H01S3/10

LIGHT SOURCE APPARATUS AND INSPECTION APPARATUS
20220376458 · 2022-11-24 ·

A decrease of an output of a wavelength converted light converted by a nonlinear optical crystal is suppressed. A light source apparatus according to the present disclosure includes a fundamental wave light source configured to generate a fundamental wave which is a continuous oscillation laser beam, an external cavity including a plurality of optical mirrors, a nonlinear optical crystal installed inside the external cavity and configured to generate a light with a wavelength shorter than that of the fundamental wave. The light source apparatus includes at least one phase modulator disposed between the fundamental wave light source and the external cavity and configured to modulate the fundamental wave by a modulation frequency of an integer multiple of a resonance frequency interval of the external cavity.

Tm-doped fiber amplifier utilizing wavelength conditioning for broadband performance

A multi-stage thulium-doped (Tm-doped) fiber amplifiers (TDFA) is based on the use of single-clad Tm-doped optical fiber and includes a wavelength conditioning element to compensate for the nonuniform spectral response of the initial stage(s) prior to providing power boosting in the output stage. The wavelength conditioning element, which may comprise a gain shaping filter, exhibits a wavelength-dependent response that flattens the gain profile and output power distribution of the amplified signal prior to reaching the output stage of the multi-stage TDFA. The inclusion of the wavelength conditioning element allows the operating bandwidth of the amplifier to be extended so as to encompass a large portion of the eye-safe 2 μm wavelength region.

PREDICTIVE CONTROL OF A PULSED LIGHT BEAM
20230055090 · 2023-02-23 ·

In some general aspects, a light beam control apparatus includes: a spectral feature actuator associated with a set of different states, each state configured to cause an optical apparatus to generate one or more pulses of a light beam at a discrete value of a spectral feature of the light beam; and a controller in communication with the spectral feature actuator. The controller includes: an actuator drive module configured to cause the spectral feature actuator to transition among the set of different states according to a control waveform; a waveform module configured to compute the control waveform for the spectral feature actuator that governs the transition among the set of discrete values; and a predictive module configured to receive one or more sensed aspects of the spectral feature actuator and instruct the waveform module to adjust the control waveform based on the received sensed aspects.

DUAL SPECTRAL VARIABLE-BASED OPTICAL FREQUENCY SCANNING LASER LIGHT SOURCE AND MEASUREMENT DEVICE USING THE SAME AND OBJECT ANGLE-DEPENDENT DISTANCE MEASUREMENT DEVICE USING PROPAGATION ANGLE SWITCHING FOR EACH OPTICAL FREQUENCY

A measurement device includes: an optical gain unit for generating and amplifying light; a transmission optical band variation unit for selecting a specific optical frequency band from the light generated by the optical gain unit, and varying the selected specific optical frequency band to transmit light; a resonant optical frequency variation unit for performing a frequency variation so that multiple resonant optical frequency orders within the specific optical frequency band vary over a variation range narrower than intervals between the respective orders; resonance induction units forming an optical resonance unit which includes the optical gain unit, the transmission optical band variation unit, and the resonant optical frequency variation unit and causes selective oscillation of light having a specific resonant optical frequency within a specific transmission optical band; and a control signal unit for varying each of the transmission optical band variation unit and the resonant optical frequency variation unit.

DUAL SPECTRAL VARIABLE-BASED OPTICAL FREQUENCY SCANNING LASER LIGHT SOURCE AND MEASUREMENT DEVICE USING THE SAME AND OBJECT ANGLE-DEPENDENT DISTANCE MEASUREMENT DEVICE USING PROPAGATION ANGLE SWITCHING FOR EACH OPTICAL FREQUENCY

A measurement device includes: an optical gain unit for generating and amplifying light; a transmission optical band variation unit for selecting a specific optical frequency band from the light generated by the optical gain unit, and varying the selected specific optical frequency band to transmit light; a resonant optical frequency variation unit for performing a frequency variation so that multiple resonant optical frequency orders within the specific optical frequency band vary over a variation range narrower than intervals between the respective orders; resonance induction units forming an optical resonance unit which includes the optical gain unit, the transmission optical band variation unit, and the resonant optical frequency variation unit and causes selective oscillation of light having a specific resonant optical frequency within a specific transmission optical band; and a control signal unit for varying each of the transmission optical band variation unit and the resonant optical frequency variation unit.

Laser apparatus and extreme ultraviolet light generation system
11586032 · 2023-02-21 · ·

A laser apparatus may include: a mirror configured to reflect a laser beam; an actuator configured to operate the mirror; and a controller configured to transmit a movement instruction to the actuator, wherein the controller predicts a movement completion time of the actuator, and transmits a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.

Laser apparatus and extreme ultraviolet light generation system
11586032 · 2023-02-21 · ·

A laser apparatus may include: a mirror configured to reflect a laser beam; an actuator configured to operate the mirror; and a controller configured to transmit a movement instruction to the actuator, wherein the controller predicts a movement completion time of the actuator, and transmits a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.

Methods and systems for aligning master oscillator power amplifier systems

The present disclosure provides a method for aligning a master oscillator power amplifier (MOPA) system. The method includes ramping up a pumping power input into a laser amplifier chain of the MOPA system until the pumping power input reaches an operational pumping power input level; adjusting a seed laser power output of a seed laser of the MOPA system until the seed laser power output is at a first level below an operational seed laser power output level; and performing a first optical alignment process to the MOPA system while the pumping power input is at the operational pumping power input level, the seed laser power output is at the first level, and the MOPA system reaches a steady operational thermal state.

Pump modulation for optical amplifier link communication

A system and method for communicating supervisory information between amplifier nodes in an optical communication network utilizes modulation of an included pump source to superimpose the supervisory information on through-transmitted customer signals (or ASE associated with the amplifier if no customer traffic is present). The supervisory information (which may include monitoring messages, provisioning data, protocol updates, and the like) is utilized as an input to an included modulator, which then forms a drive signal for the pump controller. In a preferred embodiment, binary FSK modulation is used.

Systems and methods for high-speed, spectroscopic, gas-phase thermometry

Systems and methods for measuring temperature in an environment by creating a first beam having an energy of about 50 mJ/pulse, and a pulse duration of about 100 ps. A second beam is also created, having an energy of about 2.3 mJ/pulse, and a pulse duration of about 58 ps. The first beam and the second beam are directed into a probe region, thereby expressing an optical output. Properties of the optical output are measured at a sampling rate of at least about 100 kHz, and temperature measurements are derived from the measured properties of the optical output. Such systems and methods can be used to measure temperature in environments exhibiting highly turbulent and transient flow dynamics.