Patent classifications
H01L27/016
Fully-printed stretchable thin-film transistors and integrated logic circuits
Printable and stretchable thin-film devices and fabrication techniques are provided for forming fully-printed, intrinsically stretchable thin-film transistors and integrated logic circuits using stretchable elastomer substrates such as polydimethylsiloxane (PDMS), semiconducting carbon nanotube network as channel, unsorted carbon nanotube network as source/drain/gate electrodes, and BaTiO.sub.3/PDMS composite as gate dielectric. Printable stretchable dielectric layer ink may be formed by mixing barium titanate nanoparticle (BaTiO.sub.3) with PDMS using 4-methyl-2-pentanone as solvent.
INTEGRATED THIN FILM RESISTOR AND METAL-INSULATOR-METAL CAPACITOR
The present disclosure relates to semiconductor structures and, more particularly, to an integrated thin film resistor with a metal-insulator-metal capacitor and methods of manufacture. The structure includes: a first buffer contact on a substrate; a second buffer contact on the substrate, the second buffer contact being on a same wiring level as the first buffer contact; a resistive film contacting the first buffer contact and the second buffer contact, the resistive film extending on the substrate between the first buffer contact and the second buffer contact; and electrical contacts landing on both the first buffer contact and the second buffer contact, but not directly contacting with the resistive film.
SEMICONDUCTOR DEVICE, CAPACITOR DEVICE AND MANUFACTURE METHOD OF CAPACITOR DEVICE
The present disclosure provides a semiconductor device, and a capacitor device and its manufacture method, and relates to the field of semiconductor technologies. The manufacture method includes: forming, on a substrate, a plurality of storage node contact plugs distributed in an array and an insulation layer separating each of the storage node contact plugs; forming an electrode supporting structure on a side of the insulation layer away from the substrate, the electrode supporting structure having a plurality of through holes exposing each of the storage node contact plugs respectively, the through hole comprising a plurality of hole segments end-to-end jointing successively, the hole segment located on a side close to the substrate having an aperture greater than the hole segment located on a side away from the substrate; forming a dielectric layer; forming a second electrode layer.
SEMICONDUCTOR STRUCTURE
A semiconductor structure includes a first inductor, a second inductor, and a first input/output (I/O) pad. The first I/O pad is coupled to the first inductor and the second inductor. The first I/O pad, a first central axis of a first magnetic field of the first inductor, and a second central axis of a second magnetic field of the second inductor are disposed sequentially along a first direction.
DEVICE INCLUDING MIM CAPACITOR AND RESISTOR
A method of making a semiconductor device, includes: providing a first dielectric layer; sequentially forming a first metal layer, a dummy capacitor dielectric layer, and a second metal layer over the first dielectric layer; and using a single mask layer with two patterns to simultaneously recess two portions of the second metal layer so as to define a metal thin film of a resistor and a top metal plate of a capacitor.
DEVICE INCLUDING MIM CAPACITOR AND RESISTOR
A method of making a semiconductor device, includes: providing a first dielectric layer; sequentially forming a first metal layer, a dummy capacitor dielectric layer, and a second metal layer over the first dielectric layer; and using a single mask layer with two patterns to simultaneously recess two portions of the second metal layer so as to define a metal thin film of a resistor and a top metal plate of a capacitor.
SEMICONDUCTOR DEVICE AND METAL-OXIDE-SEMICONDUCTOR CAPACITOR STRUCTURE
A semiconductor device is disposed below an inductor. The semiconductor device includes a metal-oxide-semiconductor capacitor structure and a patterned shielding structure. The metal-oxide-semiconductor capacitor structure includes a polysilicon layer, an oxide definition layer, and a first metal layer. The first metal layer is connected to the polysilicon layer and the oxide definition layer. The patterned shielding structure is disposed over the metal-oxide-semiconductor capacitor structure and includes a second metal layer.
Polarization circuit of a power component
The invention aims for a polarisation circuit of a power component comprising a capacitive dividing bridge and a resistive dividing bridge formed on the same substrate as the component. An additional electrode 1′ in the front face 100 of the substrate makes it possible to adjust one of the capacitance values of the capacitive dividing bridge according to the other of the capacitance values coming from one of the electrodes of the power component. The sizing of this additional electrode furthermore makes it possible to obtain a leakage resistance contributing to the resistive dividing bridge. Alternatively, two additional resistances R, R′ formed in the front face of the substrate making it possible to obtain the resistive dividing bridge independently of the capacitive dividing bridge.
INTEGRATED RC ARCHITECTURE, AND METHODS OF FABRICATION THEREOF
RC architectures are provided that include a substrate provided with a capacitor having a thin-film top electrode portion at a surface of the substrate on one side thereof. The resistance provided in series with the capacitor is controlled by providing a contact plate, spaced from the thin-film top electrode portion, and a set of plural bridging contacts extending between, and electrically interconnecting, the thin-film top electrode portion and the contact plate. Different resistance values can be set by appropriate selection of the number of bridging contacts. The capacitor can be a three-dimensional capacitor and contacts are then provided on respective first and second sides of the substrate, which face each other in the thickness direction of the substrate.
STRUCTURES FOR TESTING NANOSCALE DEVICES INCLUDING FERROELECTRIC CAPACITORS AND METHODS FOR FORMING THE SAME
A ferroelectric device structure includes an array of ferroelectric capacitors overlying a substrate, first metal interconnect structures electrically connecting each of first electrodes of the array of ferroelectric capacitors to a first metal pad embedded in a dielectric material layer, and second metal interconnect structures electrically connecting each of the second electrodes of the array of ferroelectric capacitors to a second metal pad embedded in the dielectric material layer. The second metal pad may be vertically spaced from the substrate by a same vertical separation distance as the first metal pad is from the substrate. First metal lines laterally extending along a first horizontal direction may electrically connect the first electrodes to the first metal pad, and second metal lines laterally extending along the first horizontal direction may electrically connect each of the second electrodes to the second metal pad.