Patent classifications
H01S3/2375
Optical pulse source apparatus with nonlinear fibre and operable to reduce the optical pulse frequency of optical output pulses
The invention can include an optical pulse source apparatus that includes the nonlinear generation of wavelengths, wherein the optical pulse source can comprise an oscillator for producing optical pulses, the optical pulses having a first wavelength; an optical fiber amplifier for amplifying optical pulses having the first wavelength; a nonlinear optical fiber receiving amplified optical pulses having the first wavelength to nonlinearly produce optical pulses that include wavelengths that are different than the first wavelength; and wherein the optical pulse source is configured so as to be operable to reduce the optical pulse frequency of the nonlinearly produced optical pulses.
Pulsed laser device, processing device, and method of controlling pulsed laser device
A pulsed laser device includes a laser light source, an electro-optic modulator, a laser light source driver, an electro-optic modulator driver, and a controller to control the laser light source driver and the electro-optic modulator driver. The laser light source outputs pulsed laser light pulse-modulated by the laser light source driver. The electro-optic modulator outputs pulsed laser light obtained by causing the electro-optic modulator driver to pulse-modulate the pulsed laser light from the laser light source. The control unit controls the laser light source driver and the electro-optic modulator driver such that the electro-optic modulator turns on at least while the laser light source is on and the electro-optic modulator turns on at least once while the laser light source is off, thereby increasing a duty ratio of the pulse modulation for the electro-optic modulator relative to a duty ratio of the pulse modulation for the laser light source.
LASER SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
A laser system includes a random phase plate in an optical path between a solid-state laser device and an excimer amplifier. Cells of a predetermined shape are periodically arranged on the plate, each cell being a minimum unit region of an irregular pattern, regions of depressions or projections in units of the cells being randomly arranged. When a traveling direction of a laser beam is a Z direction, a discharge direction is a V direction, a direction orthogonal to the V and Z directions is an H direction, an in-plane direction of the plate corresponding to the V direction is a first direction, an in-plane direction of the plate corresponding to the H direction is a second direction, lengths of the cell are d1 in the first direction and d2 in the second direction, an aspect ratio of the cell defined by d2/d1 is 1.2 or more.
LASER DEVICE, AND LASER WAVEFORM CONTROL METHOD
A laser apparatus includes a semiconductor laser element, a waveform calculation unit for calculating input waveform data, a driver circuit for supplying a drive current having a temporal waveform according to the input waveform data to the semiconductor laser element, an optical amplifier for amplifying laser light output from the semiconductor laser element, and a light waveform detection unit for detecting a waveform of laser light after the amplification output from the optical amplifier. The waveform calculation unit compares the waveform of the laser light after the amplification detected by the light waveform detection unit with a target waveform, adjusts a temporal waveform of the input waveform data, and brings the waveform of the laser light after the amplification close to the target waveform.
LASER SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD
A laser system according to one aspect of the present disclosure includes a first solid-state laser device, a wavelength conversion system, an excimer amplifier, and a control unit. The first solid-state laser device includes a first multiple semiconductor laser system, a first semiconductor optical amplifier, and a first fiber amplifier. The first multiple semiconductor laser system includes a plurality of first semiconductor lasers configured to perform continuous wave oscillation in a single longitudinal mode with different wavelengths, a first spectrum monitor, and a first beam combiner. The control unit controls an oscillation wavelength and light intensity of each line of a first multiline spectrum generated by the first semiconductor lasers to obtain an excimer laser beam having at least a target center wavelength or a target spectral line width instructed by an external device.
Dual Brillouin distributed optical fiber sensor and sensing method using Brillouin scattering which allow high-speed event detection and precise measurement
Embodiments relate to a dual Brillouin distributed optical fiber sensing system and a sensing method using Brillouin scattering that detects an event area in which an event occurred quickly by simultaneously measuring multiple correlation points located in an optical fiber under test by using a pump signal modulated with a pulsed gating signal and a continuous wave probe signal, and then precisely measures the corresponding event area by using the probe signal modulated with the pulsed gating signal and the pump signal.
HYBRID SEMICONDUCTOR LASER COMPONENT AND METHOD FOR MANUFACTURING SUCH A COMPONENT
A hybrid semiconductor laser component comprising at least one first emitting module comprising an active zone shaped to emit electromagnetic radiation at a given wavelength; and an optical layer comprising at least one first waveguide optically coupled with the active zone, the waveguide forming with the active zone an optical cavity resonating at the given wavelength. The hybrid semiconductor laser component also comprises a heat-dissipating semiconductor layer, the heat-dissipating semiconductor layer being in thermal contact with the first emitting module on a surface of the first emitting module that is opposite the optical layer. The invention also relates to a method for manufacturing such a hybrid semiconductor laser component.
Laser system
A laser system including: A. a laser apparatus configured to output a pulse laser beam; B. an optical pulse stretcher including a delay optical path for expanding a pulse width of the pulse laser beam; and C. a phase optical element included in the delay optical path and having a function of spatially and randomly shifting a phase of the pulse laser beam. The phase optical element includes a plurality of types of cells providing different amounts of phase shift to the pulse laser beam and arranged irregularly in any direction.
DUAL BRILLOUIN DISTRIBUTED OPTICAL FIBER SENSOR AND SENSING METHOD USING BRILLOUIN SCATTERING WHICH ALLOW HIGH-SPEED EVENT DETECTION AND PRECISE MEASUREMENT
Embodiments relate to a dual Brillouin distributed optical fiber sensing system and a sensing method using Brillouin scattering that detects an event area in which an event occurred quickly by simultaneously measuring multiple correlation points located in an optical fiber under test by using a pump signal modulated with a pulsed gating signal and a continuous wave probe signal, and then precisely measures the corresponding event area by using the probe signal modulated with the pulsed gating signal and the pump signal.
Laser device and extreme ultraviolet light generation device using delay determination at a shutter
A laser device includes: a master oscillator (100) configured to output a pulse laser beam (L) based on a light emission trigger signal (S21); a delay circuit (153) configured to generate a switching signal (S10) after a predetermined delay time has elapsed since reception of the light emission trigger signal (S21); a high voltage switch (304) configured to generate a high voltage pulse based on the switching signal (S10); an optical shutter (32k) positioned on the optical path of the pulse laser beam (L) and driven based on the high voltage pulse; and a high voltage monitor (151) configured to detect the high voltage pulse and transmit a high voltage pulse sensing signal (S6) to the delay circuit (153). The delay circuit (153) determines the delay time based on the light emission trigger signal (S21) and the high voltage pulse sensing signal (S6).