In a microwave plasma source, a tubular magnet portion has a first opening end and a second opening end. The first opening end has a first polarity, and the second opening end has a second polarity. The tubular body is surrounded by the tubular magnet portion. A first magnetic circuit portion closes the first opening end. A second magnetic circuit portion is disposed opposite to the first magnetic circuit portion. The second magnetic circuit portion has a first opening part. An antenna penetrates the first magnetic circuit portion, is introduced to a space, and supplies microwave power to the space. The nozzle portion has a second opening part that has a smaller opening area than the first opening part and communicates with the first opening part. When an inner diameter of the tubular body is represented by a (mm), and a microwave cutoff wavelength of the microwave power being supplied to the space is represented by λ (mm), the microwave plasma source is configured to satisfy a relational expression λ>3.41×(a/2).

In a microwave plasma source, a tubular magnet portion has a first opening end and a second opening end. The first opening end has a first polarity, and the second opening end has a second polarity. The tubular body is surrounded by the tubular magnet portion. A first magnetic circuit portion closes the first opening end. A second magnetic circuit portion is disposed opposite to the first magnetic circuit portion. The second magnetic circuit portion has a first opening part. An antenna penetrates the first magnetic circuit portion, is introduced to a space, and supplies microwave power to the space. The nozzle portion has a second opening part that has a smaller opening area than the first opening part and communicates with the first opening part. When an inner diameter of the tubular body is represented by a (mm), and a microwave cutoff wavelength of the microwave power being supplied to the space is represented by λ (mm), the microwave plasma source is configured to satisfy a relational expression λ>3.41×(a/2).

Method and apparatus for heating and/or compressing plasmas to thermonuclear temperatures and densities are provided. In one aspect, at least one of at least two plasmoids separated by a distance is accelerated towards the other. The plasmoids interact, for instance to form a resultant plasmoid, to convert a kinetic energy into a thermal energy. The resultant plasmoid is confined in a high energy density state using a magnetic field. One or more plasmoids may be compressed. Energy may be recovered, for example via a blanket and/or directly via one or more coils that create a magnetic field and/or circuits that control the coils.

Method and apparatus for heating and/or compressing plasmas to thermonuclear temperatures and densities are provided. In one aspect, at least one of at least two plasmoids separated by a distance is accelerated towards the other. The plasmoids interact, for instance to form a resultant plasmoid, to convert a kinetic energy into a thermal energy. The resultant plasmoid is confined in a high energy density state using a magnetic field. One or more plasmoids may be compressed. Energy may be recovered, for example via a blanket and/or directly via one or more coils that create a magnetic field and/or circuits that control the coils.

In a plasma reactor for processing a workpiece, an electron beam is employed as the plasma source, and sputtered metal atoms are removed from the electron beam to reduce contamination.

A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.

A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. The system may include an illumination source configured to output a pump beam, one or more focusing optics, and one or more beam shapers configured to reshape the pump beam to provide a shaped pupil power distribution at an illumination pupil plane of the one or more focusing optics. The shaped pupil power distribution may include at least one of a flat-top distribution or an inverted distribution with a central local intensity minimum. Further, the one or more focusing optics may receive the pump beam from the one or more beam shapers and direct the pump beam to a plasma-forming material, whereby the pump beam at least one of forms or maintains a plasma that emits broadband illumination.

An energy storage system includes a plasma battery and a reconverter to convert energy stored in the plasma battery to electricity. The plasma battery and the reconverter are coupled by a non-neutral plasma duct. The plasma battery includes a plasma battery supercell. The plasma battery supercell includes a plasma battery cell which includes a plasma containment fiber. The plasma containment fiber includes one or more concentric shells to store non-neutral plasma ions for energy storage. The plasma battery may include additional plasma battery supercells, which may be separated by a separator. The plasma battery includes an enclosure to provide electromagnetic shielding. The reconverter includes a power outlet to power an electric load.

An energy storage system includes a plasma battery and a reconverter to convert energy stored in the plasma battery to electricity. The plasma battery and the reconverter are coupled by a non-neutral plasma duct. The plasma battery includes a plasma battery supercell. The plasma battery supercell includes a plasma battery cell which includes a plasma containment fiber. The plasma containment fiber includes one or more concentric shells to store non-neutral plasma ions for energy storage. The plasma battery may include additional plasma battery supercells, which may be separated by a separator. The plasma battery includes an enclosure to provide electromagnetic shielding. The reconverter includes a power outlet to power an electric load.

Systems and methods that facilitate forming and maintaining FRCs with superior stability as well as particle, energy and flux confinement and, more particularly, systems and methods that facilitate forming and maintaining FRCs with elevated system energies and improved sustainment utilizing neutral beam injection and high harmonic fast wave electron heating.