A control method for a line narrowed gas laser apparatus is a control method for a line narrowed gas laser apparatus configured to emit a pulse laser beam including a first wavelength component and a second wavelength component. The apparatus includes a laser chamber including a pair of electrodes, an optical resonator including an adjustment mechanism configured to adjust a parameter of an energy ratio of the first and second wavelength components, and a processor in which relation data indicating a relation of the parameter of the energy ratio with a control parameter of the adjustment mechanism is stored. The control method includes receiving a command value of the parameter of the energy ratio from an external device, and acquiring, based on the relation data, a value of the control parameter corresponding to the command value and controlling the adjustment mechanism based on the value of the control parameter.

A narrowed-line gas laser apparatus includes a laser chamber that accommodates a pair of electrodes disposed so as to face each other, an output coupling mirror, and a line narrowing apparatus that forms an optical resonator along with the output coupling mirror, the line narrowing apparatus including an optical system having a first region and a second region on which a first portion and a second portion of a light beam that exits out of the laser chamber are incident, the first and second portions passing through different positions in a direction in which the pair of electrodes face each other, the optical system being configured to suppress an increase in the distance between the optical path axis of the first portion and the optical path axis of the second portion.

An apparatus for combining a plurality of coherent laser beams includes a splitting device for splitting an input laser beam into the plurality of coherent laser beams, a plurality of phase setting devices for adjusting a respective phase of one of the coherent laser beams, and a beam combining device for combining the coherent laser beams, which emanate from a plurality of grid positions of a grid arrangement, to form at least one combined laser beam. The beam combining device has a microlens arrangement with exactly one microlens array for forming the at least one combined laser beam.

An exposure system according to an aspect of the present disclosure includes a laser apparatus emitting a pulse laser beam, an illumination optical system guiding the pulse laser beam to a reticle, a reticle stage moving the reticle, and a processor controlling emission of the pulse laser beam and movement of the reticle. The exposure system performs scanning exposure of a semiconductor substrate by irradiating the reticle with the pulse laser beam. The reticle has first and second regions. The processor instructs the laser apparatus about, based on proximity effect characteristics corresponding to the first and second regions, a value of a control parameter of the pulse laser beam corresponding to each region so that the laser apparatus emits the pulse laser beam with which a difference of the proximity effect characteristic of each region from a reference proximity effect characteristic is in an allowable range.

A medical laser system for outputting laser pulses includes at least one laser cavity configured to generate at least one laser pulse, a rotating mirror configured to receive and reflect the at least one laser pulse, a beam splitter configured to receive and reflect a portion of the at least one laser pulse received from the rotating mirror, an energy-sensing device configured to detect the portion of the at least one laser pulse, an energy measurement assembly configured to generate a measurement signal based on the portion of the at least one laser pulse detected by the energy-sensing device, and a controller. The controller may include a calibration module. The calibration module may be configured to generate at least one categorized calibration table, determine calibration parameters, interpolate the calibration parameters, and cause the at least one laser cavity to generate at least one calibrated laser pulse.

A Lidar system includes a tunable laser configured to generate an output light signal and a photodiode array for receiving light from the tunable laser reflected from a target object. The tunable laser includes a feedback loop including a Mach-Zender interferometer, MZI, receiving the output light signal from the tunable laser, in which the MZI includes two optical paths receiving the output light signal. A phase shifter is provided in one optical path that is operable to produce a pre-determined shift in the phase angle of the light signal passing through the one optical path relative to the phase angle of the light signal passing through the other optical path. A photodiode configured to detect the interference signal generated by the MZI is operable to generate a photodiode current in response thereto. Circuitry converts the photodiode current to a control signal for controlling the tunable laser.

A Lidar system includes a tunable laser configured to generate an output light signal and a photodiode array for receiving light from the tunable laser reflected from a target object. The tunable laser includes a feedback loop including a Mach-Zender interferometer, MZI, receiving the output light signal from the tunable laser, in which the MZI includes two optical paths receiving the output light signal. A phase shifter is provided in one optical path that is operable to produce a pre-determined shift in the phase angle of the light signal passing through the one optical path relative to the phase angle of the light signal passing through the other optical path. A photodiode configured to detect the interference signal generated by the MZI is operable to generate a photodiode current in response thereto. Circuitry converts the photodiode current to a control signal for controlling the tunable laser.

A system includes a laser source configured to generate one or more bursts of laser pulses and a data collection and analysis system. The data collection and analysis system is configured to receive, from the laser source, data associated with the one or more bursts of laser pulses and determine, based on the received data, that the one or more bursts of laser pulses are for external use. The data collection and analysis system is further configured to determine, based on the received data, whether the one or more bursts of laser pulses are for an on-wafer operation or are for a calibration operation.

A control system for frequency control of a laser module, comprising at least one laser module for generating laser radiation, at least one control device coupled or configured to couple to the laser module, and at least one optical resonator coupled or configured to couple to the control device, wherein the control device comprises a semiconductor substrate, a first Pound-Drever-Hall system arranged on the semiconductor substrate and at least one second Pound-Drever-Hall system arranged on the semiconductor substrate, wherein the laser module is coupled to the first Pound-Drever-Hall system of the control device and is configured to couple to the at least second Pound-Drever-Hall system of the control device, wherein the first Pound-Drever-Hall system is coupled to the optical resonator and wherein the second Pound-Drever-Hall system is configured to couple to the optical resonator, and wherein the number of Pound-Drever-Hall systems is greater than the number of laser modules or optical resonators.

A photonic lantern couples light from several fibers or fiber cores into one or more fibers or fiber cores. Photonic lanterns are often used to combine several lower-power beams into a single higher-power beam. They can also be used to couple light from multi-core fibers into single-mode, multi-mode, or other multi-core fibers. By modulating the phases of the input beams, the light can be switched from output to output—for example, between output cores of a multi-core output fiber. If desired, the beams can also be amplified using an active fiber in or coupled to the photonic lantern. A first photonic lantern couples signal light and pump light into the core and cladding, respectively, of an active multi-mode or multi-core fiber. And the active multi-mode or multi-core fiber couples amplified signal light into output fiber(s) via a second photonic lantern.