A contactless encoder is disclosed. The encoder comprises a selector configured to select one of a plurality of states associated with the encoder. The encoder furthermore comprises an integrated circuit comprising a finite state machine configured to detect a currently selected state by the selector and generate an output signal corresponding to the detected currently selected state, wherein the currently selected state is detected based on a capacitive coupling between the selector and a portion of the encoder associated with the currently selected state.

One embodiment includes and I/O bus including a signal line coupled to a signal source and multiple line switches, each line switch to couple a corresponding I/O port to the signal line. Switch logic coupled to the I/O bus may programmatically switch the multiple line switches to couple at least one of the signal source and measurement circuitry to the respective I/O port.

An environmental sensor and manufacturing method thereof. The environmental sensor comprises: a substrate comprising at least one recess disposed at an upper portion of the substrate; and a sensitive film layer disposed above the substrate, comprising a fixed portion fixed on an end surface of the substrate and a bent portion configured to extend inside the recess. The bent portion and a side wall of the recess form a capacitor configured to detect a signal. The bent portion, fixed portion, and the recess form a closed cavity. A conventional capacitive structure configured on a substrate surface is changed to a capacitive structure of the environmental sensor vertically extending into the inside of the substrate, increasing a depth of the recess, and in turn, increasing a sensing area between two polar plates of the capacitor, significantly shrinking a coverage area of the capacitor on the substrate, and satisfying a requirement of a modern compact electronic component.

This application relates to methods and apparatus for operating MEMS sensors, in particular MEMS capacitive sensors (C.sub.MEMS) such as a microphones. An amplifier apparatus is arranged to amplify an input signal (V.sub.INP) received at a sense node from the MEMS capacitive sensor. An antiphase signal generator generates a second signal (V.sub.INN) which is in antiphase with the input signal (V.sub.INP) and an amplifier arrangement is configured to receive the input signal (V.sub.INP) at a first input and the second signal (V.sub.INN) at a second input and to output corresponding amplified first and second output signals. This converts a single ended input signal effectively into a differential input signal.

A probe (1, 101) for monitoring a moving engine element and a method of forming a probe (1, 101) for monitoring a moving engine element, the probe (1, 101) comprising: a housing (2, 102) formed of electrically insulating ceramic material; a core (14, 114) formed of electrically insulating ceramic material, the core (14, 114) comprising a front face (16, 116; and a sensing electrode (20, 120) formed of electrically conductive material, the sensing electrode (20, 120) being arranged between the housing (2, 102) and the front face (16, 116) of the core (14, 114) and the housing (2, 102) and the front face (16, 116) of the core (14, 114) being bonded together by the sensing electrode (120).

A measuring arrangement includes an electrostatic concentrator, a surface and an imaging sensor which are configured to detect particles.

A MEMS system includes a proof mass, an anchor, an amplifier, first and second sense elements and their corresponding feedback elements. The proof mass moves responsive to a stimulus. The anchor coupled to the proof mass via a spring. The amplifier receives a proof mass signal from the proof mass and amplifies the signal to generate an output signal. The first sense element is connected between the proof mass and a first input signal and the second sense element is connected between the proof mass and a second input signal. The second input signal has a polarity opposite to the first input signal. The first feedback element is connected between the proof mass and the output signal and its charges change responsive to proof mass displacement. The second feedback element is connected between the proof mass and the output signal and its charges change in response to proof mass displacement.

A direction detecting device according to an exemplary embodiment of the present invention includes; a structure having at least two through-holes passing through an upper surface and a lower surface thereof; and at least two electrode units inserted into the at least two through-holes and each including a dielectric layer, a first electrode layer disposed on an upper surface of the dielectric layer and exposed at the upper surface of the structure, and a second electrode layer disposed on a lower surface of the dielectric layer and exposed at the lower surface of the structure.

A method includes obtaining a capacitive function of ground plane displacement and gap distance, and optimizing, using the capacitive function, an optimization function to obtain multiple slice lengths. The slice lengths correspond to multiple gap distances between a first sensor electrode and a second sensor electrode. The method further includes defining a sensor electrode shape using slice lengths and gap distances, defining a sensor electrode pattern based on the sensor electrode shape, and storing the sensor electrode pattern.

A capacitive measurement device for indicating when two surfaces moving relative to each other are spaced less than a predetermined distance apart. The device comprises a probe having an elongated conductor, an insulating core, a conducting inner guard, an insulating interlayer, and a conducting sheath. A portion of the conductor, insulating core and conducting inner guard form a probe tip which extends beyond the insulating interlayer and conducting sheath by a predetermined offset. The probe is configured to extend from a first surface by a predetermined distance and to generate a signal when the tip is contacted by a second surface.