Embodiments of a sensor device, method and system employ a multiplicity of environmental sensors as a single monitoring and alerting mechanism, operable to provide a profile of any contaminant in terms of various gases and particles in the atmosphere, quantified in terms of relative concentrations. In various embodiments, the sensor device can comprise hardware and firmware elements, including an electronic control system, a case, a shield and a cover. The environmental sensors can be secured as part of the electronic control system and the shield can be formed so as to facilitate proper channeling of air and sound for effective operation.

Embodiments of a sensor device, method and system employ a multiplicity of environmental sensors as a single monitoring and alerting mechanism, operable to provide a profile of any contaminant in terms of various gases and particles in the atmosphere, quantified in terms of relative concentrations. In various embodiments, the sensor device can comprise hardware and firmware elements, including an electronic control system, a case, a shield and a cover. The environmental sensors can be secured as part of the electronic control system and the shield can be formed so as to facilitate proper channeling of air and sound for effective operation.

A method for identification of a vapor sample or chemicals in a vapor sample includes introducing a vapor sample to a sensor array including a plurality of sensors, adjusting a temperature of one or more of the plurality of sensors between at least two temperature levels, and identifying the vapor sample or one or more chemicals in the vapor sample based on a plurality of response patterns of the sensor array, each of the response patterns being a collection of responses of the plurality of sensors to the vapor sample with the one or more sensors being at a different temperature level from among the at least two temperature levels.

Embodiments of a sensor device, method and system employ a multiplicity of environmental sensors as a single monitoring and alerting mechanism, operable to provide a profile of any contaminant in terms of various gases and particles in the atmosphere, quantified in terms of relative concentrations. In various embodiments, the sensor device can comprise hardware and firmware elements, including an electronic control system, a case, a shield and a cover. The environmental sensors can be secured as part of the electronic control system and the shield can be formed so as to facilitate proper channeling of air and sound for effective operation.

A level measuring and gas detection system arranged to measure a level and to detect a gas and/or an odor, with computing circuitry, arranged to generate a message when the level sensor detects a preset level limit value and/or when the gas sensor detects a preset gas concentration limit value.

The present disclosure is directed to a gas sensor device that includes a plurality of gas sensors. Each of the gas sensors includes a semiconductor metal oxide (SMO) film, a heater, and a temperature sensor. Each of the SMO films is designed to be sensitive to a different gas concentration range. As a result, the gas sensor device is able to obtain accurate readings for a wide range of gas concentration levels. In addition, the gas sensors are selectively activated and deactivated based on a current gas concentration detected by the gas sensor device. Thus, the gas sensor device is able to conserve power as gas sensors are on when appropriate instead of being continuously on.

A method is provided for processing environmental sensor data comprising the following steps. One or more raw data values are received from an environmental sensor, an average value and a measure of dispersion are determined over a defined time period only from raw data values between a lower threshold and an upper threshold, and the lower threshold and the upper threshold are redefined depending on the average value and the measure of dispersion. The method may be used in an environmental sensor, e.g. a MOX sensor or a VOC sensor, and implemented as a computer program.

A distributed security system includes a detection unit disposed at a first location. The detection unit includes a particle sensor that is configured to detect a particle count in first location. The detection unit also includes a housing enclosing a portion of the particle sensor. The security system also includes a camera disposed at a second location and having a field of vision encompassing the first location. The camera is configured to capture a video of the first location. The system also includes a server communicatively connected to the detection unit and the camera and configured to associate the particle count with the video.

An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.

The present disclosure is directed to a gas sensor device that includes a plurality of gas sensors. Each of the gas sensors includes a semiconductor metal oxide (SMO) film, a heater, and a temperature sensor. Each of the SMO films is designed to be sensitive to a different gas concentration range. As a result, the gas sensor device is able to obtain accurate readings for a wide range of gas concentration levels. In addition, the gas sensors are selectively activated and deactivated based on a current gas concentration detected by the gas sensor device. Thus, the gas sensor device is able to conserve power as gas sensors are on when appropriate instead of being continuously on.