A piezoelectric motorization system has a mechanically flexible body that has one or more surfaces for placing piezoelectric actuators. The system has groups of piezoelectric actuators each positioned on one of the surfaces of the mechanically flexible body that is connected to the electronic circuitry. The electronic circuitry controls the driving of the mechanical loads by the mechanically flexible body by injecting sets of control signals into different groups of actuators positioned on the mechanically flexible body. Each control signal operates groups of driving frequencies with an adjustable amplitude ratio and an adjustable phase difference among driving frequencies. And, under a set of boundary conditions exhibited by a set of structural dimensions of the mechanically flexible body, each control signal induces multi-mode resonance of the mechanically flexible body for driving the mechanical loads multi-dimensionally.

One aspect of the present invention relates to a driver of a vibrator including: a control section; and an alternating current signal generation section configured to generate an alternating current signal based on an output from the control section, and to apply the alternating current signal to the vibrator, wherein the control section is configured to lower a frequency of the alternating current signal, and to change, after the frequency change, at least one of a voltage ratio and a phase difference of the alternating current signal such that the ellipse ratio of the elliptical motion changes from a first ellipse ratio to a second ellipse ratio, the second ellipse ratio has a larger ratio of a component in a moving direction in the elliptical motion to a component in a direction perpendicular to the moving direction in the elliptical motion than the first ellipse ratio.

The disclosure relates to a circuit arrangement that includes a first DC-DC converter that is connected on the output side to a capacitor. A first terminal of the capacitor is a supply voltage terminal and a second terminal of the capacitor is a reference potential terminal. The circuit arrangement also includes a second DC-DC converter, which is connected on the input side with the capacitor and on the output side to a first terminal of a piezo actuator. The second terminal of the piezo actuator is connected to the first terminal of the capacitor.

A nanometer-scale precision actuator comprises a base, an intermediate structure, an output interface, and two linear elements producing a controllable extension in the same longitudinal direction, each between a first and a second end. A first of the two elements has a first end fixed onto the intermediate structure and a second end fixed onto the base, a second of the two elements has a first end fixed onto the intermediate structure and a second end fixed to the output interface. The base and the intermediate structure are positioned in such a manner that the controllable extension of the second element produces a displacement of the actuator in a first direction and the controllable extension of the first element produces a displacement of the actuator in a second direction, opposite to the first direction, with respect to the base.

A nanometer-scale precision actuator comprises a base, an intermediate structure, an output interface, and two linear elements producing a controllable extension in the same longitudinal direction, each between a first and a second end. A first of the two elements has a first end fixed onto the intermediate structure and a second end fixed onto the base, a second of the two elements has a first end fixed onto the intermediate structure and a second end fixed to the output interface. The base and the intermediate structure are positioned in such a manner that the controllable extension of the second element produces a displacement of the actuator in a first direction and the controllable extension of the first element produces a displacement of the actuator in a second direction, opposite to the first direction, with respect to the base.

A method for operating an electromechanical element, comprising the following steps:

by controlling a first control section (A1) which is deformable by an electrical voltage by a first voltage signal (S10) generation of adjusting movements of a friction element which is arranged on the electromechanical element and which is provided for frictional contact with an element (90) to be driven,

controlling of a second control section (A2) which is deformable by an electrical voltage by a second voltage signal (S20), which comprises a signal section (S21), the frequency of which compared to the first voltage signal (S10) is by a factor,

an actor, a drive device with an actor and a motor with a drive device and an element to be driven.

A short-travel nanoscale motion stage and a method for measuring thermally-related hysteresis data are provided. A stator unit of a left two-pole electromagnet and stator units of two inchworm motors are fixed on a right side surface of a left foundation frame, and an active unit of the left two-pole electromagnet and actives of the two inchworm motors are fixed on a left side surface of a stage moving component. An active unit of a right two-pole electromagnet is fixed on a right side surface of the stage moving component, while a stator unit of the right two-pole electromagnet is fixed on a left side surface of a right foundation frame. The stage moving component is fixedly mounted on a guide sleeve of an aerostatic guideway. Each of the stator units of the left and right two-pole electromagnets has an eddy current sensor and a hall sensor fixed therein.

A method for controlling an inertial drive on the basis of pulse trains is disclosed. The pulse trains include pulses having sections of different gradients and having variable amplitude and/or frequency. A pulse interval occurs between the individual pulses, wherein the selected pulse duration is so short that is substantially less than the cycle duration of the natural oscillation of the system to be driven.

A method for controlling an inertial drive on the basis of pulse trains is disclosed. The pulse trains include pulses having sections of different gradients and having variable amplitude and/or frequency. A pulse interval occurs between the individual pulses, wherein the selected pulse duration is so short that is substantially less than the cycle duration of the natural oscillation of the system to be driven.

A vibration presentation device includes: an electrostatic or piezoelectric actuator; a first elastic body laminated on the actuator; a second elastic body laminated on the actuator on the opposite side to the first elastic body; an electrostatic or piezoelectric sensor disposed around the actuator; a cover that holds the first elastic body and the second elastic body such that the first elastic body and the second elastic body are compressed more than the actuator, the cover transmitting, when a pressing force in the laminate direction is applied to the cover from the outside, the pressing force to a sensor, and vibrating by vibration generated by the actuator; and a control device that drives the actuator when the sensor detects the pressing force.