Provided is a film forming device that deposits, on a substrate, a product generated by decomposing raw material gas by a plasma discharged from a discharge port of a double tube, the device including: an inner tube through which raw material gas containing a film-forming raw material flows and is guided to the discharge port on a downstream side; an outer tube that has the inner tube inserted thereinto and through which plasma-generating gas flows and a plasma generated by discharge is guided to the discharge port on the downstream side; a first electrode that is formed in an annular shape around the outer tube and grounded; and a second electrode that is formed in an annular shape around the outer tube and to which a voltage is applied. The second electrode is disposed on the downstream side with respect to the first electrode, and assuming that a length of the second electrode in an axial direction is L1 and a diameter of the outer tube is D1, a relationship of L1D1 is satisfied.

Provided is a film forming device that deposits, on a substrate, a product generated by decomposing raw material gas by a plasma discharged from a discharge port of a double tube, the device including: an inner tube through which raw material gas containing a film-forming raw material flows and is guided to the discharge port on a downstream side; an outer tube that has the inner tube inserted thereinto and through which plasma-generating gas flows and a plasma generated by discharge is guided to the discharge port on the downstream side; a first electrode that is formed in an annular shape around the outer tube and grounded; and a second electrode that is formed in an annular shape around the outer tube and to which a voltage is applied. The second electrode is disposed on the downstream side with respect to the first electrode, and assuming that a length of the second electrode in an axial direction is L1 and a diameter of the outer tube is D1, a relationship of L1D1 is satisfied.

A system to collect sensor data from an interaction between a plasma and a material and use a machine learning system to characterize the material. A method and apparatus for characterizing and evaluating a material. The method includes in one embodiment applying a cold atmospheric plasma to an interface with the material, measuring a plurality of interactions between the plasma and the interface using a plurality of sensors to generate sensor data, and utilizing a trained machine learning model to analyze the sensor data to generate characterization of the bulk and/or surface material properties based on the interactions.

A plasma system comprising a low temperature plasma source incident on a material sample and a plurality of sensors that measure a plurality of different characteristics of the plasma. The plasma system further comprising a feedback control system that receives measurements from the plurality of sensors and adjusts inputs to the low temperature plasma source to control one or more of physical, electrical, electromagnetic, chemical, or thermal characteristics of a plasma generated, at a sub-second rate.

A plasma system comprising a low temperature plasma source incident on a material sample and a plurality of sensors that measure a plurality of different characteristics of the plasma. The plasma system further comprising a feedback control system that receives measurements from the plurality of sensors and adjusts inputs to the low temperature plasma source to control one or more of physical, electrical, electromagnetic, chemical, or thermal characteristics of a plasma generated, at a sub-second rate.

With an atmospheric pressure plasma generating device of the present invention, nozzle block 36 in which fourth gas passages 66 from which plasma gas is emitted are formed, is covered by cover 22, and through-hole 70 is formed in the cover such that the leading end of the fourth gas passage is positioned on the inside. Heated gas is supplied inside the cover. Thus, heated gas is emitted from the through-hole of the cover, and plasma gas is emitted so as to penetrate the heated gas. By the plasma gas being surrounded by the heated gas in this manner, deactivation of the plasma gas is prevented. Also, distance X between the leading end of the fourth gas passage and an opening of the through-hole at an outer wall of the cover is set from 0 to 2 mm in an emission direction of the plasma gas. By this, it is possible to appropriately cover plasma gas with heated gas without obstructing the flow of the plasma gas.

With an atmospheric pressure plasma generating device of the present invention, nozzle block 36 in which fourth gas passages 66 from which plasma gas is emitted are formed, is covered by cover 22, and through-hole 70 is formed in the cover such that the leading end of the fourth gas passage is positioned on the inside. Heated gas is supplied inside the cover. Thus, heated gas is emitted from the through-hole of the cover, and plasma gas is emitted so as to penetrate the heated gas. By the plasma gas being surrounded by the heated gas in this manner, deactivation of the plasma gas is prevented. Also, distance X between the leading end of the fourth gas passage and an opening of the through-hole at an outer wall of the cover is set from 0 to 2 mm in an emission direction of the plasma gas. By this, it is possible to appropriately cover plasma gas with heated gas without obstructing the flow of the plasma gas.

Disclosed is a plasma torch with a structure capable of performing reversed polarity/straight polarity operation, wherein the plasma torch is coupled to a melter and melts a waste material such as radioactive waste or industrial waste by generating and sustaining a plasma arc between electrodes, the plasma torch including: a rear electrode provided inside a torch pipe and electrically connected to become one of an anode and a cathode; and a front electrode provided at a front end of the torch pipe at a position adjacent to a front end of the rear electrode and electrically connected to become a remaining one of the anode and the cathode, wherein electrical connections of the rear and front electrodes are switchable with each other so that the plasma torch operates as a reversed polarity plasma torch or a straight polarity plasma torch.

Methodologies, systems, and devices are provided for producing metal spheroidal powder products. By utilizing a microwave plasma, control over spheriodization and resulting microstructure can be tailored to meet desired demands.

Methodologies, systems, and devices are provided for producing metal spheroidal powder products. By utilizing a microwave plasma, control over spheriodization and resulting microstructure can be tailored to meet desired demands.