A system for detecting an operation failure of a plasma generating device includes a plasma generating device including one or more nozzle units configured to emit a plasma beam, a camera module that generates image data of the plasma beam emitted by the one or more nozzle units, and a control device that detects and determines whether or not the plasma generating device has an operation failure based on the image data received from the camera module, and controls an operation of the plasma generating device according to a result of determining whether or not the plasma generating device has the operation failure.

A plasma filter for treating a gas flow therethrough. The filter has a dielectric barrier plasma electrode assembly including a plurality of electrodes having a dielectric barrier layer coated thereon. The dielectric barrier plasma electrode assembly is configured to produce an atmospheric pressure plasma, A filtration medium is disposed on or between the electrodes, and a photocatalytic material is formed on surfaces of the filtration medium. Upon operation of the plasma filter, the plasma infiltrates voids in the filtration medium, and the gas flow through the filtration medium a) is exposed to reactive species of the plasma, b) interacts with the catalytic material, and c) is exposed to light generated from the plasma.

A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source and a beam shaper. The illumination source can be configured to output illumination having a first pupil power distribution. In embodiments, the beam shaper is configured to receive the illumination having the first pupil power distribution from the illumination source and is further configured to output pump illumination having a second pupil power distribution that is different from the first pupil power distribution.

A microscale gas breakdown device includes a first surface and a second surface. The first surface and the second surface define a gap distance. The device includes a perturbation on the first surface or the second surface. The perturbation is defined by a height value and a radius value. The device includes a current source or a voltage source configured to apply a current or a voltage across the first surface and the second surface. In response to the current or the voltage being applied, a resulting discharge travels along a first discharge path in response to being exposed to a high pressure and a second discharge path in response to being exposed to a low pressure.

A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.

A data collection system includes: a first substrate processing apparatus having a first processing space, a second substrate processing apparatus having a second processing space, and a data collection apparatus connected to the first substrate processing apparatus and the second substrate processing apparatus. The data collection apparatus is configured to compare observed data observed when substrates having the same or similar shapes are processed under the same processing conditions in the first processing space and the second processing space, respectively, and calculate a correction amount for correcting the observed data observed when being processed in the second processing space, and correct the observed data observed when being processed in the second processing space based on the correction amount, and collect corrected observed data, when searching for a processing condition by processing substrates while changing the processing condition in the second processing space.

An ignition apparatus is provided which ignites a mixture of air and fuel gas by plasma to generate an initial flame. The apparatus includes: a spark plug that includes an inner conductor, a cylindrical outer conductor that holds the inner conductor thereinside, and a dielectric that is provided between the inner conductor and the outer conductor, and that generates plasma in a plasma formation space between the inner conductor and the outer conductor; an electromagnetic wave power supply that generates an electromagnetic wave to apply electromagnetic wave power to the spark plug; an evaluation section that evaluates a state of formation of the plasma; a determination section that determines a matching object of the electromagnetic wave based on an evaluation result by the evaluation section; and a coupled state control section that controls a matching condition of the electromagnetic wave so that the electromagnetic wave matches the matching object.

An antenna comprising: a radio frequency (RF) coupler; a transceiver communicatively coupled to the RF coupler; a laser configured to generate a plurality of femtosecond laser pulses so as to create, without the use of high voltage electrodes, a laser-induced plasma filament (LIPF) in atmospheric air, wherein the laser is operatively coupled to the RF coupler such that RF energy is transferred between the LIPF and the RF coupler; and wherein the laser is configured to modulate a characteristic of the laser pulses at a rate within the range of 1 Hz to 1 GHz so as to modulate a conduction efficiency of the LIPF thereby creating a variable impedance LIPF antenna.

The present invention relates to a planar-type plasma diagnosis apparatus comprising: a transmission antenna for applying a frequency-variable microwave to plasma; a reception antenna for receiving the microwave from the plasma; and a body part encompassing the transmission antenna and the reception antenna so that same are insulated from each other, wherein the upper surface of the transmission antenna for applying the microwave and the upper surface of the reception antenna for receiving the microwave are planar, and side surfaces of the upper surfaces of the transmission antenna and the reception antenna face each other.

A plasma interaction simulator is presented. The simulator magnetically induces multiple distinct flows of plasma within a physical plasma vessel. The plasma flows collide with each other at flow interaction boundaries where discontinuities arising due to differences between the flows give rise to interactions. Sensors can be incorporated into the plasma simulator to observe and collect data about the plasma flow interactions.