H01S3/0078

Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device
11366070 · 2022-06-21 · ·

A pulsed light generation device includes: an optical coupler having four input/output ports including a first port, a second port, a third port and a fourth port; a connection optical path that connects the third port with the fourth port; and a phase modulation element disposed in the connection optical path. The optical coupler branches pulsed light input to the first port and outputs the branched input pulsed light as first-direction pulsed light and second-direction pulsed light to the third port and to the fourth port. The modulation element applies phase modulation to either one of the first-direction pulsed light and the second-direction pulsed light, thereby outputs output pulsed lights through the first port and the second port, wherein a waveform of one of the pulsed lights output through the first port is different from a waveform of the other of the output pulsed lights output through the second port.

DRIVEN-CAVITY FEMTOSECOND SOURCES
20220190541 · 2022-06-16 ·

Optical pulse sources. In one example, the pulse source includes an optical fiber ring resonator with at least one normal dispersion fiber segment characterized by a positive group velocity dispersion (GVD) per unit length and at least one anomalous dispersion fiber segment characterized by a negative GVD per unit length. In another example, the pulse source includes an optical fiber ring resonator with one or more fiber segments having a positive net group velocity dispersion (GVD); and an intracavity spectral filter optically coupled to the one or more fiber segments. The pulse source is configured to generate one or more optical solitons in the optical fiber ring resonator.

Device for Improving Laser Wavelength Conversion Efficiency and High-power Multi-wavelength Fiber-format Femtosecond Laser System Using the Device
20220190544 · 2022-06-16 · ·

This invention provides a device for improving laser wavelength conversion efficiency and a laser system configured to provide high-power multi-wavelength femtosecond laser pulses using the device. The device for improving laser wavelength conversion efficiency comprises a wavelength conversion member photonic crystal fiber (PCF), wherein the device for improving laser wavelength conversion efficiency improves wavelength conversion efficiency by shortening the length of the PCF. The device provided in this invention not only reduces the attenuation and dispersion caused by the optical fiber, but also improves the energy conversion efficiency within a specific wavelength range. The use of the technique not only increases the energy of light pulse, but also greatly reduces the amount of fiber used, and can maximize the energy of the desired wavelength according to experimental requirements when using laser input sources of different wavelengths.

Integrated fourier domain mode-locked optoelectronic oscillator, application and communication system

An integrated Fourier domain mode-locked optoelectronic oscillator and its application and a communication system are provided, which relates to the technical field of microwave photonics. The integrated Fourier domain mode-locked optoelectronic oscillator includes an optoelectronic chip and an electronic chip. The optoelectronic chip includes a laser, a modulator, an optical notch filter, and a photodetector coupled via an optical waveguide. The electronic chip includes an electrical amplifier and a power splitter coupled via a coplanar microwave waveguide. The volume, weight and power consumption of the Fourier domain mode-locked optoelectronic oscillator is greatly reduced by integrating all the devices on the chip. A tunable sweeping microwave signal output is realized, and the sweeping speed of the output signal is increased. The integrated Fourier domain mode-locked optoelectronic oscillator can be used in radars and communication systems.

Method and apparatus for measuring optical pulses
11362481 · 2022-06-14 · ·

A pulse analysis system or method includes a frequency filter that receives an ultrafast pulse under test and disperses the pulse under test over a frequency range. The frequency filter separates the pulse under test into component frequency slices and provides the frequency slices to a detector coupled to a digitizer, which processes the digitized signal and collects a sonogram characteristic of the pulse under test. The frequency slices are arranged to overlap. Ptychography is performed on the sonogram to obtain characteristics of the pulse under test.

METHOD FOR SPATIALLY OR TEMPORALLY SHAPING A LASER BEAM

The present invention concerns an iterative method for spatially or temporally shaping a laser beam. The spatial shaping of the beam uses a light valve and the temporal shaping of a pulse uses a Mach-Zehnder modulator. At each spatial shaping iteration, the profile of the observed beam is projected onto an adapted basis set in order to obtain observed profile components in this basis set. The ratios are calculated between the components of a setpoint profile in this basis set and the components of the observed profile, and the ratio of the profiles at the output of the light valve is deduced. The control for each element of the valve is then determined as the product of the control for this same element, obtained at the previous iteration, and the ratio of the profiles for the position of this element, obtained at the current iteration.

HIGH-PEAK-POWER SINGLE-FREQUENCY NARROW-LINEWIDTH NANOSECOND FIBER LASER BASED ON A TRIANGULAR PULSE
20220181839 · 2022-06-09 ·

The present invention discloses a high-peak-power single-frequency narrow-linewidth nanosecond fiber laser based on a triangular pulse, wherein the laser includes: pulsed laser generated by the laser seed injecting into a first power pre-amplifier through a first isolator, and then injecting into a second pre-amplifier and then injecting into a power amplifier; wherein triangle-shaped pulsed laser with fast rising edge is obtained by using electro-optic and acousto-optic modulator to modulate continuous wave single-frequency laser or a single-frequency semiconductor laser directly modulated by radio frequency signal; single-frequency triangle-shaped pulsed laser is employed as the laser source according to the characteristics of narrow intrinsic linewidth and suppression of linewidth broadening caused by SPM, and the power of pulsed laser is amplified through the MOPA system.

FREQUENCY SWEPT SOURCE APPARATUS

Disclosed is a frequency swept source apparatus including a mode locking laser that outputs an input optical signal having first to n-th frequency components, a transmission delay controller that generates first to m-th sub-optical signals, each of which includes at least one component of the first to n-th frequency components, and outputs a delay optical signal obtained by sequentially delaying the first to m-th sub-optical signals. The transmission delay controller includes a demultiplexer that outputs the first to m-th sub-optical signals to first to m-th channels based on the input optical signal, respectively, a path delay unit that adjusts lengths of optical paths of the first to m-th channels so as to be different from one another, a refractive index controller that adjusts a refractive index of each of the first to m-th channels, and a multiplexer that combines the first to m-th sub-optical signals.

TUNABLE BROADBAND RANDOM OPTOELECTRONIC OSCILLATOR

The present disclosure provides a tunable broadband random optoelectronic oscillator, including: a laser light source configured to generate continuous laser light; a positive feedback loop formed by an intensity modulator, an optical circulator, an optical filter, an optical amplifier, a photodetector, an electric filter and an electric amplifier connected in sequence, wherein the positive feedback loop is configured to receive the continuous laser light to generate a microwave signal and achieve an optic-electro/electro-optic conversion; a Raman laser configured to generate Raman pump light; a wavelength division multiplexer having a first input terminal connected to the Raman laser and a second input terminal connected to the optical circulator; and a dispersion compensation fiber connected to an output terminal of the wavelength division multiplexer; wherein forward transmission laser light passing through the optical circulator and the Raman pump light are coupled into the dispersion compensation fiber through the wavelength division multiplexer.

PRESSURE-CONTROLLED SPECTRAL FEATURE ADJUSTER
20220158401 · 2022-05-19 ·

An apparatus includes a gas discharge system including a gas discharge chamber and configured to produce a light beam; and a spectral feature adjuster in optical communication with a pre-cursor light beam generated by the gas discharge chamber. The spectral feature adjuster includes: a body defining an interior that is held at a pressure below atmospheric pressure; at least one optical pathway defined between the gas discharge chamber and the interior of the body, the optical pathway being transparent to the pre-cursor light beam; and a set of optical elements within the interior, the optical elements configured to interact with the pre-cursor light beam.