A projection exposure apparatus (1) for semiconductor lithography, has a device for determining the concentration of atomic hydrogen in a plasma (29) in the region of an optical element (25, 25.1), wherein the device includes a sensor (32, 32.1, 32.2, 32.3, 32.4), In this case, the device includes a filter element (31, 31.1,31.2, 31.3, 31.4) arranged between the region of the plasma (29) and the sensor (32, 32.1, 32.2, 32.3, 32.4), wherein the filter element (31, 31.1,31.2, 31.3, 31.4) is configured to predominantly allow the passage of atomic hydrogen from the plasma (29) to the sensor (32, 32.1, 32.2, 32.3, 32.4).

An integrated sensor for detecting gases present in an environment is provided. The integrated sensor comprises a first gas sensor and a second gas sensor. The first gas sensor is configured to measure a first gas and the second gas sensor is configured to measure a second gas. The first gas is different from the second gas. The first gas sensor is an optical sensor and defines an optical cavity. The second gas sensor is disposed within the optical cavity of the first gas sensor.

Method for determining whether a gas sample originates from biological processes or from a gas installation being tested and containing a utility gas is characterized in that an increased concentration of hydrogen in the sample as compared to that present in the utility gas is used as evidence that the sample originates from biological decay processes and not from the gas installation under test.

An off-gas analyzer for analyzing H.sub.2O vapor, CO, O.sub.2, CO.sub.2 and/or H.sub.2 in a furnace gas stream is fluidically coupled to a gas extraction probe. The analyzer includes an optical measurement cell having multiple sampling chambers, optically coupled to a laser. The analyzer measuring cell is housed within a heated cabinet having a heater operable to heat the interior thereof so as to maintain the extracted gas sample therein at a temperature about the condensation point of water. The analyzer allows for the analysis of the gas water vapour of wet off-gas samples.

The present invention provides a method of real-time detection of a hydrogen content using an oxide-based hydrogen storage element having a tunnel structure, wherein the method detects an amount of hydrogen atoms contained in the hydrogen storage element by real-time measuring resistance of the hydrogen storage element including a metal insulator transition (MIT) layer capable of reversibly storing or releasing the hydrogen atoms.

A gas sensor includes: a first conductive layer; a second conductive layer including a first region having a first thickness and a second region having a second thickness larger than the first thickness; a metal oxide layer disposed between the first conductive layer and the second conductive layer, the metal oxide layer including a bulk region and a local region surrounded by the bulk region, a degree of oxygen deficiency of the local region being higher than that of the bulk region; and an insulation layer covering the first conductive layer, the second region of the second conductive layer, and the metal oxide layer and not covering the first region of the second conductive layer.

A hydrogen sensor includes: a first electrode; a second electrode; a metal oxide layer disposed between the first electrode and the second electrode and including a bulk area and a local area; a first insulation film covering the first electrode, the second electrode, and the metal oxide layer and having an opening reaching the second electrode; and a second insulation film being in contact with the second electrode in the opening.

A hydrogen sensor for detecting hydrogen in a fluid in physical contact with the sensor comprises a sensing element, a first protection layer, provided to prevent contact of the sensing element with a sensor poisoning gas in the fluid, wherein the first protection layer comprises PMMA. Further, a hydrogen detection system, an electrical device having such a system and a method for producing a sensor are provided.

The invention relates to a capacitive sensing material and a method of manufacturing thereof, a capacitive sensing coating formulation, a capacitive chip, a capacitive sensor, a method for manufacturing a coated chip, a method for analysing the composition of a gaseous mixture, a use of particles comprising titanium oxide and platinum for sensing hydrogen, and a use of capacitive sensing material for detecting a gas leak. The capacitive sensing material comprises composite particles wherein porous titanium dioxide is at least in part coated with platinum particles.

Breath sensor apparatus and methods of use are described herein where a flow control apparatus may generally comprise a sampling chamber defining a volume and one or more openings into the sampling chamber, at least one sensor in fluid communication with the sampling chamber, wherein the at least one sensor is configured to detect the analyte. The sampling chamber may also be configured to receive the breath sample into the sampling chamber and into contact with the at least one sensor via diffusion into the sampling chamber.