windings that divide the stator element into sectors. The rotor transmitting coil has a number of sickle-shaped partial windings equal to the number of circular-ring-sector-shaped partial windings, which extend sequentially around the rotation axis.