A sensor device which can be used, for example, for an operating device, for example of an electronic household appliance, in order to detect a movement and/or position of a first component relative to a second component. The first component can be moved about a or in the direction of an axis of movement along a movement path, includes a sensor electrode arrangement on the second component and a signal element on the first component opposite and at a distance to the sensor electrode arrangement. The signal element has electrically conductive sections and electrically non-conductive sections, as well as a sensor control system for inputting sensor signals and receiving measurement signals at/from the sensor electrode arrangement and an evaluation unit for determining a movement and/or position of the first component relative to the second component based on the measurement signals of the sensor control system.

A measuring device includes sensor electrodes provided along a periphery of a base substrate such that a sum A of shortest distances from the sensor electrodes to an inner peripheral surface of a focus ring becomes a constant value, the sum A satisfying $\underset{i=1}{\overset{N}{.Math.}}\frac{a}{C_i}=A$
the number of the sensor electrodes, C.sub.i: measurement values and a: constant). A method of obtaining the amount of deviation of the central position of the measuring device in a region surrounded by the focus ring from the center of the region, includes: calculating the measurement values C.sub.i using the measuring device; calculating the constant a using the measurement values C.sub.i; calculating distances from the sensor electrodes to the inner peripheral surface of the focus ring using the constant a and the measurement values C.sub.i; and calculating the amount of deviation of the central position of the measuring device based on the calculated distances.

A system is disclosed, comprising a base and at least a first moveable entity, the first moveable entity being moveable with respect to the base and positionable in at least a first position with respect to the base. The base comprises a first base electrode and a second base electrode, and the movable entity comprises a first moveable entity electrode and a second moveable entity electrode. The electrodes are arranged such that when the moveable entity is in the first position the first base electrode and the first moveable entity electrode align to form a first capacitor and the second base electrode and second moveable entity electrode align to form a second capacitor. The first moveable entity further comprises a first resistor connecting the first moveable entity electrode to the second moveable entity electrode, and the base further comprises: signal supply means arranged to supply a time-varying electrical signal to the first base electrode; and signal detection means arranged to detect an electrical signal from the second base electrode.

A displacement device for pivoting a mirror element with two degrees of freedom of pivoting includes an electrode structure including actuator electrodes. The actuator electrodes are comb electrodes. All actuator electrodes are arranged in a single plane. The actuator electrodes form a direct drive for pivoting the mirror element.

An apparatus includes a first electrode, a second electrode, and a third electrode having first and second opposing surfaces. The first opposing surface is adjacent the first electrode and separated from the first electrode by a first distance, and the second opposing surface is adjacent the second electrode and separated from the second electrode by a second distance. The third electrode is configured to move relative to the first and second electrodes. A capacitance sensing circuit is coupled to the first and second electrodes. The capacitive sensing circuit is configured to determine a capacitance using the first and second electrodes.

Disclosed are a method and apparatus for identifying a touch operation, and an electronic device, which relate to the technical field of information processing and are mainly aimed at improving the accuracy of identification of touch operations to reduce the product cost, while reducing the number of touch areas. The main technical solution of the present disclosure includes: when receiving a touch operation on a touch region, calculating a capacitance value corresponding to the touch operation, where the touch area of the touch region gradually decreases from one end to the other end; calculating an effective touch area of the touch operation in the touch region according to the capacitance value; and determining a touch control instruction corresponding to the touch operation according to the capacitance value and the effective touch area. The present invention is mainly applied to the using process of a touch wireless earphone.

A capacitive detection device comprising: a capacitive detector comprising a ribbon made of a dielectric material, a pair of electrodes formed on a first face of said ribbon and comprising a first electrode and a second electrode in the form of combs whose branches are arranged alternately between one another; and a third electrode in the form of a layer formed on the other face of said ribbon; and further comprising a containment electrode arranged at least partly facing and at a distance from said pair of electrodes, this containment electrode being electrically connected to said third electrode. Measurement devices including this capacitive detection device are also disclosed.

A system is disclosed, comprising a base and at least a first moveable entity, the first moveable entity being moveable with respect to the base and positionable in at least a first position with respect to the base. The base comprises a first base electrode and a second base electrode, and the movable entity comprises a first moveable entity electrode and a second moveable entity electrode. The electrodes are arranged such that when the moveable entity is in the first position the first base electrode and the first moveable entity electrode align to form a first capacitor and the second base electrode and second moveable entity electrode align to form a second capacitor. The first moveable entity further comprises a first resistor connecting the first moveable entity electrode to the second moveable entity electrode, and the base further comprises: signal supply means arranged to supply a time-varying electrical signal to the first base electrode; and signal detection means arranged to detect an electrical signal from the second base electrode.

A sensor unit for detecting bending of the sensor unit comprises: a capacitive upper sensor having an upper capacitance and comprising first and second deformable upper electrodes spaced apart from one another in a Z direction, the first and second upper electrodes respectively having first and second upper shapes; and a capacitive lower sensor having a lower capacitance, spaced apart from the upper sensor in a Z direction and comprising first and second deformable lower electrodes spaced apart from one another in the Z direction, the first and second lower electrodes respectively having first and second lower shapes. For a bend of the sensor unit in a first direction, the first and second upper shapes change such that the upper capacitance decreases and the lower shapes change such that the lower capacitance increases. For a bend of the sensor unit in a second direction opposed to the first direction, the first and second upper shapes change such that the upper capacitance increases and the lower shapes change such that the lower capacitance decreases.

The present disclosure relates to measuring misalignment between layers of a semiconductor device. In one embodiment, a device includes a first conductive layer; a second conductive layer; one or more first electrodes embedded in the first conductive layer; one or more second electrodes embedded in the second conductive layer; a sensing circuit connected to the one or more first electrodes; and a plurality of time-varying signal sources connected to the one or more second electrodes, wherein the one or more first electrodes and the one or more second electrodes form at least a portion of a bridge structure that exhibits an electrical property that varies as a function of misalignment of the first conductive layer and the second conductive layer in an in-plane direction.