An ultrasonic actuation apparatus includes a piezoelectric transducer producing a first ultrasonic signal; a second transducer; and a platen, the platen being directly and/or acoustically coupled to the piezoelectric transducer and the second transducer. The second transducer may be a MEMS microphone. The second transducer is configured to receive the first ultrasonic signal at a first time, and a second ultrasonic signal at second time. The second ultrasonic signal has been modified from the first ultrasonic signal in correspondence with an object being in contact with the platen.

A MEMS microphone and a method for manufacturing a MEMS microphone are disclosed. Embodiments of the invention provide a MEMS microphone including a MEMS microphone structure having at least one counter electrode structure and a diaphragm structure deflectable with respect to the counter electrode structure and a thermocouple arranged at the MEMS microphone structure.

A MEMS microphone and a method for manufacturing a MEMS microphone are disclosed. Embodiments of the invention provide a MEMS microphone including a MEMS microphone structure having at least one counter electrode structure and a diaphragm structure deflectable with respect to the counter electrode structure and a thermocouple arranged at the MEMS microphone structure.

A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first tapered cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first tapered cantilever beam element tapers in width from the base portion to the tip portion. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first tapered cantilever beam element.

A sensor device that senses proper acceleration. The sensor device includes a substrate, a spacer layer supported over a first surface of the substrate, at least a first tapered cantilever beam element having a base and a tip, the base attached to the spacer layer, and which is supported over and spaced from the substrate by the spacer layer. The at least first tapered cantilever beam element tapers in width from the base portion to the tip portion. The at least first cantilever beam element further including at least a first layer comprised of a piezoelectric material, a pair of electrically conductive layers disposed on opposing surfaces of the first layer, and a mass supported at the tip portion of the at least first tapered cantilever beam element.

An electro-acoustic transducer includes a base, a plurality of vibration portions and a connection portion. Each of the vibration portion includes a piezoelectric transduction layer and has a first connection end and a second connection end opposite to each other, and the first connection ends are connected to the base. The connection portion is separated from the base and connected to the second connection ends. The piezoelectric transduction layers are adapted to receive electrical signals to deform, such that the vibration portions are driven to vibrate and generate corresponding acoustic waves. The vibration portions are adapted to receive acoustic waves to vibrate, such that the piezoelectric transduction layers are driven to deform and generate corresponding electrical signals.

Sensor devices, systems, and methods for measuring different components of a flow are provided. A sensing arrangement includes a substrate and first and second sensor arrays on the substrate. The first sensor array sensing elements are distributed to obtain measurement data indicative of a first property of an operating environment, such as a turbulent component of a fluid flow. The second sensor array sensing elements are interspersed amongst the first sensor array and distributed to obtain measurement data indicative of a second property of the operating environment, such as an acoustic component of the fluid flow.

Sensor devices, systems, and methods for measuring different components of a flow are provided. A sensing arrangement includes a substrate and first and second sensor arrays on the substrate. The first sensor array sensing elements are distributed to obtain measurement data indicative of a first property of an operating environment, such as a turbulent component of a fluid flow. The second sensor array sensing elements are interspersed amongst the first sensor array and distributed to obtain measurement data indicative of a second property of the operating environment, such as an acoustic component of the fluid flow.

A sensor includes a housing having a accommodating room, a flexible plate provided in the accommodating room and moveable to induce a medium pressure change in the accommodating room, and a pressure sensing component for sensing the pressure change. The pressure sensing component and the flexible plate are assembled and moveable together. In the sensor of the present invention, after an external signal to be sensed is transmitted to the sensor, the flexible plate moves to induce air disturbances, and then the pressure sensing component receives a pressure change induced by the air disturbances and performs signal sensing. Compared with the conventional sound sensor, the sensor of the present invention provides no opening communicating with the external environment. Therefore, the impact of foreign objects, noise and other environmental factors on the sensor can be avoided, and the signal generated by the object not to be sensed can be effectively reduced.

A sensor includes a housing having a accommodating room, a flexible plate provided in the accommodating room and moveable to induce a medium pressure change in the accommodating room, and a pressure sensing component for sensing the pressure change. The pressure sensing component and the flexible plate are assembled and moveable together. In the sensor of the present invention, after an external signal to be sensed is transmitted to the sensor, the flexible plate moves to induce air disturbances, and then the pressure sensing component receives a pressure change induced by the air disturbances and performs signal sensing. Compared with the conventional sound sensor, the sensor of the present invention provides no opening communicating with the external environment. Therefore, the impact of foreign objects, noise and other environmental factors on the sensor can be avoided, and the signal generated by the object not to be sensed can be effectively reduced.