H01S3/13

Laser apparatus, EUV light generating system, and electronic device manufacturing method
11532920 · 2022-12-20 · ·

A laser apparatus according to the present disclosure includes an excitation light source configured to output excitation light, a laser crystal disposed on an optical path of the excitation light, a first monitor device disposed on an optical path of transmitted excitation light after having transmitted through the laser crystal to monitor the transmitted excitation light, a temperature adjustment device configured to adjust a temperature of the excitation light source to a constant temperature based on a temperature command value, and a controller configured to change the temperature command value based on a result of monitoring by the first monitor device.

Spectral feature selection and pulse timing control of a pulsed light beam

A method includes driving, while producing a burst of pulses at a pulse repetition rate, a spectral feature adjuster among a set of discrete states at a frequency correlated with the pulse repetition rate; and in between the production of the bursts of pulses (while no pulses are being produced), driving the spectral feature adjuster according to a driving signal defined by a set of parameters. Each discrete state corresponds to a discrete value of a spectral feature. The method includes ensuring that the spectral feature adjuster is in one of the discrete states that corresponds to a discrete value of the spectral feature of the amplified light beam when a pulse in the next burst is produced by adjusting one or more of: an instruction to the lithography exposure apparatus, the driving signal to the spectral feature adjuster, and/or the instruction to the optical source.

LIGHT TRANSMISSION UNIT, LASER APPARATUS, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICES
20220393422 · 2022-12-08 · ·

A laser apparatus according to an aspect of the present disclosure includes a laser oscillator that outputs pulsed laser light, a deformable mirror including a deformer that deforms a reflective surface, a first processor that drives the deformer during the period for which the reflective surface reflects the pulsed laser light, a homogenizer that homogenizes the pulsed laser light reflected off the deformable mirror, and a spectrum measuring instrument that measures the spectrum of the pulsed laser light homogenized by the homogenizer.

MITIGATING STIMULATED BRILLOUIN SCATTERING IN HIGH POWER OPTICAL AMPLIFIER SYSTEM
20220393423 · 2022-12-08 ·

A system has fiber amplifiers that amplify a seed signal into a high power signal. Control circuity drives the fiber amplifiers. An auxiliary broad-linewidth signal can be selectively introduced to mitigate the onset of Stimulated Brillouin Scattering (SBS) when the primary input seed source does not meet the requirements of power and/or linewidth. To determine whether to mitigate SBS, an input photodiode can detect the seed signal, and the control circuity can detect an operational parameter associated with a detected signal indicative of an onset of SBS on the optical path. In response to the detection, the control circuitry introduces an auxiliary broad-linewidth signal from a broad-linewidth source, which can mitigate the onset of SBS on the optical path.

Methods and apparatus for measuring and locking ultra-fast laser pulses

Methods and devices are described for performing an all-phase measurement of an ultra-fast laser pulse having a spectral range of greater than one octave. The ultra-fast laser pulse may be split into a first beam comprising a fundamental light with a wavelength λ.sub.0 and a second beam comprising a light with a wavelength 2λ.sub.0. The light with the wavelength 2λ.sub.0 may be frequency doubled to a light with a wavelength λ.sub.0 to generate an interference with the fundamental light. Fourier transform may be performed on an interference spectrum of the interference, and a relative envelope delay (RED) between the fundamental light and the frequency doubled light and a carrier envelope phase (CEP) may be acquired based on a result of the Fourier transform.

Control Method And Optical Fiber Amplifier

Disclosed are a control method and an optical fiber amplifier. The optical fiber amplifier is configured to execute the control method. The method comprises: initially correcting a target gain on the basis of a first compensation gain to obtain an initially corrected target gain; when the actual power of the pump laser reaches target power determined on the basis of the initially corrected target gain obtaining, on the basis of a first signal optical power and a second signal optical power, a second compensation gain and a first compensation slope through calculation; correcting the initially corrected target gain again according to the second compensation gain to obtain a corrected target gain; and correcting a target slope according to the first compensation slope to obtain a corrected target slope. This solution can provide high precision control for the gain and the slope of the optical fiber amplifier.

OPTICAL FIBER AMPLIFIER COMPATIBLE WITH SMALL FORM-FACTOR PLUGGABLES (SFP+) PACKAGE

An optical fiber amplifier compatible with a small form-factor pluggables (SFP+) package includes a housing, and a circuit device and an optical path device that are disposed in the housing, where the housing includes a structure compatible with an SFP+ package and is provided with an accommodation space; both the circuit device and the optical path device are located in the accommodation space, and the optical path device is located below the circuit device; the circuit device is provided with a card edge connector, and the card edge connector can be exposed outside the housing. The optical fiber amplifier compatible with an SFP+ package has a compact internal space. The amplifer has an appearance compatible with a standard SFP+ package. An electrical interface pin also meets a requirement of an existing SFP+ package, and dynamic plugging and plug-and-play can be satisfied.

CONTROLLING A SPECTRAL PROPERTY OF AN OUTPUT LIGHT BEAM PRODUCED BY AN OPTICAL SOURCE
20220385031 · 2022-12-01 ·

A system includes: an optical source including a plurality of optical oscillators; a spectral analysis apparatus; and a controller. Each optical oscillator is configured to produce a light beam. The controller is configured to: determine, based on data from the spectral analysis apparatus, whether the spectral property of the light beam of one of the optical oscillators is different than the spectral property of the light beam of at least another of the plurality of optical oscillators. If the spectral property of the light beam of the first one of the optical oscillators is different than the spectral property of the light beam of another of the optical oscillators, the controller is configured to adjust the spectral property of the light beam of the first one of the optical oscillators or of the light beam of at least one other of the optical oscillators.

LIGHT AMPLIFICATION DEVICE, LIGHT TRANSMISSION SYSTEM, AND LIGHT AMPLIFICATION METHOD

Light amplification devices using coupled multi-core optical fibers have a figure of merit that temporally varies, which makes it difficult to perform performance evaluation and to build a light transmission system using the same. Accordingly, a light amplification device of the present invention comprises: a band control means that controls the wavelength band of a light carrier to generate a band control light; and a band control light amplification means that has a plurality of light amplification media through which the band control light propagates, wherein the band control light amplification means amplifies the band control light in a coupled state in which the light propagating through the plurality of light amplification media induces a crosstalk and wherein the band control means controls the wavelength band such that the band control light having propagated through the plurality of light amplification media has a reduced coherence.

ULTRAVIOLET LASER APPARATUS

An ultraviolet laser apparatus includes: a semiconductor laser that emits an excitation laser light; a fiber laser medium to which the excitation laser light enters from the semiconductor laser and that causes laser oscillation; and an external resonator that: converts a wavelength of a laser light oscillated in the fiber laser medium, and outputs an ultraviolet region continuous wave of at least 0.1W.