A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.

Apparatuses, systems and methods of providing heat to enable an FDM additive manufacturing nozzle having refined print control and enhanced printing speed. The heating element may include at least one sheath sized to fittedly engage around an outer circumference of the FDM printer nozzle; at least one wire coil at least partially contacting an inner diameter of the sheath; and at least one energy receiver associated with the at least one wire coil.

A heater cable produces a substantially level voltage across its cross-section, providing a uniform and controllable thermal output along its length. The heater cable includes at least one center bus wire extending axially along a central axis of the heater cable, and at least one radial bus wire extending axially through the heating cable and positioned adjacent to the center bus wire. The heater cable further includes a thermally and electrically conductive interstitial material disposed around the at least one center bus wire and the at least one radial bus wire, and a jacket disposed about the interstitial material, the at least one center bus wire, and the at least one radial bus wire.

The present disclosure provides a flexible workpiece pedestal capable of tilting a workpiece support surface. The workpiece pedestal further includes a heater mounted on the workpiece support surface. The heater includes a plurality of heating sources such as heating coils. The plurality of heating sources in the heater allows heating the workpiece at different temperatures for different zones of the workpiece. For example, the workpiece can have a central zone heated by a first heating coil, a first outer ring zone that is outside of the central zone heated by a second heating coil, a second outer ring zone that is outside of the first outer ring zone heated by a third heating coil. By using the tunable heating feature and the tilting feature of the workpiece pedestal, the present disclosure can reduce or eliminate the shadowing effect problem of the related workpiece pedestal in the art.

A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.

A vaporizer for vaporizing a liquefied gas includes a first heat exchanger block having first and second linear conduits extending therethrough, a second heat exchanger block having first and second linear conduits extending therethrough, one or more heaters located between the first and second heat exchanger blocks, and an inlet capacity control valve. The heat exchanger blocks may be fabricated by extruding aluminum. The heaters may be independently powered. At least a portion of the inlet capacity control valve may be located within one of the conduits.

An aerosol generating device includes: a heater including a first electrically conductive track and a second electrically conductive track having a higher temperature coefficient of resistance than the first electrically conductive track; and a controller configured to heat a cigarette accommodated in the aerosol generating device by using the first electrically conductive track in a first temperature change section and heat the cigarette by using the second electrically conductive track in a second temperature change section.

An aerosol generating device includes a heating element of which inner surface have different portions having different structures such that the portions of the heating element may heat corresponding areas of an aerosol generating article which is inserted in the aerosol generating device at different temperatures, thereby providing a good quality of aerosol to the user.

A method of manufacturing an aerosol provision apparatus for heating smokable material to volatilize at least one component of the smokable material, and an aerosol provision apparatus, are described. The method includes providing a heater arrangement for heating smokable material contained in use within the apparatus, the heater arrangement including at least a first heating zone and a second heating zone for heating different portions of the smokable material, providing a temperature sensor for each of the first and second heating zones, each temperature sensor for providing temperature measurements to be used as input temperature measurements for a temperature control loop, the control loop for controlling the heater arrangement to heat its associated respective heating zone to a target temperature based on the input temperature measurements acquired by the associated temperature sensor, and positioning each temperature sensor in its associated heating zone at a respective position selected so that if the heating arrangement were to heat the first and second heating zones so that the temperature sensors measure the same pre-selected target temperature, a temperature gradient across the length of the heating zones between the temperature sensors would be optimized as being substantially flat.

A substrate processing apparatus includes plural heating modules each including a table on which a substrate is placed to be heated, the substrate having plural heated zones. The table has plural heaters each assigned to heat respective ones of the heated zones. Heat generation of the heaters is controlled independently. A control unit controls the heaters such that integrated quantities of heat of the respective heated zones given by the corresponding heaters from first to second time point are substantially identical to each other in each of the heating modules, and are substantially identical to each other among the heating modules. The first time point is set when a temperature transition profile of the substrate is rising toward a process temperature after placing the substrate on the table under a condition where heat generation of the heaters is stable. The second time point is set after the temperature transition profile reaches the process temperature.