A tunable laser assembly uses a fundamental wavelength between 1 μm and 1.1 μm to alternately generate laser output light at two or more output wavelengths within the range of 184 nm to 200 nm by directing the fundamental light through different regions of a fan-out periodically poled nonlinear crystal to generate corresponding different down-converted signals, and using different nonlinear summing crystals to mix the different down-converted signals with a fifth harmonic of the fundamental wavelength. Each nonlinear summing crystal has a crystal axis aligned at an angle relative to the light propagation direction to facilitate the efficient transmission and summing of the fifth harmonic with an associated down-converted signal. In response to a user-selected output wavelength, a frequency control system positions the fan-out periodically poled nonlinear crystal to generate a corresponding down-converted signal frequency and positions an associated nonlinear summing crystal to receive the fifth harmonic and the corresponding down-converted signal.

The present invention provides a fiber laser system, comprising: a master laser cavity for generating a master laser beam; a beam splitter for splitting the master laser beam into a first beam for generating a first color pulsed laser beam and a second beam for generating a second color pulsed laser beam; and a synchronization component configured to synchronize the first color pulsed laser beam and a second color pulsed laser beam based on coherent wavelength generation.

Laser plasma optical device comprising a laser system for outputting driving light pulses and signal light pulses, a vacuum target chamber, a gas target generating device for generating gas and forming a required plasma channel target through high voltage capillary discharge ionization (or through laser picosecond pre-pulse ablation) of gas, and a focusing element. The driving light pulse is focused on the generated plasma channel target through the focusing element to generate a density-modulated plasma wake; and after a predetermined delay time T, the signal light pulse is focused onto a leading edge region of a second plasma density cavitation bubble of the plasma wake through the focusing element, so that the frequency of the signal light pulse is red-shifted to generate an ultra-intense near-single-cycle mid-infrared pulse.

Methods and devices are described for performing an all-phase measurement of an ultra-fast laser pulse having a spectral range of greater than one octave. The ultra-fast laser pulse may be split into a first beam comprising a fundamental light with a wavelength λ.sub.0 and a second beam comprising a light with a wavelength 2λ.sub.0. The light with the wavelength 2λ.sub.0 may be frequency doubled to a light with a wavelength λ.sub.0 to generate an interference with the fundamental light. Fourier transform may be performed on an interference spectrum of the interference, and a relative envelope delay (RED) between the fundamental light and the frequency doubled light and a carrier envelope phase (CEP) may be acquired based on a result of the Fourier transform.

A method for amplifying an ultrashort laser pulse includes: a) stretching the ultrashort laser pulse in time, b) amplifying the time-stretched laser pulse, c) compressing the amplified time-stretched laser pulse, with at least one gain phase contribution selected from a group consisting of a gain dynamics phase contribution of the laser pulse that emerges as a change in a nonlinear phase on account of gain dynamics in step b), a gain bandwidth phase contribution of the laser pulse that emerges as a change in the nonlinear phase on account of a gain bandwidth in step b), and a combination thereof, being compensated by virtue of d) an additional phase contribution being imparted on the laser pulse prior to step c) and/or e) a spectrum of the laser pulse being changed, in such a way that the at least one gain phase contribution is compensated after step c).

An ultraviolet laser apparatus includes: a semiconductor laser that emits an excitation laser light; a fiber laser medium to which the excitation laser light enters from the semiconductor laser and that causes laser oscillation; and an external resonator that: converts a wavelength of a laser light oscillated in the fiber laser medium, and outputs an ultraviolet region continuous wave of at least 0.1W.

An exposure system according to an aspect of the present disclosure includes a laser apparatus that outputs pulsed laser light, an illuminating optical system that guides the pulsed laser light to a reticle, a reticle stage, and a processor that controls the output of the pulsed laser light from the laser apparatus and the movement of the reticle performed by the reticle stage. The reticle has a first region where a first pattern is disposed and a second region where a second pattern is disposed, and the first and second regions are each a region continuous in a scan width direction perpendicular to a scan direction of the pulsed laser light, with the first and second regions arranged side by side in the scan direction. The processor controls the laser apparatus to output the pulsed laser light according to each of the first and second regions by changing the values of control parameters of the pulsed laser light in accordance with each of the first and second regions.

An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.

A decrease of an output of a wavelength converted light converted by a nonlinear optical crystal is suppressed. A light source apparatus according to the present disclosure includes a fundamental wave light source configured to generate a fundamental wave which is a continuous oscillation laser beam, an external cavity including a plurality of optical mirrors, a nonlinear optical crystal installed inside the external cavity and configured to generate a light with a wavelength shorter than that of the fundamental wave. The light source apparatus includes at least one phase modulator disposed between the fundamental wave light source and the external cavity and configured to modulate the fundamental wave by a modulation frequency of an integer multiple of a resonance frequency interval of the external cavity.

The present invention is notably directed to methods and systems for generating a CEP-stable optical pulse of optical carrier frequency f.sub.i from input optical pulses, the input optical pulses having an optical carrier frequency f.sub.p and pulse duration T.sub.p. A birefringent medium, a non nonlinear medium, a dispersive optical system, a parametric device (DFG) are successively used to achieve the generation.