This disclosure provides planar waveguides with enhanced support and/or cooling. One or more endcaps could be disposed between coating/cladding layers at one or more ends of a core region, where the core region is doped with at least one active ion species and each endcap is not doped with any active ion species that creates substantial absorption at pump and signal wavelengths. A core region could include at least one crystal or crystalline material, and at least one cladding layer could include at least one glass. Different types of coolers could be disposed on or adjacent to different coating/cladding layers. Side claddings could be disposed on opposite sides of a planar waveguide, where the opposite sides represent longer sides of the waveguide. Endcaps and one or more coolers could be sealed to a housing, and coolant can flow through a substantially linear passageway along a length of the waveguide. One side of a planar waveguide could be uncooled.

Laser and inspection systems that generate laser output light at sub-200 nm wavelengths using fundamental light at approximately 1064 nm. A second harmonic generator module generates second harmonic light directed to both an optical parametric (OP) module, which generates down-converted signal (idler light), and to a fifth harmonic generator module, which generates fifth harmonic light. The OP module includes an optical parametric oscillator that is configured to generate the idler signal at approximately 0.5 times the fundamental frequency. The idler light and fifth harmonic light are then mixed by a frequency mixing module to generate the laser output light having an output frequency equal to approximately 5.5 times the fundamental frequency.

A laser amplifier includes a broadband laser gain medium having a first lateral face spaced from an opposing second lateral face at a wedge angle with respect to the first lateral face. At least the first lateral face receives a pump beam and one of the first and second lateral faces receives a seed beam. A first coating on the first lateral face is highly transmissive at the pump beam wavelength. A second coating is disposed on the second lateral face. In one example, the first coating is highly reflective at the seed beam wavelength over a first wavelength band and the second coating is highly reflective at the seed beam wavelength over a second wavelength band (partially or fully) overlapping the first wavelength band.

A radiation system for controlling pulses of radiation comprising an optical element configured to interact with the pulses of radiation to control a characteristic of the pulses of radiation, an actuator configured to actuate the optical element according to a control signal received from a controller, the control signal at least partially depending on a reference pulse repetition rate of the radiation system and, a processor configured to receive pulse information from the controller and use the pulse information to determine an adjustment to the control signal. The radiation system may be used to improve an accuracy of a lithographic apparatus operating in a multi-focal imaging mode.

Operating an optical frequency comb assembly includes operating an optical frequency comb source to generate laser light constituting an optical frequency comb and introducing the laser light into a common light path and seeding at least one branch light path by the laser light from the common light path, the branch light path comprising at least one optical element. For the branch light path, a phase difference of a first frequency mode ν.sub.1 of the optical frequency comb is determined between laser light coupled out at a reference point within the frequency comb assembly upstream of the at least one optical element and laser light coupled out at a measurement point provided in the branch light path downstream of the at least one optical element. Phase correction for the laser light from the branch light path is based on a deviation of the determined phase difference from a target value.

The present invention describes a method and apparatus for mounting a semiconductor disc laser (SDL). In particular there is described a cooling apparatus assembly (12) for mounting the semiconductor disc laser (1) the cooling apparatus assembly comprising a crystalline heat spreader (8) made of diamond, sapphire or SiC and optically contacted to the SDL (1). The apparatus further comprises a heatsink (13) made of copper and a recess (16) located on a first surface (15) of the heatsink. A pliable filler material (17) which may be In or an In alloy is provided within the recess (16) such that when a sealing plate (19) is fastened to the heatsink the SDL (1) is hermetically sealed within the recess. Hermetically sealing the SDL within the recess is found to significantly increase the lifetime of the device comprising the SDL. The heat sink (13) may be water cooled with pipes (14) delivering the water. In case the sealing plate (19) is made from for example Invar, it has an aperture (20).

A MOPA laser system that includes a seed laser configured to output pulsed laser light, an amplifier configured to receive and amplify the pulsed laser light emitted by the seed laser; and a pump laser configured to deliver a pump laser beam to both the seed laser and the amplifier.

According to the invention, a plurality of elementary laser beams (f.sub.i) are generated, the phases of which are adjusted by an electro-optical feedback loop (6, 7i, 8i, 9) implementing the matrix equation of a phase-contrast filtering device (6).

A method of spectrally multiplexing diode pump modules to increase brightness includes generating one or more pump beams from respective diode lasers at a first wavelength in a diode laser package, generating one or more pump beams from respective diode lasers at a second wavelength different from the first wavelength in the diode laser package, wavelength combining at least one of the pump beams at the first wavelength with at least one of the pump beams at the second wavelength to form one or more combined pump beams, and receiving the combined pump beams in a pump fiber coupled to the diode laser package. Laser systems can include multi-wavelength pump modules and a gain fiber having a core actively doped so as to have an absorption spectrum corresponding to the multiple wavelength, the gain fiber situated to receive the pump light and to produce an output beam at an output wavelength.

Apparatus for and method of controlling a laser system capable of generating bursts of pulses of laser radiation having multiple alternate wavelengths in which an element controlling the wavelength is pre-positioned between bursts to be between its position for generating one wavelength and its position for generating another wavelength. Also disclosed is a system that determines an optimal control waveform for the element to move between positions using quadratic programming, dynamic programing, inversion feed forward control, or iterative learning control. A data storage device such as a pre-populated lookup table or a field programmable gate array may be used to store at least one optimal control parameter for each of a plurality of repetition rates.